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Atomic-scale structure control of silicon-metal interface and its macroscopic functional properties

Research Project

Project/Area Number 05452101
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 表面界面物性
Research InstitutionThe University of Tokyo

Principal Investigator

HASEGAWA Shuji  The University of Tokyo, Graduate School of Science, Assoiate Professor, 大学院・理学系研究科, 助教授 (00228446)

Co-Investigator(Kenkyū-buntansha) INO Shozo  The University of Tokyo, Graduate School of Science, Professor, 大学院・理学系研究科, 教授 (70005867)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥7,500,000 (Direct Cost: ¥7,500,000)
Fiscal Year 1994: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1993: ¥6,800,000 (Direct Cost: ¥6,800,000)
Keywordssemiconduetor-metal interfaces / surface conductivity / surface superstractures / Hall effect / Field effect / Silicon (111) surface / RHEED / space-charge layr / 半導体・金属・界面 / 表面構造
Research Abstract

We have installed a new sample holder in a UHV chamber for measurements of electrical properties, connected to a small MBE-RHEED system developed in the last year. This system enables in-situ analyzes and measurements of (1) surface structures and chemical compositions, (2) surface conductivity, (3) Hall effect, (4) field effect, and (5) photoconductivity. We continued the studies on the correlation between the microscopic atomic arrangements/electronic states of surfaces and their macroscopic electrical properties.
First of all, from the surface field effect measurements, it is clarified that the Si (111) -7x7 clean surface is metallic and the Si (111) -<square root>3x<square root>3-Ag surface is semiconducting. By exposing oxygen gas onto the 7x7 clean surface, the gradual change form metallic surface to semiconducting one caused by surface oxidation is revealed as a change in field effect. Photoconduction with monochromatic light illuminations is also found to be crucially dependent on the surface superstructures. By depositing Ag of about one monolayr on the Si (111) -<square root>3x<square root>3-Ag surface maintained at 150K,new superstructures such as <square root>21x<square root>21 and 6x6 are found. And the surface conductivity remarkbly changed with the formations of these structures.
From the experiments above mentioned, we could proved our assumption on the structure-dependent surface conductivity that the carrier concentrations in the surface space-charge layr changes depending upon the surface structures and electronic states. Studies like this on the correlation between the atomic-scale structures and electrical properties are expected to lead to device applications.

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] 長谷川修司: "Surface structures and conductance at initial stages in epitaxy metals on a Si(111)surface" Surface Science. 283. 438-446 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 長谷川修司: "Hysteresis in phase transitions at clean and Au-covered Si(111)surfaces" Physical Review. B47. 9903-9906 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 長谷川修司: "Structure-dependent surface conduetance at the initial stages in metal epitaxy on Si(111)sukfaces" Thin Solid Films. 228. 113-116 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 長谷川修司: "Correlation between Atomic-scale structures and macroscopic electrical properties of metal-covered Si(111)surfaces" International Journal of Moden Physics. B7. 3817-3876 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 長谷川修司: "「表面変性エピタキシ-」を整理すると" 表面科学. 15. 553-553 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 長谷川修司: "Structural phase transitions at clean and metalcovered Si(111)surfaces investigated by RHEED spot analysis" Phase Transitions. (印刷中). (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 長谷川修司: "The Structures of Surfaces IV" Warld Scientifac Pub.(eds.X.Xie,S.Y.Tong,M.A.Van Hove), 638 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 長谷川修司: "Nanostructures and Quantum Effects" Springer-Verlag(eds.H.Sakaki.H.Noge), 356 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Hasegawa: ""Surface structures and conductance at initial stges in epitaxy of metals on Si (111) surface"" surface Science. vol.283. 438-446 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Hasegawa: ""Hysteresis in phase transitions at clean and metal-covered Si (111) surfaces"" Physical Review. vol.B47. 9903-9906 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Hasegawa: ""Structure-dependent surface conductance at initial stages in epitaxy on Si (111) surface"" Thin Solid Films. vol.228. 113-116 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Hasegawa: ""Correlation between atomic-scale structures and macroscopic electrical properties of metal-covered Si (111) surfaces"" International Journal of Modern Physics. vol.B7. 3817-3876 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Hasegawa: ""Summarizing surfactant epitaxy"" Hyomen-Kagaku. vol.15. 553-553 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Hasegawa: ""Structural phase transitions at clean and metal-covered Si (111) surfaces investigated by RHEED spot analysis"" phase Transitions. (in press). (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Hasegawa: ""Correlation between atomic-scale structures and macroscopic electrical properties of metal-covered Si (111) surfaces investigated by in-situ measurements in UHV"" in"The Structures of Surfaces IV", (World Scientific) eds.X.Xie, S.Y.Tong, M.A.Van Hove. 638 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Hasegawa: ""Electrical transport properties of Si (111) surface with control of its atomic-scale structures"" in"Nanostructures and Quantum effects" (Springer) eds.H.Sakaki, H.Noge. 356 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 長谷川修司: "Surface Structures and Conductance at initial stages in epitaxy of metals on Si(111)Surface" Surface Science. 283. 438-446 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] 長谷川修司: "Hysteresis in Phase Transitions at clean and Au-covered Si(111) Surfaces" Physical Review. B47. 9903-9906 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] 長谷川修司: "Structure-dependent surface conductance at initial stages in metal epitaxy on Si(111)surfaces" Thin Solid Films. 228. 113-116 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] 長谷川修司: "Correlation between Atomic-Scale Structures and macroscopic electrical properties of metal-covered Si(111)surfaces" International Journal of Modern Physics. B7. 3817-3876 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] 長谷川修司: "「表面変性エピタキシ-」を整理すると" 表面科学. 15. 553-553 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 長谷川修司: "Structural phase transitions at clean and metal-covered Si(111)surfaces investigated by RHEED spot analysis" Phase Transitions. (印刷中). (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 長谷川修司: "The Structure of Surfaces IV" World Scientific Pub.(eds.X.Xie,S.Y.Tong,M.A.Van Hove), 638 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 長谷川修司: "Nanostructures and Quantum Effects" Springer-Verlag(eds.H.Sakaki,H.Noge), 356 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 長谷川修司: "Surface structures and conductance at initial stages in epitaxy of metals on a Si(111)surface" Surface Science. 283. 438-446 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 長谷川修司: "Hysteresis in phase transitions at clean and Au-covered Si(111)Surfaces" Physical Review B. 47. 9903-9906 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 長谷川修司: "Structure-dependent surface conductance at the initial stages in metal epitaxy on Si(111)surfaces" Thin Solid Films. 228. 113-116 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 長谷川修司: "Correlation between atomic-scale structures and macroscopic electrical properties of metal-covered Si(111)surfaces" International Journal of Modern Physics B. 7. 3817-3876 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 長谷川修司: "Correlation between atomic-scale structures and macroscopic electrical properties of metal-covered Si(111)surfaces investigated by in-situ measurement" in“The Structures of Surfaces4",S.Y.Tong ed.(World Scientific). 印刷中. (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] 長谷川修司: "Structural phase transitions at clean and metal-corered Si(111)Surfaces investigated by RHEED spot analysis" Phase Transitions. 印刷中. (1994)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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