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Structural controlling in nano-scale and high-functionalization for multi-component ferroelectric oxide films by chemical vapor deposition

Research Project

Project/Area Number 05403017
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field Inorganic materials/Physical properties
Research InstitutionTohoku University

Principal Investigator

HIRAI Toshio  Tohoku University, IMR,professor, 金属材料研究所, 教授 (50005865)

Co-Investigator(Kenkyū-buntansha) MASUMOTO Hiroshi  Tohoku University, IMR,research associate, 金属材料研究所, 助手 (50209459)
OMORI Mamoru  Tohoku University, IMR,research associate, 金属材料研究所, 助手 (30005954)
GOTO Takashi  Tohoku University, IMR,associate professor, 金属材料研究所, 助教授 (60125549)
山根 久典  東北大学, 金属材料研究所, 助手 (20191364)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥13,800,000 (Direct Cost: ¥13,800,000)
Fiscal Year 1994: ¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 1993: ¥11,100,000 (Direct Cost: ¥11,100,000)
Keywordsmulti-component ferroelectric oxide / thin film / bismuth titanate / Bi_4Ti_3O_<12> / chemical vapor deposition / epitaxial growth / ferroelectricity
Research Abstract

There are lots of ferroelectric, piezoelectric, pyroelectric and optical materials in multi-component oxides, for example BaTiO_3, PbTiO_3, Bi_4Ti_3O_<12>, and LiNbO_3. It is necessary to prepare films of these materials and to achieve high-functionalization. We treid to prepare films of ferroelectric bismuth titanate (Bi_4Ti_3O_<12>) which belongs to multi-component oxide by chemical vapor deposition (CVD) and clarify the relationship of CVD condition of nano-scale structural controlling and ferroelectricity of the film.
We have successfully controlled the composition of BIT films by using tri-ortho-tolyl-bismuth [Bi (o-Tol)_3] and di-isopropoxy-bis- (dipivaloyl metanato) -titanium [Ti (i-C_3H_7O)_2 (DPM)_2] as Bi and Ti sources. The films were stoichiometric and single phase. The film with excess Ti contains Bi_2Ti_2O_7 phase and the film with excess Bi contains Bi_<12>TiO_<20> as second phases. Crystal orientation and crystallite size were controlled in nano-scale. We found that the mechanisms of epitaxial and preferred growth depend on kinds of substrates and substrate temperatures. Grains size of the BIT films observed by electron microscope were nano-meter size. Uniformity of crystal orientation of these nano-scale grains improved with increasing substrate temperature.
The value of the residual polarization increased and the coercive field decreased with increasing film thickness. When the thickness of the film were above 5mum, these value of BIT film were almost the same as the values of single crystals.

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] H.Masumoto,T.Goto,Y.Masuda,A.Baba and T.Hirai: "Epitaxial growth of Bi_4Ti_3O_<12> films by electron cyclotron resonance plasma sputtering" Proc.of the Thirty-sixth Japan Congress on Material Research,Ed.by R.Ota,S.Kikuti,T.Kitamura,K.Minosihima,S.Nomura,M.Okuyama,F.Watanabe and M.Zako. 129-132 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 増本 博.滑川 政彦.山根 久典.平井 敏雄: "CVD法によるサファイア基板上へのBi_4Ti_3O_<12>エピタキシャル膜の合成" 粉体および粉末冶金. 40. 693-696 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Masumoto,M.Namerikawa and T.Hirai: "Preparation of bismuth titanate films by chemical vapor deposition" Proc.of first conference on processing materials for properties,Ed.by H.Henein and T.Oki,The Minerals,Metals and Materials Society. 1113-1116 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.Masuda,H.Masumoto,A.Baba,T.Goto and T.Hirai: "Preparation of Ba_2NaNb_5O_<15> film by RF magnetron sputtering method" Jpn.J.Appl.Phys.32. 4043-4047 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.Masuda,H.Masumoto,A.Baba,T.Goto and T.Hirai: "Preparation and ferroelectric properties of Bi_4Ti_3O_<12> and Ba_2NaNb_5O_<15> film." Ferroelectrics. 152. 115-120 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 後藤孝、陳俊雄、平井敏雄: "欠陥ペロブスカイトLaTa_3O_9の交流電気伝導と輸率測定" 日本セラミックス協会学術論文誌. 103. 50-53 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Masumoto, T.Goto, Y.Masuda, A.Baba and T.Hirai: "Epitaxial growth of Bi_4Ti_3O_<12> films byelectron cyclotron resonance plasma sputtering." Proc.of the Thirty-sixth Japan Congress on Material Research, Ed.by R.Ota, S.Kikuti, T.Kitamura, K.Minosihima, S.Nomura, M.Okuyama, F.Watanabe and M.Zako. 129-132 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Masumoto, M.Namerikawa, H.Yamane and T.Hirai: "Preparation of Bi_4Ti_3O_<12> epitaxial films on sapphire substrate by CVD" J.Jpn.Soc.Powd. and Powd.Metall.40. 693-696 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Masumoto, M.Namerikawa and T.Hirai: "Preparation of bismuth titanate films by chemical vapor deposition" Proc.of first conference on processing materials for properties, Ed.by H.Henein and T.Oki, The Minerals, Metals and Materials Society. 1113-1116 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.Masuda, H.Masumoto, A.Baba, T.Goto and T.Hirai: "Preparation of Ba_2NaNb_5O_<15> film by RF magnetron sputtering method" Jpn.J.Appl.Phys.32. 4043-4047 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Yamane, M.Omori, A.Okubo and T.Hirai: "High-temperature phase transition of Y_4Al_2O_9" J.Amer.Ceram.Soc.76 [9]. 2382-2384 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.Masuda, H.Masumoto, A.Baba, T.Goto and T.Hirai: "Preparation and ferroelectric properties of Bi_4Ti_3O_<12> and Ba_2NaNb_5O_<15> film" Ferroelectrics. 152. 115-120 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Goto, C.W.Chen and T.Hirai: "A.C.electrical conduction and transport number measurements for defect-perovskite LaTa_3O_9" J.Ceram.Soc.Jpn.103. 50-53 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Yamane, M.Omori, A.Okubo and T.Hirai: "High-temperature phase transition of Y_4Al_2O_9" J.Amer.Ceram.Soc.76. 2382-2384 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.Masuda,A.Baba,H.Masumoto,T.Goto and T.Hirai: "Preparation and ferroelectric properties of Bi_4Ti_3O_<12> and Ba_2NaNb_5O_<15>film." Ferroelectrics. 152. 115-120 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 後藤孝、陳俊維、平井敏雄: "欠陥ペロブスカイトLaTa_3O_9の交流電気伝導と輸率測定." 日本セラミックス協会学術論文誌. 103. 50-53 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Masumoto,T.Goto,Y.Masuda,A.Baba and T.Hirai: "Epitaxial growth of Bi_4Ti_3O_<12> films by electron cyclotron resonance plasma sputtering" Proc.of the Thirty-sixth Japan Congress on Material Research. 129-132 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 増本 博,滑川 政彦,山根 久典,平井 敏雄: "CVD法によるサファイア基板上へのBi_4Ti_3O_<12>エピタキシャル膜の合成" 粉体および粉末冶金. 40. 693-696 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] H.Masumoto,M.Namerikawa and T.Hirai: "Preparation of bismuth titanate films by chemical vapor deposition" Proc.of first conference on processing materials for properties,Metals and Materials Society. 1113-1116 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.Masuda,H.Masumoto,A.Baba,T.Goto and T.Hirai: "Preparation of Ba_2NaNb_5O_<15> film by magnetron sputtering method" Jpn.J.Appl.Phys.32. 4043-4047 (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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