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ATOM MAMIPULATION AND EVALUATION OF PROBING TIPS

Research Project

Project/Area Number 05245107
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Research InstitutionKANAZAWA INSTITUTE OF TECHNOLOGY

Principal Investigator

NISHIKAWA Osamu  Kanazawa Institute of Technology, Faculty of Engineering, Professor, 工学郡, 教授 (10108235)

Co-Investigator(Kenkyū-buntansha) ASAHI Hajime  Osaka University Institute of Scientific and Industrial Research, Associate Prof, 産業科学研究所, 助教授 (90192947)
MORIKAWA Hiroshi  Nagaoya Institute of Technology Faculty of Engineering, Associate Professor, 工学郡, 助教授 (90024314)
YAO Takafumi  Tohoku University Institute for Materials Research, Professor, 金属材料研究所, 教授 (60230182)
OSHIMA Chuuhei  Waseda University Faculty of Science and Engineering, Professor, 理工学部, 数授 (10212333)
YAMAMOTO Masahiko  Osaka University Graduate School of Engineering, Professor, 工学研究科, 教授 (30029160)
Project Period (FY) 1993 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥136,600,000 (Direct Cost: ¥136,600,000)
Fiscal Year 1996: ¥19,200,000 (Direct Cost: ¥19,200,000)
Fiscal Year 1995: ¥21,900,000 (Direct Cost: ¥21,900,000)
Fiscal Year 1994: ¥43,500,000 (Direct Cost: ¥43,500,000)
Fiscal Year 1993: ¥52,000,000 (Direct Cost: ¥52,000,000)
Keywordsfield emission microscope (FEM) / field ion microscope (FIM) / atom manipulation / electron spectroscopy / scanning tunneling spectroscopy (STS) / atom probe (AP) / field emission electron spectroscopy (FEES) / scanning tunneling microscope (STM) / 分光(STM / STS) / フタロシアニン / (N11)GaAS / 走査型トンネル顕微鏡(STM) / 原子移動 / イメイジングプレイド(IP) / アトムプローブ(A-P) / 原子間力顕微鏡(AFM) / トンネル確率
Research Abstract

The main subjects of this research on priority areas are the clarification of tunneling mechanism of electrons tunneling utilizing various high resolution microscoppies such as field emission microscopy (FEM), field ion microscopy (FIM) and scanning tunneling microscopy (STM). The electronic states of surfaces are investigated by scanning tunneling spectroscopy (STS) and field emission electron spectroscopy (FEES). However, it has been realized that the tunneling probability between a surface atom and an apex atom of a scanning tip of STM varies with the electronic state and atomic arrangement of the apex. Accordingly, the major aim of this research division is atomic level inspection of the constituent distributions of tip apexes with an atom probe (AP) and of electronic state with FEES and STS.The mechanism of atom manipulation is also studied FIM and STM.Results of this research are listed below.
(1) The FEM/FIM which can introduce imaging plates (IP) was constructed in order to investigate the tunneling probability quantitatively.
(2) A scanning atom probe (SAP) was developed to mass analyze 2-dimensional specimen surfaces. The mass analysis of artificially made diamond was mass analyzed.
(3) High resolution FEES was constructed and detected the atomic and lattice vibrations at the tip apex were detected at 4K.
(4) The electronic states of semicondutor surfaces were controlled by depositing foreign atoms to lattice steps utilizing atom manipulation technique.
(5) Tunneling characteristics of phtalocyanines was investigated examining the binding state with the substrate and measuring I-V curves.
(6) Self-organized quantum dot structures formed in GaP/InP short period superlattices were investigated by STM/STS.

Report

(5 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • 1994 Annual Research Report
  • 1993 Annual Research Report
  • Research Products

    (43 results)

All Other

All Publications (43 results)

  • [Publications] O.Nishikawa,M.Iwatsuki,S.Aoki and Y.Ishikawa: "Performance of the Trial Scanning Atom Probe -A New Approach to Evaluate the Micro Tip Apex-" J.Vac.Sci.Technol.B. 14. 2110-2113 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Nishikawa T.Nishiuchi M.Yamamoto and O.Nishikawa: "Observation of Both Ni and Mo Atom-Images by FIM with Imaging Plates" Applied Surface Sci.94. 295-299 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Ogawa,N.Arai,K.Nagaoka,S.Uchiyama,T.Yamashita,H.Itou and C.Oshima: "Energy Spectra of Field Emission Electrons from a W<310>Tip" Surface Science. 357/358. 371-375 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Komura,M.Yoshimura and T.Yao: "Atomic Structure of the Steps on Si(001)Studied by Scanning Tunneling Microscopy" J.Vac.Sci.Technol.B. 14. 906-908 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Morikawa and K.Okamoto: "Field Emission Microscope Observation of H_2-and Metal-Phthalocyanines" Jpn.J.Appl.Phys.35. 4486-4491 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] J-H.Noh,H.Asahi,S-J.Kim,M.Takemoto and S.Gonda: "Scanning Tunneling Microscopy/Spectroscopy Study of Self-Organized Quantum Dot Structures Formed in GaP/InP Short Period Superlattices" Jpn.J.Appl.Phys.35. 3743-3748 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] O.Nishikawa and M.Kimoto: "Toward a Scanning Atom Probe -Computer Simulation of Electric Field-" Appl.Surf.Sci.76/77. 424-430 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] O.Nishikawa, T.Akimotom, T.TSuchiya, T.Yoshimura and Y.Ishikawa: "Field Ion Microscope with Photostimulable Phosphor Screen -New Approach for Quantitative Analysis of FIM Images-" Appl.Surf.Sci.76/77. 359-366 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] O.Nishikawa, M.Kimoto, M.Iwatsukiand Y.Ishikawa: "Development of a Scanning Atom Probe" J.Vac.Sci.Technol.B. 13. 599-602 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] O.Nishikawa, M.Kimoto, K.Fukui, H.Yanagisawa, M.Takai, T.Akimoto and T.Tsuchiya: "Field Emission and Field Ion Microscopies with Imaging Plates" Surf.Sci.323. 288-294 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] O.Nishikawa, M.Iwatsuki, S.Aoki and Y.Ishikawa: "Performance of the Thrial Scanning Atom Probe -A New Approach to Evaluate the Micro Tip Apex-" J.Vac.Sci.Technol.B. 14. 2110-2113 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Yamamoto, K.Nishikawa and T.Nishiuchi: "Quantitative Analysis of Individual Atom Images in FIM of an Ordered Ni_4Mo Alloy" Appl.Surf.Sci.87/88. 291-297 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Nishikawa T.Nishiuchi, M.Yamamoto and O.Nishikawa: "Observation of Both Ni and Mo Atom-Images by FIM with Imaging Plates" Applied Surface Sci.94. 295-299 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Ogawa, N.Arai, K.Nagaoka, S.Uchiyama, T.Yamashita, H.Itou and C.Oshima: "Energy Spectra of Field Emission Electrons from a W<310>Tip" Surface Science. 357/358. 371-375 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Yoshimura, S.Shinaabe and T.Yao: "STM Study of the Interfacial Structure of Nickel Silicides" J.Vac.Sci.Technol.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Komura, M.Yoshimura and T.Yao: "Atomic Structure of the Steps on Si (001) Studied by Scanning Tunneling Microscopy" J.Vac.Sci.Technol.B. 14. 906 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Morikawa and K.Okamoto: "Field Emission Microscope Observation of H_2-and Metal-Phthalocyanines" Jpn.J.Appl.Phys.35. 4486-4491 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] J-H.Noh, H.Asahi, S-J.Kim, M.Kakemoto and S.Gonda: "Scanning Tunneling Microscopy/Scanning Tunneling Spectroscopy Observation of III-V Compound Semiconductor Nanostructures" Jpn.J.Appl.Phys.35. 3743-3748 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] G.M.McClelland and F.Watanabe: "Field Emission Switch" Appl.Phys.Lett.67. 3200-3202 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] O.Nishikawa,M.Iwatsuki,S.Aoki and Y.Ishikawa: "Performance of the Trial Scanning Atom Probe -A New Approach to Evaluate the Micro Tip Apex-" J.Vac.Sci.Technol.B. 14. 2110-2113 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Nishikawa T.Nishiuchi M.Yamamoto and O.Nishikawa: "Observation of Both Ni and Mo Atom-Images by FIM with Imaging Plates" Applied Surface Sci.94. 295-299 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Ogawa,N.Arai,K.Nagaoka.S,Uchiyama,T.Tamashita,H.Itou and C.Oshima: "Energy Spectra of Field Emission Electrons from a W <310> Tip" Surface Science. 357/358. 371-375 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Komura,M.Yoshimura and T.Yao: "Atomic Structure of the Steps on Si (001) Studied by Scanning Tunneling Microscopy" J.Vac.Sci.Tehnol.B. 14. 906-908 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Morikawa and K.Okamoto: "Eield Emission Microscope Observation of H_2 -and Metal-Phthalocyanines" Jpn.J.Appl.Phys.35. 4486-4491 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] J-H.Noh,H.Asahi,S-J.Kim,M.Takemoto and S.Gonda: "Scanning Tunneling Microscopy/Spectroscopy Study of Self-Organized Quantum Dot Structures Formed in GaP/InP Short Period Superlattices" Jpn.J.Appl.Phys.35. 3743-3748 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M. Ashino, M. Tomitori and O. Nishikawa: "Atom Probe and Field Emission Electron Spectroscopy Studies of Semiconductor Films on Metals" Appl. Surf. Sci.87/88. 12-17 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] O. Nishikawa, M. Iwatsuki, S. Aoki and Y. Ishikawa: "Performance of the Trial Scanning Atom Probe -A New Approach to Evaluate the Micro Tip Apex-" to appear in J. Vac. Sci. Technol. B. 14. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] M. Yamamoto, K. Nishikawa T. Nishiuchi: "Quantitative Analysis of Individual Atom Images in FIM of an Ordered Ni_4Mo Alloy" Appl. Surf. Sci.87/88. 291-297 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] A. Nagashima, N. Tejima, Y. Gamou, T. Kawai, C. Oshima: "Electronic Structure of Monolayer Hexagonal Boron Nitride Physisorbed on Metal Surfaces" Phys. Rev. Lett.75. 3918-3920 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M. Yoshimura S. Shinaabe, T. Yao: "STM Study of the Interfacial Structure of Nickel Silicides" to appear in J. Vac. Sci. Technol.(1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] H. Morikawa, K. Okamoto: "A Field Emission Microscope Observation of H_2-and Metal-Phthalocyanines" to appear in Jpn. J. Appl. Phys.(1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 0.Nishikawa: "Field Emission and Field Ion Microscopies with Imaging Plates" Surf.Sci.323. 288-294 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 0.Nishikawa: "Development of a Scanning Atom Probe" to be published in J.Vac.Sci.TechnolB. 13. (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Yamamoto: "An FIM/TEM Study of Ordered Precipitates in a Ni-Mo-Al Alloy" Appl.Surf.Sci.76/77. 184-190 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] C.Oshima: "High Resolution Fild Emission Spectroscope" J.Vac.Soc.Jpn.37. 772-775 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Takiguchi: "Atomic-Scale Modification of the AlCl_3-Adsorbed Si(111)-7X7 Surface." Appl.Surf.Sci.82/83. 428-433 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Morikawa: "A Field Ion Microscope Study on Vapor Deposition of Copper on Tungsten" Thin Solid films. 254. 103-110 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] Makoto Ashino: "Atom-Probe and Field Emission Electron Spectroscope Studies of Ge on Ir" Appl.Surf.Sci.67. 43-47 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Masahiko Tomitori: "Layered Heteroepitaxial Growth of Germanium on Si(015) Observed by Scanning Tunneling Microscopy" Surf.Sci.301. 214-224 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Nishikawa: "Scanning Tunneling Microscope and Atomic Force Microscope Observation of Topography of Molecular-Beam-Epitaxy-Grown Pt" Jpn.J.Appl.Phys.32. 2940-2944 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Uesugi: "Adsorption and Desorption of AlCl_3 on Si(111)7×7 Observed by Scanning Tunneling Microscopy and Atomic Force Micrsocopy" Jpn.J.Appl.Phys.32. 6200-6202 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Kensaku Imai: "Scanning Tunneling and Atomic Force Microscopy of T4 Bacteriophage and Tobacco Mosaic Virus" Jpn.J.Appl.Phys.32. 2962-2964 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 奥野,公夫: "Pd/M(M:W,Mo,Ta,Nb)原子界面とPd成長層のFIM観察" 真空. 36. 650-656 (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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