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A New in-situ Optical Probing Method for the Surface Reaction in Heteroepitaxy : Surface Photo-Interference

Research Project

Project/Area Number 05452092
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Applied materials science/Crystal engineering
Research InstitutionCHIBA UNIVERSITY

Principal Investigator

YOSHIKAWA Akihiko  CHIBA UNIV., FACULTY OF ENG., PROFESSOR, 工学部, 教授 (20016603)

Co-Investigator(Kenkyū-buntansha) KOBAYASHI Masakazu  CHIBA UNIV., FACULTY OF ENG., ASSOC.PROF., 工学部, 助教授 (10241936)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥6,300,000 (Direct Cost: ¥6,300,000)
Fiscal Year 1994: ¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 1993: ¥3,300,000 (Direct Cost: ¥3,300,000)
Keywordsreal time monitoring / optical probing / suface photo-interference / compound semiconductors / hetero epitaxy / zinc selenide / MOVPE / SPI / エピタキシー / 結晶成長
Research Abstract

A new in-situ optical probing method for studying surface reactions during heteroepitaxial growth has been proposed. The new method was named surface photo-interference (SPI) , because the concept of the SPI is essentially concerned with a photo-interference in the heteroepilayr. The experimental setup of the method is very similar to another optical probing method called surface photo-absorption (SPA) , but the principle is quite different between the two. Unlike SPA,fairly low energy photons that are transparent for the epilayr can also be used in SPI as a probing light. Reflecting this feature, SPI is especially useful for studying growth kinetics in heteroepitaxial growth of widegap II-VI compounds, because the effect of photocatalytic growth-rate enhancement can be avoided when using such low energy photons as a probing light. A theoretical description of SPI signal was given, and experimental results detected in MOMBE of ZnSe and CdSe were precisely discussed. Further, how SPI differs from SPA has also been discussed.

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (39 results)

All Other

All Publications (39 results)

  • [Publications] A.Yoshikawa,A.Iguchi,S.Yamaga: "Study of Photocatalytic growth-rate enhancement in MOMBE of GaAs on ZnSe by surface photo-absorption" Thin Solid Films. 225. 78-81 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Yoshikawa: "Arion laser-assisted metalorganic vapor phase epitaxy of ZnSe" Physica B. 185. 50-64 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Matsumoto,H.Tosaka,T.Yoshida,M.Kobayashi,A.Yoshikawa: "Nitrogen doping of ZnSe and ZnCdSe with the assistance of thermal energy and photon energy" Japanese Journal of Applied Physics. 32No.2. 731-734 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Matsumoto,H.Tosaka,T.Yoshida,M.Kobayashi,A.Yoshikawa: "Planar doping of molecular beam epitaxy of MBE grown ZnSe with plasma-excited nitrogen" Japanese Journal of Applied Physics,. 32No.2B. L229-L232 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Tosaka,T.Nagatake,T.Yoshida,M.Kobayashi,A.Yoshikawa: "Accepter Concentration Control of p-ZnSe Using Nitrogen and Helium Mixed Gas Plasma" Japanese Journal of Applied Physics,. 32No.2. 1722-1724 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Yoshikawa,M.Kobayashi,S.Tokita: "A new in-situ optical monitoring method for the surface reaction in photo-excited heteroepitaxy of compound semiconductors" Applied Surface Science. 79/80. 416-421 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Tokita,M.Kobayashi,A.Yoshikawa: "In-situ probing of the ZnSe metalorganic molecular beam epitaxy growth by surface photo-interference" Journal of Crystal Growth. 136. 376-380 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Yoshikawa,M.Kobayashi,S.Tokita: "Surface reaction mechanism in MOMBE-ALE of ZnSe and CdSe as determined by a new in-situ optical probing method" Applied Surface Science. 82/83. 316-321 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] M.Kobayashi,H.Tosaka,T.Nagatake,T.Yoshida,A.Yoshikawa: "Helium gas mixing in the nitrogen plasma for the control of the acceptor concentration in p-ZnSe" Journal of Crystal Growth. 138. 745-749 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Yoshikawa,M.Kobayashi,S.Tokita: "Observation of a new in-situ optical monotoring signal with monolayer resolution in metalorganic molecular beam epitaxy and metalorganic vapor phase epitaxy of wide-gap II-VI compounds" Journal of Crystal Growth. 145. 68-73 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 賈岸偉、小林正和、吉川明彦: "GaAsに格子整合する超格子によるZnCdSSe疑似四元混晶の設計" 電気学会論文誌C. 114-C. 1286-1291 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.W.Jia,M.Kobayashi,A.Yoshikawa: "Design and fabrication of pseudo-quaternary ZnCdSSe mixed layers by strained layer superlattices" J.Electronic Materials. 24. 117-121 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Yoshikawa, A.Iguchi, S.Yamaga: ""Study of photocatalytic growth-rate enhancement in MOMBE of GaAs on ZnSe by surface photo-absorption"" Thin Solid Films. vol.225. 78-81 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Yoshikawa, M.Kobayashi, S.Tokita: ""A new in-situ optical monitoring method for the surface reaction in photo-excited heteroepitaxy of compound semiconductors"" Applied Surface Science. vol.79/80. 416-421 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Tokita, M.Kobayashi, A.Yoshikawa: ""In-situ probing of the ZnSe metalorganic molecular beam epitaxy growth by surface photo-interference"" Journal of Crystal Growth. vol.136. 376-380 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Yoshikawa, M.Kobayashi, S.Tokita: ""Surface reaction mechanism in MOMBE-ALE of ZnSe and CdSe as determined by a new in-situ optical probing method"" Applied Surface Science. vol.82/83. 316-321 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Yoshikawa, M.Kobayashi, S.Tokita: ""Observation of a new in-situ optical monotoring signal with monolayr resolution in metalorganic molecular beam epitaxy and metalorganic vapor phase epitaxy of wide-gap II-VI compounds"" Journal of Crystal Growth. vol.145. 68-73 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Yoshikawa: ""Ar ion laser-assisted metalorganic vapor phase epitaxy of ZnSe"" Physica B. vol.185. 50-64 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Matsumoto, H.Tosaka, T.Yoshida, M.Kobayashi, A.Yoshikawa: ""Nitrogen doping of ZnSe and ZnCdSe with the assistance of thermal energy and photon energy"" Japanese Journal of Applied Physics. vol.32 No.2. 731-734 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Matsumoto, H.Tosaka, T.Yoshida, M.Kobayashi, A.Yoshikawa: ""Planar doping of molecular beam epitaxy of MBE grown ZnSe with plasma-excited nitrogen"" Japanese Journal of Applied Physics. vol.32 No.2B. L229-L232 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Tosaka, T.Nagatake, T.Yoshida, M.Kobayashi, A.Yoshikawa: ""Acceptor concentration control of p-ZnSe using nitrogen and helium mixed gas plasma"" Japanese Journal of Applied Physics. vol.32. L1772-L1774 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] M.Kobayashi, H.Tosaka, T.Nagatake, T.Yoshida, A.Yoshikawa: ""Helium gas mixing in the nitrogen plasma for the control of the acceptor concentration in p-ZnSe"" Journal of Crystal Growth. vol.138. 745-749 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.W.Jia, M.Kobayashi and A.Yoshikawa: ""Design and fabrication of pseudo-quaternary ZnCdSSe mixed layrs by strained layr supoerlattices"" Journal of Electronic Materials. vol.24. 117-121 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Yoshikawa,A.Iguchi,S.Yamaga: "Study of Photocatalytic growth-rate enhancement in MOMBE of GaAs on ZnSe by surface photo-absorption" Thin Solid Films. 225. 78-81 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] A.Yoshikawa: "Ar ion laser-assisted metalorganic vapor phase epitaxy of ZnSe" Physica B. 185. 50-64 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] S.Matsumoto,H.Tosaka,T.Yoshida,M.Kobayashi,A.Yoshikawa: "Nitrogen doping of ZnSe and ZnCdSe with the assistance of thermal energy and photon energy" Japanese Journal of Applied Physics,. 32No.2,. 731-734. (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] S.Matsumoto,H.Tosaka,T.Yoshida,M.Kobayashi,A.Yoshikawa: "Planar doping of molecular beam epitaxy of MBE grown ZnSe with plasma-excited nitrogen" Japanese Journal of Applied Physics,. 32No.2B. L229-L232 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Tosaka,T.Nagatake,T.Yoshida,M.Kobayashi,A.Yoshikawa: "Accepter Concentration Control of p-ZnSe Using Nitrogen and Helium Mixed Gas Plasma" Japanese Journal of Applied Physics,. 32No.2. 1722-1724 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] A.Yoshikawa,M.Kobayashi,S.Tokita,: "A new in-situ optical monitoring method for the surface reaction in photo-excited heteroepitaxy of compound semiconductors" Applied Surface Science. 79/80. 416-421 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] S.Tokita,M.Kobayashi,A.Yoshikawa,: "In-situ probing of the ZnSe metalorganic molecular beam epitaxy growth by surface photo-interference" Journal of Crystal Growth. 136. 376-380 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] A.Yoshikawa,M.Kobayashi,S.Tokita,: "Surface reaction mechanism in MOMBE-ALE of ZnSe and CdSe as determined by a new in-situ optical probing method" Applied Surface Science,. 82/83. 316-321 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Kobayashi,H.Tosaka,T.Nagatake,T.Yoshida,A.Yoshikawa: "Helium gas mixing in the nitrogen plasma for the control of the acceptor concentration in p-ZnSe" Journal of Crystal Growth. 138. 745-749. (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] A.Yoshikawa,M.Kobayashi,S.Tokita: "Observation of a new in-situ optical monotoring signal with monolayer resolution in metalorganic molecular beam epitaxy and metalorganic vapor phase epitaxy of wide-gap II-VI compounds" Journal of Crystal Growth. 145. 68-73. (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 買岸偉、小林正和、吉川明彦: "GaAsに格子整合する超格子によるZnCdSSe疑似四元混晶の設計" 電気学会論文誌C. 114-C. 1286-1291. (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] A.W.Jia,M.Kobayashi,A.Yoshikawa: "Design and fabrication of pseudo-quaternary ZnCdSSe mixed layers by strained layer layer superlattices" J.Electronic Materials. 24. 117-121 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] S.Tokita: "In-situ probing of the ZnSe MOMBE Growth Process by Surface Photo-Interference Method" Journal of Crystal Growth. 採録決定.

    • Related Report
      1993 Annual Research Report
  • [Publications] A.Yoshikawa: "A new in-situ optical probing method in heteroepitaxy:Surface photo-interference" Proc.3rd.Japan-korea Symposium on Advanced Science and Technology for Semiconductor Materials and Peuices. 50-57 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] A.Yoshikawa: "A new in-situ optical monitoring method for the surface reaction in photoexcited heteroepitaxy of compound semiconductors" Applied Surface Science. 採録決定.

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Kobayashi: "Helium gas mixing in the nitrogen plasma for the Control of the acceptor concentration in p-ZnSe" Journal of Crystal Growth. 採録決定.

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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