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Fundamental Research of Long-Wavelength Quantum-Wire Semiconductor Lasers Consisiting of Compressively Strained Super-Lattices

Research Project

Project/Area Number 05452184
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionTokyo Institute of Technology

Principal Investigator

ARAI Shigehisa  Tokyo Institute of Technology, Faculty of Eng., Professor Research Center for Quantum Effect Electronics, 量子効果エレクトロニクス研究センター, 教授 (30151137)

Co-Investigator(Kenkyū-buntansha) ASADA Masahiro  Tokyo Instutute of Technology, Faculty of Eng., Assistant Professor Department o, 工学部, 助教授 (30167887)
小森 和弘  東京工業大学, 工学部, 助手 (20202070)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥7,700,000 (Direct Cost: ¥7,700,000)
Fiscal Year 1994: ¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1993: ¥5,800,000 (Direct Cost: ¥5,800,000)
Keywordssemiconductor laser / quantum-wire / quantum-box / strained quantum well / electron beam lithography / ECR dry etching / spontaneous emission / carrier capture time / 半導体光増幅器 / 低次元量子井戸 / GaInAsP / InP量子細線 / 雑音 / 雑音指数 / 自然放出光間ビート雑音
Research Abstract

Ga_<1-x>In_XAs/GaInAsP/InP strained-quantum-film, -wire, and -box lasers have been studied both theoretically and experimentally. By introducing tensile-strained quantum-wire (QW) structure into the active layr, room temperature CW operation fo GRIN-SCH single-QW lasers with fairly low threshold current was achieved. GaInAs/GaInAsP (strained-) quantum-box (QB) structures were fabricated and obvious 0-dimensional QB size effects were observed. Temperature dependences of lasing properties were measured and compared with those of quantum-film lasers. Carrier injection process in SCH quantum-film and wire lasers was investigated.
The results obtaned in this research are as follows.
(1) Temperature dependence of lasing properties of quasi-quantum-wire lasers were measured and compared with those of quantum-film lasers.
(2) By combining eletron beam lithography and ECR dry etching, 20-30nm wide GaInAs/GaInAsP multi-quantum-wire and -box structures with the aspect ratio greater than 6 were realized. Moreover, low damage feature of this fabrication process was confirmed by PL observation.
(3) An emission energy level shift due to obvious 0-dimentional quantum-box effect was observed at 4K with GaInAs/GaInAsP single-layr (strained-) embedded quantum-box structures.
(4) Lasin action of Ga_<0.67>In_<0.33>SAs/GaInAsP/InP tensile-strained quantum-box laser was demonstrated for the first time. The fabricated QB size is 30nm diameter and 12nm thick with a period of 70nm. The threshold current density was 7.6KA/cm^2 at 77K with pulse current injection.
(5) Carrier capture time of SCH-QW-lasers was measured by the spontaneous emission spectra above threshold. Difference between unstrained, tensile-strained, and compressive-strained lasers was obtained.

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] H.Hirayama: "Lasing action of Ga_<0.67>In_<0.33>As/GaInAsP/InP tensile-strained quantum-box laser" Electronics Letters. 30. 142-143 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Hirayama: "Carrier Capture Time and Its Effect on the Efficiency of Quantum-Well Lasers" IEEE J.Quantum Electron.30. 54-62 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Hirayama: "Emission Energy Shift in GaInAs/GaInAsP Strained Quantum-Box Structures Due to 0-Dimensional Quantum-Box Effect" Jpn.J.Appl.Phys.33. 3571-3577 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] K.Kudo: "Fabricaion of GaInAs/GaInAsP/InP Multi-Quantum-Wires and-Boxes by Substrate-Potential-Controlled Electron Cyclotron Resonance Reactive Ion Beam Etching" Jpn.J.Appl.Phys.33. L1383-L1385 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] K.C.Shin: "Temperature Dependence of Ga_<0.66>In_<0.34>As/InP Tensile-Strained Quasi-Quantum-Wire Laser Fabricated by Wet Chemical Etching and 2-Step OMVPE Growth" IEEE Photonics Technol.Lett.to be published

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.Huang: "Saturation characteristics of GaInAs/GaInAsP/InP tensile strained quantum well semiconductor laser amplifier with tapered waveguide structures" IEEE J.Quantum Electron. 30. 2034-2039 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Hirayama: "Lasing action of Ga_<0.67>In_<0.33>As/GaInAsP/InP tensile-strained quantum-box laser" Electronics Letters. 30. 142-143 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Hirayama: "Carrier Capture Time and Its Effect on the Efficiency of Quantum-Well Lasers" IEEE J.Quantum Electron.30. 54-62 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Hirayama: "Emission Energy Shift in GaInAs/GaInAsP Strained Quantum-Box Structures Due to 0-Dimensional Quantum-Box Effect" Jpn.J.Appl.Phys.33. 3571-3577 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] K.Kudo: "Fabrication of GaInAs/GaInAsP/InP Multi-Quantum-Wires and -Boxes by Substrate-Potential-Controlled Electron Cyclotron Resonance Reactive Ion Beam Etching" Jpn.J.Appl.Phys.33. L1383-L1385 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] K.C.Shin: "Temperature Dependence of Ga_<0.66>In_<0.34>As/InP Tensile-Strained Qussi-Quantum-Wire Laser Fabricated by Wet Chemical Etching and 2-Step OMVPE Growth" IEEE Photonics Technol.Lett.to be published.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.Huang: "Saturation characteristics of GaInAs/GaInAsP/InP tensile strained quantum well semiconductor laser amplifier with tapered waveguide structures" IEEE J.Quantum Electron.30. 2034-2039 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Hirayama: "Lasing action of Ga_<0.67>In_<0.33>As/GaInAsP/InP tensile-strained quantum-box laser" Electronics Letters. 30. 142-143 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Hirayama: "Cerrier Capture Time and Its Effect on the Efficiency of Quantum-Well Lasers" IEEE J.Quantum Electron.30. 54-62 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Hirayama: "Emission Energy Shift in GaInAs/GaInAsP Strained Quantum-Box Structures Due to 0-Dimensional Quantum-Box Effect" Jpn.J.Appl.Phys.33. 3671-3577 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] K.Kudo: "Fabrication of GaInAs/GaInAsP/InP Multi-Quantum-Wires and-Boxes by Substrate-Potential-Controlled Electron Cyclotron Resonance Reactive Ion Beam Etching" Jpn.J.Appl.Phys.33. L1383-L1385 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] K.C.Shin: "Temperature Dependence of Ga_<0.66>In_<0.34>As/InP Tensile-Strained Quasi-Quantum-Wire Laser Fabricated by Wet Chemical Etching and 2-Step OMVPE Growth" IEEE Photonics Technol.Lett.(to be published).

    • Related Report
      1994 Annual Research Report
  • [Publications] Y.Huang: "Stauration characteristics of GaInAs/GaInAsP/InP tensile strained quantum well semiconductor laser amplifier with tapered waveguide structures" IEEE J.Quantum Electron.30. 2034-2039 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] S.ARAI: "Fabrication technology for long-wavelength GaInAs(P)/InP quantum-wire lasers by wet-chemical etching and OMVPE regrowth" Optoelectronics-Devices and Technology Mita press. 8. 461-478 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.MIYAKE: "Room temperature operation of GaInAs/GaInAsP/InP SCH lasers with quantum-wire size active region" IEEE J.Quantum Electron. 29. 2123-2133 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.KUDO: "Ga_<0.66>In_<0.34>As/GaInAsP/InP tensile strained single quantum-well lasers with 70nm period wire active region" IEEE Photon.Technol Lett.5. 864-867 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.HUANG: "Theoretical linewidth enhancement factor α of Ga_<1-x>In_xAs/GaInAsP/InP strained quantum-well structures" IEEE Photon.Technol.Lett.5. 142-145 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.HUANG: "Reduction of noise figure in semiconductor laser amplifier with Ga_<1-x>In_xAs/GaInAsP/InP strained quantum-well structures" IEEE J.Quantum Electron.29. 2950-2956 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] H.HIRAYAMA: "Carrier capture time and its effect on efficiency of quantum-well lasers" IEEE J.Quantum Electron.29(to be published). (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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