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Physical Properties in Epitaxial Ferroelectric Films Grown by MBE.

Research Project

Project/Area Number 05402010
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 固体物性Ⅰ(光物性・半導体・誘電体)
Research InstitutionKwansei-Gakuin University

Principal Investigator

TERAUCHI Hikaru  Kwansei-Gakuin University School of Science, Professor, 理学部, 教授 (00079667)

Co-Investigator(Kenkyū-buntansha) SANO Naokatsu  Kwansei-Gakuin University School of Science, Professor, 理学部, 教授 (00029555)
坂上 潔 (阪上 潔)  関西学院大学, 理学部, 実験助手 (90215608)
加藤 弘  関西学院大学, 理学部, 教育技術主事 (30111040)
Project Period (FY) 1993 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥31,300,000 (Direct Cost: ¥31,300,000)
Fiscal Year 1995: ¥4,900,000 (Direct Cost: ¥4,900,000)
Fiscal Year 1994: ¥14,200,000 (Direct Cost: ¥14,200,000)
Fiscal Year 1993: ¥12,200,000 (Direct Cost: ¥12,200,000)
KeywordsMolecular Beam Epitaxy / Thin Films / Ferroelectricity / Structural Phase Transition / エピタキシャル薄膜 / 強誘電体 / X線回折 / Grazing incidence geometry / 誘電体 / エピタキシ- / 薄膜 / MBE(分子総エピタキシ) / エピタキシャル成長 / 誘電体薄膜 / 酸化物薄膜 / ARE / MBE / 相転移
Research Abstract

Our main subject of the study is to obtain extremely-thin ferroelectric film epitaxially grown by MBE and to characterize the dielectric constant of the film. The study would clarify the nature of the dipole-dipole interaction in the low-dimensional ferroelectric system.
The thin film of BaTiO_3 was synthesized by MBE methods. The MBE chamber was specially designed for oxygen introduction. Flux of barium and titanium was obtained utilizing the conventional K-cell and the cell using the electron beam heating. Flux was controlled by the computer-controlled shutter. The growth condition of coevaporation and alternate evaporation was found. As a result, it is shown that the flux ratio plays an important role to avoid the degradation of the crystallinity of the thin film and to obtain the film with ideal-stoichiometry.
X-ray diffraction was utilized to characterize the epitaxial film. The information along the growth and in-plane direction was obtained by conventional 2rheta-rheta scans with symmetrical geometry and the grazing incidence geometry. We were able to see the intensity oscillation due to the Laue function, suggesting that the film has extremely uniform thickness. The lattice constant of the film along the in-plane direction suffered fom teh compressive stress, and that along growth direction was elongated, that was usually found in 'pseudomorphic' film.
The ferroelectric properties of the film was measured by the LCR meter. Dielectric constant of the thinner film was degraded as a function of the film thickness. It is predicted that the degraded layrs near the interface existed.

Report

(4 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • 1993 Annual Research Report
  • Research Products

    (42 results)

All Other

All Publications (42 results)

  • [Publications] Y.Yoneda et al.: "Ferroelectric Phase Transition in BaTiO_3 Films." J. Phys. Soc. Jpn.62. 1840-1843 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] H.Terauchi: "Structural Studies on Strained-Layer Lattices." Jpn. J. Appl. Phys.32. 113-118 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Sakaue et al.: "Structure and Elasticity in Single Crystal Cu/Ni Superlattices." J. Mag. & Mag. Materials. 126. 207-209 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Ito et al.: "Structual Evaluation of a Mo/Si Multilayer analized with Various Wavelengths." Nuclear Instr. Methods Phys. Res.B75. 355-359 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N.Sano et al.: "Pseudo-ID NiAl Single-Crystal Growth on (Al,Ga) As by Molecular Beam Epitaxy." J. Crystal Growth. 127. 645-649 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Sakaue et al.: "CTR Scattering in In_<1-x>Ga_xAs/GaAs Heterostructure." Photon Factory Act. Rep.11. 69-69 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 寺内暉: "「半導体結晶の強誘電的相転移」" 固体物理. 28. 207-213 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] H.Terauchi et al.: "Eptaxial BaTiO_3 Crystals." Ferroelectrics. 151. 21-26 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Yoneda et al.: "Epitaxial Growth of Single Crystal C_<60> Films on GaAs(111) Substrates." J. Phys. Soc. Jpn.63. 3560-3563 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Yoneda et al.: "Phase Transition of Single Crystal C_<60> Films on GaAs(111) Substrates." J. Phys. Soc. Jpn.63. 4290-4293 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Z. C. Tian et al.: "Epitaxial Growth and Giants Magnetoresistance of Co/Cu(111) Superlattices on Cr Buffer Layers." J. Appl. Phys.76. 3899-3901 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Yano et al.: "Epitaxial Growth and Dielectric Properties of BaTiO_3 Films on Pt electrodes." J. Appl. Phys.76. 7833-7838 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Yoneda et al.: "Ferroelectric Phase Transition in BaTiO3 Films." J.Phys.Soc.Jpn.62. 1840 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] H.Terauchi: "Structural Studies on Strained-Layr Lattices." Jpn.J.Appl.Phys.32 Suppl.1. 113-118 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Sakaue et al.: "Structure and Elasticity in Single Crystal Cu/Ni Superlattices." J.Mag.& Mag.Materials. 126. 207-209 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Ito et al.: "Structual Evaluation of a Mo/Si Multilayr analized with Various Wavelengths." Nuclear Instr.Methods Phys.Res.B75. 355-359 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N.Sano et al.: "Pseudo-ID NiAl Single-Crystal Growth on (Al, Ga) As by Molecular Beam Epitaxy." J.Crystal Growth. 127. 645-649 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Ito et al.: "Characterization of Mo/Si Multilayr by X-ray." Bull.Inst.Chem.Res.Kyoto Univ.71. 104-110 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] H.Terauchi et al.: "Eptaxial BaTiO_3 Crystals." Ferroelectrics. 151. 21-26 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Yoneda et al.: "Epitaxial Growth of Single Crystal C_<60> Films on GaAs (111) Substrates." J.Phys.Soc.Jpn.63. 3560-3563 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Yoneda et al.: "Phase Transition of Single Crystal C_<60> Films on GaAs (111) Substrates." J.Phys.Soc.Jpn.63. 4290-4293 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Sakaue et al.: "Structure and Elasticity in Single Crystal Copper/Nickel Superlattices." Metallic Multilayrs. 14-17 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Z.C.Tian et al.: "Epitaxial Growth and Giant Magnetoresistance of Co/Cu (111) Superlattices on Cr Buffer Layrs." J.Appl.Phys.76. 3899-3901 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Yano et al.: "Epitaxial Growth and Dielectric Properties of BaTiO3 Films on Pt electrodes." J.Appl.Phys.76. 7833-7838 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Sakaue et al.: "Structure and Elasticity in Single Crystal Cu/Ni Superlattices." Trans.Mat.Res.Soc.Jpn.19A. 53-56 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Sakaueet al.: "Anormalous Scattering of Single-Crystal Cu/Ni Superlattices." Photon Factory Act.Rep.12. (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Yoneda et al.: "Ferroelectric Phase Transitin in BaTiO_3 Films." J.Cryst.Growth. 150. 1090-1093 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Sakaue et al.: "Elastic Anomalies in Single Crystal Cu/Ni Superlattices Grown by MBE." J.Cryst.Growth. 150. 1154-1158 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] A.Yoshihara et al.: "Brillouin Scattering from Single Crystal Cu/Ni Superlattices." Physica. B216. (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] H. Terauchi et al.: "Polarized XAFS in Superconductive La_<2-x>Sr_xCuO_4Crystals." Physica B. 208. 517-518 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y. Yoneda et al.: "Ferroelectric Phase Transitin in BaTiO_3Films." J. Cryst. Growth. 150. 1090-1093 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K. Sakaue et al.: "Elastic Anomalies in Single Crystal Cu/Ni Superlattices Grown by MBE." J. Cryst. Growth. 150. 1154-1158 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] A. Yoshihara et al.: "Brillouin Scattering from Single Crystal Cu/Ni Superlattices." Physica B. 216. (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 阪上潔 他: "単結晶金属人工格子の弾性異常" 応用物理. 64. 678-681 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 阪上潔 他: "金属人工格子(第2章分担執筆)" アグネ, (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Sakaue 他: "X-Ray Study of Glassy Behavior in C_<60> Single Crystals" J.Phys.Soc.Jpn.63. 1237-1240 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Y.Yoneda 他: "Epitaxial Growth of Single Crystal C_<60> Films on GaAs(111) Substrates" J.Phys.Soc.Jpn.63. 3560-3563 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Y.Yoneda 他: "Phase Transition of Single Crystal C_<60> Films on GaAs(111) Substrates" J.Phys.Soc.Jpn.63. 4290-4293 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Z.C.Tian 他: "Epitaxial Growth and Giant Magnetorecistance of Co/Cu(111) Superlattius" J.Appl.Phys.76. 3899-3901 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] N.Toyoda 他: "Structural Relaxation in Glassy Phase of C_<60>" J.Phys.Soc.Jpn.63. 2025-2027 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Y.Yoneda 他: "Fenoelectric Behavios in Sewiconductive Cd_<1-x>Z_<nx>Te Crystals" Trans.Mat.Res.Soc.Jpn.14B. 1755-1760 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 坂上潔・寺内暉(藤森 他編): "金属人工格子" アグネ技術センター, 345 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1993-04-01   Modified: 2020-05-15  

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