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Study on nano-inprocess measurement for flexible micromachinig

Research Project

Project/Area Number 05452137
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 機械工作・生産工学
Research InstitutionOsaka University

Principal Investigator

MIYOSHI Takashi  Osaka University, Faculty fo Engineering, Professor, 工学部, 教授 (00002048)

Co-Investigator(Kenkyū-buntansha) TAKAYA Yasuhiro  Osaka University, Faculty fo Engineerign, Research Associate, 工学部, 助手 (70243178)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥5,700,000 (Direct Cost: ¥5,700,000)
Fiscal Year 1994: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1993: ¥3,200,000 (Direct Cost: ¥3,200,000)
Keywordsmicromachining / nanotechnology / inprocess measurement / Laser applied measurement / fine profile measurement / inverse scattering phase retrieval / optical Fourier transform / exponential density filter / 逆散乱 / フーリエ変換 / 超精密
Research Abstract

The micromechanism of which size is smaller than a few millimeters for examples micro-motor micro-liner drives, micro-pumps, etc has been developed. In recent years a variety of micromachines have been fabricated by silicon surface micromachining techniques and another new developed micromachining techniques. Accuracy of components of the micromechanism is required to be of submicrometer order. It is necessary to develop in-process measurement and evaluation techniques for the fusion micromachining in order that the efficient fabrication of finer scale form is performed.
The principle of measurement is based on the optical Fourier transform and phase-retrieval method. In order to retrieve the phase information for our measurement technique, the phase-retrieval algorithm based on the logarithmic Hilbert transform and the Fourier series expansion from two Fraunhofer diffraction intensities which are related to the square of the modulus of Fourier transform of object field with and without … More an exponential density filter at the object plane is applied. Our measurement technique makes it possible to reconstruct three-dimensional form of the whole area of a workpiece which is illuminated by the laser beam from two Fraunhofer diffraction intensity distributions.
In order to verify the validity of the proposed method, computer simulations of reconstruction of the fine groove model is performed. The relation between the size parameters of groove profile and the exponential density filter type is made clear. Moreover, the inverse scattering measuring system which is composed of the Fourier transform optical system and the exponential density filter optical system is developed. By using the measuring system, the measurements of the fine triangular groove with the pitch of 9.1mm and the depth of 0.4mm which is fabricated by ultra precision diamond turning is carried out. The reconstructed profile is much the same as the profile which is measured by using the conventional stylus method. It is shown that the proposed measurement method is effective for reconstructing the profile of a micrometer size workpiece without scanning probe and stylus. Less

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (11 results)

All Other

All Publications (11 results)

  • [Publications] 永田貴之、高谷裕浩、三好隆志: "光逆散乱位相法による微細形状の測定法に関する研究-計算機シミュレーションによる誤差評価-" 1993年度精密工学会秋季大会学術講演論文集. 京都. 211-212 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 永田貴之、高谷裕浩、三好隆志、木下浩一: "光逆散乱位相法による微細形状の測定法に関する研究(第2報)-測定実験による検証-" 1994年度精密工学会春季大会学術講演論文集. 東京. 471-472 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 木下浩一、高谷裕浩、三好隆志: "光逆散乱位相法による微細加工形状の測定評価に関する研究-周期的2次元形状の場合-" 日本機械学会関西支部第70期定時総会講演会. 大阪. 153-1552 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Takayuki NSAGATA,Yasuhiro TAKAYA,Takashi MIYOSHI: "Study on Measurement of Fine Profile Based on The Inverse Scattering Phase Reconstruction-Error estimation by computer simulation-" Proceeding of 1993 JSPE general meeting in autumn. 211-212 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Takayuki NAGATA,Yasuhiro TAKAYA,Takashi MIYOSHI: "Study on Measurement of Fine Profile Based on The Inverse Scattering Phase Reconstruction (second report)-Measurement of fine grooves-" Proceeding of 1994 JSPE general meeting in spring. 471-472 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Kouichi KINOSHITA,Yasuhiro TAKAYA and Takashi MIYOSHI: "Study on Measurement of Work Fine Surface Based on The Inverse Scattering Reconstruction-2D Periodical Profile-" Proceeding of 70th JSME Kansai branch annual general meeting. No.954-1. 153-155 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 永田貴之,高谷裕浩,三好隆志: "光逆散乱位相法による微細形状の測定法に関する研究-計算機シミョレーションによる誤差評価-" 1993年度精密工学会秋季大会学術講演論文集. 京都. 211-212 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] 永田貴之,高谷裕浩,三好隆志: "光逆散乱位相法による微細形状の測定法に関する研究-測定実験による検証-" 1994年度精密工学会春季大会学術講演論文集. 東京. 471-472 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 木下浩一,高谷裕浩,三好隆志: "光逆散乱位相法による微細加工形状の測評価法に関する研究-周期的2次元形状の場合-" 日本機械学会関西支部第70期定時総会講演会. 大阪(3月発表予定). (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 永田貴之,高谷裕浩,三好隆志: "光逆散乱位相法による微細形状の測定法に関する研究-計算機シミュレーションによる誤差評価-" 1993年度精密工学会秋季大会学術講演論文集. 京都. 211-212 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 永田貴之,高谷裕浩,三好隆志: "光逆散乱位相法による微細形状の測定法に関する研究-測定実験による検証-" 1994年度精密工学会春季大会学術講演論文集. 東京 (3月発表予定). (1994)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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