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TRANSMISSION ELECTRON MICROSCOPE STUDY OF INTERNAL STRESSES AT RECONSTRUCTED CLEAN AND METAL ADSORBED SURFACES

Research Project

Project/Area Number 05452037
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 固体物性Ⅰ(光物性・半導体・誘電体)
Research InstitutionTOKYO INTITUTE OF TECHNOLOGY

Principal Investigator

YAGI Katsumichi  TOKYO INST.TECH.PHYS.DEPT.PROFESSOR, 理学部, 教授 (90016072)

Co-Investigator(Kenkyū-buntansha) MINODA Hiroki  TOKYO INST.TECH.PHYS.DEPT.RES.ASSOCIATE, 理学部, 助手 (20240757)
谷城 康眞  東京工業大学, 理学部, 助手 (40143648)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥6,400,000 (Direct Cost: ¥6,400,000)
Fiscal Year 1994: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1993: ¥3,900,000 (Direct Cost: ¥3,900,000)
KeywordsInternal surface stress / Surface strain / Si (001) 2x1 / Transmission elect. microsc. / Reflection elect. microsc. / 反射電顕法 / 表面再構成 / 吸着構造 / Si(111) / Si(111)5x2-Au
Research Abstract

Transmission electron microscopy (TEM) in an ultra-high vaccuum condition can reveal structures of surfaces and surface dynamic processes. One of the characteristics of the technique is in that it can characterize internal surface stresses at surfaces which are due to surface reconstruction. Most of the surface recon-structions and adosrbate structures, if it is free from the substrates are not always have the same lattice period with that of the substrate lattice underneath. This is the origin of the interna lsurface stresses. This causes bending of thin crystal films. Inversely, on the bend crystals surface structures or surface structure domians which favor such strain nominates. In the former cases, multi-domain formation does not cause bending even in cases of strong internal tress. TEM can see lattice strain caused by internal surface stress.
Our observations were summarized as follows.
(1) Si (111) 4x1-In structure does not have internal stress.
(2) Si (001) 2x1 surface is anisotro … More pically stressed.
(3) Si (111) 7x7 structure is under a delatational stress and phase boundaies between 7x7 and 1x1 structure have strong lattice strain.
(4) Si (111) 5x2-Au surface has anisotropic lattice stress. Domain boundaies of the 5x2 structure have strong strain contrast in TEM images.
(5) Steps on Si (111) have lattice strain parallel to the surface. This may be partly due to surface reconstruction.
In the present reseach project we designed and constructed a electron microscope specimen holder by which we can apply strain on surfaces. It was found that Si specimen can be heated in-situ in the microsocpe up-to 1200゚C and surface strain of about 0.1% can be applied.
With use of this holder, we could observe that Si (001) 2x1 domains domainate on the surface under a compressive strain and 1x2 domains dominate under a delatational strain. It was previously reported that a step up current causes major domains of 2x1 on Si (001) surface. However, it was found that current effect is weaker than the strain effect. Less

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] T.Ohkawa.K.Yagi: "Observations of Steps and Step Bands on Si(111)by PEEM" Proc. ICEM 13. 213. 1034-1036 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Senoh,H.Minoda,K.Yagi: "Indirect Heating Specimen Holder for REM Studies of Current Effects on Si Surfaces" Proc.ICEM 13. 213. 1029-1030 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Suzuki,K.Yagi: "Structure of High Index Clean Si Surfaces Studied by REM: (hhm)Surface with m/h=1.4-1.5" phys.stat.sol.a(146). 246-249 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H. Minoda,K.Yagi: "Growth of Ge on In-adsorbed Si(111) Surfaces Studied by REM" Surface Review and Letters. 2 (in press). (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Minoda.K.Yagi: "REW Studies of Ge Growth on Au Adsorbed Si(001) Surfaces" Surface Science. (in press). (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 八木克道、小間、塚田、青野: "表面科学入門" 丸善, 249 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Minoda, K.Yagi: "Growth of Ge on In-adsorbed Si (111) Surfaces Studied by REM" Surface Review and Letters. 2(in press). (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Minoda, K.Yagi: "REM Studies of Ge Growth on Au Adsorbed Si (001) Surfaces" Surface Science. (in press). (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Ohkawa, K.Yagi: "Observations of Steps and Step Bands on Si (111) by PEEM" Proc.ICEM. 13 2b. 1035-1036 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Senoh, H.Minoda K.Yagi: "Indirect Heating Specimen Holder for REM Studies of Current Effects on Si Surfaces" Proc.ICEM. 13 2B. 1029-1030 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Suzuki, K.Yagi: "Structure of High Index Clean Si Surfaces Studied by REM : (hhm) Surface with m/h=1.4-1.5" phys.stat.sol.(146). 246-249 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Ohkawa,K.Yagi: "Observations of Steps and Step Bands on Si(111)by PEEM" Proc.ICEM 13. 2B. 1035-1036 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Minoda,K.Yagi: "Indirect Heating Specimen Holder for REM Studies of Current Effects on Si Surfaces" Proc.ICEM 13. 2B. 1029-1030 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Suzuki,K.Yagi: "Structure of High Index Clean Si Surfaces Studied by REM:(hhm)Surface with m/h=1.4-1.5" phys.stat.sol.a(146). 246-249 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Minoda,K.Yagi: "Growth of Ge on In-adsorbed Si(111)Surfaces Studied by REM" Surface Review and Letters. 2(in press). (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Minoda,K.Yagi: "REM Studies of Ge Growth on Au Adsorbed Si(001)Surfaces" Surface Science. (in press). (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 八木克道、小間、塚田、青野: "表面科学入門" 丸善, 249 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Sato and K.Yagi: "Surface Stress on Si(001)2x1 Surfaces Studied by TEM" J.Phys:Condens.Matter. 5. 2095-2100 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] H.Minoda and K.Yagi: "REM Studies of Surface Dynamics:Growth of Ge on Au deposited Si(111) Surfaces." Ultra microscopy. 48. 371-375 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] H.Yamaguchi and K.Yagi: "Current Effects on Si(111) Surfaces at the Phase Transition between the 7x7 and the 1x1 Structures" Surface Sci.287/288. 820-825 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.Suzuki,Y.Tanishiro,H.Minoda,K.Yagi,M.Suzuki: "REM Observations of Si(hhk) Surfaces and Their Vicinal Surfaces" Surface Sci. 298. 473-477 (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2020-05-15  

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