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クーロン・ブロッケードを利用したナノパワー超高速エレクトロニクスの研究

Research Project

Project/Area Number 05302035
Research Category

Grant-in-Aid for Co-operative Research (A)

Allocation TypeSingle-year Grants
Research Field 電子デバイス・機器工学
Research InstitutionToyo University

Principal Investigator

菅野 卓雄  東洋大学, 工学部, 教授 (50010707)

Co-Investigator(Kenkyū-buntansha) 谷口 研二  大阪大学, 工学部, 助教授 (20192180)
佐々木 昭夫  京都大学, 工学部, 教授 (10025900)
長谷川 英機  北海道大学, 工学部, 教授 (60001781)
青柳 克信  理化学研究所, 半導体工学研究室, 主任研究員 (70087469)
村山 洋一  東洋大学, 工学部, 教授 (40057956)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥4,800,000 (Direct Cost: ¥4,800,000)
Fiscal Year 1994: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 1993: ¥3,100,000 (Direct Cost: ¥3,100,000)
Keywordsクーロン・ブロッケード / ナノ・パワー・エレクトロニクス / 超高速エレクトロニクス / 単電子トランジスタ / 単電子エレクトロニクス / トンネル現象 / シングル・エレクトロニクス
Research Abstract

平成5年度、6年度を通じ合計8回の研究会を開催し、クーロンブロッケードを利用した電子デバイス、及びそれを用いて構成させる集積回路の特性、特に消費電力と信号伝搬時間について検討を行った。その結果、従来提案されていた単電子トランジスタの構造では室温動作を可能にし、且つファン・アウトを大きくとるために利得を大きくとろうとすると、電極寸法が極めて小さくなって実現不可能な寸法になるが、2重障壁構造を有する単電子トランジスタにすることにより、この問題点が解決できる見通しのあることが判明した。またこの構造を用いることにより、cotunellingの確率も小さくなり、単電子トランジスタの動作を信頼性の高いものとすることも期待されることが明らかになった。
尚利得の問題は信号の担体がそれ自身で信号の伝達経路も決定していく、現在の論理回路の構成に問題があることに鑑み、単電子信号を信号のメッセンジャとする2分決定グラフのデバイス化により、この問題が解決できると共に、単電子回路としてユニークな構成をとり得ることが判明した。
これらの結果を総合することにより、電子のトンネル現象のクーロンブロッケードを利用したナノ・パワー・エレクトロニクスについて、具体的な新しい展望をもつことが可能になった。
また、トンネル現象の動的特性について、誘起電荷も考えることにより、金属電極で狭まれたトンネル障壁と半導体電極で狭まれたトンネル障壁とで異なった特性が生ずることも明らかになり、また、量子ドットを含む系に磁界を加えることにより、Magneto-Coulomb振動も観測できることも明らかになった。
これらの物理的な基礎研究は単電子トランジスタの動的特性の理解に役立つと考えられる。

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (58 results)

All Other

All Publications (58 results)

  • [Publications] Y.Ochiai: "Interference Area of Umiversal Conductance Fluctuation in Narrow GaAs/AlGaAs Wires" Jpn.J.Apple.Phys.32. 528-531 (1993)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Onishi: "Conducttance fluctuations in a quasi-ballistic narrow wire confined by split metal gates" Physica B. 184. 351-354 (1993)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Onishi: "Scaling properties of universal conductance fluctuations in quasi-ballistic split gate wires:Probing geometory effects" Phys.Rev.B48(16). 12353-12356 (1993)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] K.Ishibashi: "Transmission Properties of Quantum Dots at High Magnetic Fields" Jpn.J.Appl.Phys.32/12B. 6246-6250 (1993)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] J.P.Bird: "Experimental Studies of Electronic Transport in Semiconductor Quantum Dot Structures" Solid State Electronics. 37. 709-712 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] J.P.Bird: "Magneto-Coulomb Oscillations" Phys.Rev.B49. 11488-11491 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] 谷口 研二: "単一電子トンネル現象を用いた電子デバイスの可能性" 電気学会誌. 114. 371-375 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Hashizume: "Process-Induced Defects in InP Caused by Chemical Vapor Deposition of Surface Passivation Dielecrics" Jpn.J.Appl.Phys.33/1B. 727-733 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] G.Schweeger: "Fabrication and Characterisation of Direct Schottky Contacts to Two-Dimensional Electron Gas in GaAs/AlGaAsQuantum Wellls." Jpn.J.Appl.Phys.33/1B. 779-785 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] N.-J.Wu: "Formation of Oxide-Free Nearly Ideal Pt/GaAs Schottky Barriers by Novel In Situ Photopulse-Assisted Electrochemical Process" Jpn.J.Appl.Phys.33/1B. 936-941 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Hashizume: "A Novel In-situ Electrochemlical Technology for Formation of Oxide-and Defect-Free Contacts to GaAs and Related Low-Dimensional Structures" J.Vacuum Science & Technology B. 12-4. 2660-2666 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.Ishikawa: "Macroscopic Electronic Behavior and Atomlic Arrangements of GaAs Surfaces Immersed in HCl Solution" J.Vacuum Science & Technology B Second Series. 12-4. 2713-2719 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] J.P.Bird: "Observation of Aharonov-Bohm Oscillation in the Magnetoresistance of a GaAs/AlGaAs Quantum Dot" Jpn.J.Appl.Phys. 2509-2510 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] J.P.Bird: "Coulomb Blockade of the Aharonov-Bohm effect in GaAs/AlGaAs Quantum Dot" Phys.Rev.B50. 14983-14990 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] J.P.Bird: "The Spectral Characteristics of Conductance Fluctuations in Ballistic Quantum Dots" Phys.Rev.B50. 18678-18681 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] M.Stopa: "Magneto-Coulomb Oscillations in GaAs-AlGaAs Quantum Dot Structures" Superlattices and Microstructures22GD16:15. 99-103 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] J.P.Bird: "Giant Backscattering Resonances in the Magncto-resistance of GaAs/AlGaAs Quantum Dots" Superlattices and Microstructures22GD17:16. 161-164 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] 桑野 信博: "単一電子論理回路のシュミレーション" 電子情報通信学会論文誌C-II IEICE77-C-II. 221-228 (1994)

    • Related Report
      1994 Final Research Report Summary
  • [Publications] 桑村信博: "単-電子論理回路のシミュレーション" 電子情報通信学会論文誌C-ll IEICE77-C-ll. NO.5. 221-228 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 谷口研二: "単一電子トンネル現象を用いた電子デバイスの可能性" 電気学会誌. 114. 371-375 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] J.P.Bird: "Experimental Studies of Electronic Transport in Semiconductor Quantum Dot Structures" Solid State Electronics. 37. 709-712 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] J.P.Bird: "Magneto-Coulomb Oscillations" Phys.Rev.B49. 11488-11491 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] J.P.Bird: "Observation of Aharonov-Bohm Oscillation in the Magnetoresistance of a GaAs/A1GaAs Quantum Dot" Jpn.J.Appl.Phys. 2509-2510 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] J.P.Bird: "Coulomb Blockade of the Aharonov-Bohm effect in GaAs/A1GaAs Quantum Dot" Phys.Rev.B50. 14983-14990 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] J.P.Bird: "The Spectral Characteristics of Conductance Fluctuations in Ballistic Quantnm Dots" Phys.Rev.B50. 18678-18681 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Stopa: "Magneto-Coulomb Oscillations in GaAs-A1GaAS Quantum Dot Strucures" Superlattices and Microstructures. 15. 99-103 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] J.P.Bird: "Giant Backscattering Resonances in the Magneto-resistance of GaAs/A1GaAs Quantum Dots" Superlattices and Microstructures. 16. 161-164 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Hashizume: "Process-Induced Defects in InP Caused by Chemical Vapor Deposition of Surface Passivation Dielectries" Jpn.J.Appl.Phys.33/IB. 727-733 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] G.Schweeger: "Fabrication and Characterisation of Direct Schottky Contacts to Two-Dimensional Electron Gas in GaAs/A1GaAs Quantum Wells." Jpn.J.Appl.Phys.33/1B. 779-785 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] N.-J.Wu: "Formation of Oxide-Free Nearly Ideal Pt/GaAs Schottky Barriers by Novel In Situ Photopulse-Assisted Electrochemical Process" Jpn.J.Appl.Phys.33/1B. 936-941 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Hashizume: "A Novel In-situ Electrochemical Technology for Formation of Oide-and Defect-Free Contactsto GaAs and Related Low-Dimensional Structures" J.Vacuum Science&Technology B. 12-4. 2660-2666 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Y.Ishikawa: "Macroscopic Electronic Behavior and Atomic Arrangements of GaAs Surfaces Immersed in HCI Solution" J.Vacuum Science&Technology B Second Series. 12-4. 2713-2719 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] R.Notzel: "Atomic Force Microscopy Study of Strained In GaAs Quantum Disks Selforganizing on GaAs (nll)B Substrates" Appl.Phys.Leet.65. 2854-2856 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Sugano: "Future Prospects of MOS Devies for LSI." IEICE Trans.Electronics. E76-C. 1029-1033 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.Murayama: "Structures of Au and Ti thin films formed at the interface with Si by the plasma process." Thin Solid Films. 228. 105-108 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Ishii: "Digital Etching Using Kr F Excimer Laser" Jpn J.Appl.Phys.32. 6178-6181 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 石橋幸治: "半導体ナノ構造における電子輸送" 応用物理. 63. 104-115 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Ishibashi: "Transmission properties of quantum dots at high magnetic field" Jpn.J.Appl.Phys. 32. 6246-6250 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] H.Hasegawa: "In Situ Characterization and Control of Compound Semiconductor Interfaces" Phil.Trans.R.Soc.Lond.A. 344. 587-595 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.Ohmi: "Evaluating the Large Electromigration Resistance of Cupper Inter-connect Employing a Newly Developed Accelerated Life-Test Method" Journal of Electrochemical Society. 140. 1131-1137 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] G.Schweeger: "Fabrication and Characterisation of Direct shottky Contacts to two-Dimensional Electron Gas in GaAs/AlGaAs Quantum Wells." Jpn.J.Appl.Phys.Vol.33 Part1 No18. 779-785 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] S.Koshiba: "Formation of GaAs ridge quantum wire structures by molecular beam epitax on patterned substrates" Apply Physics Letters. 64(3). 363-365 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.Inoshita: "Correlated electron transport though a quantum dot:the multi-level effect" physical Revew B. 48(19). 14725-14728 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Tsutsul,E.L.Hu and C.D.W.Wilkinson: ""Controlling the profile of nanostructures"" J.Vacuum Science & Technology. B11. 2233-2236 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Takakuwa: "The analysis of waveguideing effects on the minimumtransferagle linewith of an Ultragine X-raymasK" IEICE Trans.Electron.E76-C. 594-599 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] H.Iwano: "Fabrication and carrier transport phenomena of one-dimensional quantum wires of p-type Si." J.Vac.Sci.Technol.1. 61-65 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.Nabetani: "Intial Growth Stage and Optical Property of 3D InAs Structuer on GaAs" Journal of Applied Physics.(1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Yamaguchi: "Novel Method of Modulation Spectroscopy for Heterostructures: Electro-Photoreflectrance" Japanese Journal of Applied Physics. 32. 1259-1261 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 桑村,信博: "単一電子論理回路のシュミレーション" 電子情報通信学会論文誌. J77. (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] J.Yamamoto: "Digital etching study and fabrication of fine Si lines and dots" Thin Soid Films. 225. 124-129 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Lutwyche: "Estimate of Ultimate Performance of the Single Electron Transistor" J.Appl.Plup.(1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] H.Matsuoka: "Coulomb blockade in the inversion layer of a Si metal-oxide-semiconductorfield-effect transistor with a dual-gate structure" Applied Physics Letters. 64. 586-588 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] S.Iwabuchi: "Coulomb Blockade in Ultrasmall Double Tunnel Junctions with External Circuits" (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Nomoto: "Novel Logic Divice Using Coupled Quantum Dots" Electronics Letters. 1380-1381 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 難波進編: "メゾスコピック現象の基礎" オーム社, 323 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.Sakamato: "Proceedings of JRDC Internation Symposium on Nanostructures & Quantum Effects" Springer-verlag, (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] 榊裕之共著: "先端デバイス材料ハンドブック" 電子情報通信学会, 700 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] H.Noguchi: "Phonons in Semiconductor Nanoctructures" Kluer Academic Publishers(Netherlands), 509 (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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