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Electrostatic Discharge Analysis under Ultra clean environment

Research Project

Project/Area Number 05452195
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 電子デバイス・機器工学
Research InstitutionThe University of Tokyo

Principal Investigator

ODA Tetsuji  The University of Tokyo, Faculty of Engineering, Professor, 大学院・工学系研究科, 教授 (90107532)

Co-Investigator(Kenkyū-buntansha) ITAGAKI Toshihumi  The University of Tokyo, Faculty of Engineering, Research Associate, 大学院・工学系研究科, 助手 (60242012)
Project Period (FY) 1993 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥7,500,000 (Direct Cost: ¥7,500,000)
Fiscal Year 1995: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1994: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1993: ¥3,100,000 (Direct Cost: ¥3,100,000)
KeywordsPlasma Processing / TSDC / Charge Distribution / Electrostatic Discharge / Anti-Static Process / Surface Treatment
Research Abstract

This project is a fundamental research of electrostatic charging and discharge problems, especially related with clean air conditions. Two electrostatic charge distribution measuring methods were proposed. One is surface charge distribution analysis in sub-micrometer scale, by using a piezoelectric scanning stage and an electrostatic force detector with optical interferometric distance measurement. The scanning unit operated good but the sensitivity of the force detector was not enough to detect localized charge because of the instability of a hand-made equipment. The principle itself is possible, but fine mechanical technology is requested. A space charge distribution measuring system by using nano second pressure pulse was newly developed where a piezoelectric polymer film of PVDF was first used as pressure generator. The sysem could detect the difference of plasma surface processing effect on stable polymer films. However, the real space charge in a thin dielectric film could not observed by that system because the final resolution of the sytem was only 7 micrometer. As anti-static process, surface treatment effects of a polymer film by low pressure plasma processing were tested by charge distribution analysis, thermally stimulated discharge current analysis (TSDC), contact angle of water droplet and others. They could detect such treatment effects and decay of them during a week. Environmental gas effect of plasma was not so large as estimated. Electrostatic discharge phenomena on a charged thin film was precisely analyzed by using electronstatic induction probe and magnetic probe (electromagnetic wave detection). Correlation between electrostatic charging and surface state was analyzed as a result of the project.

Report

(4 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • 1993 Annual Research Report
  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] 小田哲治,他: "超短パルス放電によるプラズマ表面処理を施したポリエチレン薄膜の表面状態と熱刺激電流特性" 静電気学会誌. 19. 56-61 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.,: "Charging of HDPE Films due to Surface Effects during Fabrication" Jounal of Electrostatics,. 35. 167-177 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.,: "Space and Surface Charge Behavior Analysis of Charg-Eliminated Polymer Films" Conf.Rec.of 1995 IEEE/IAS Ann,Meeting,. 1523-1528 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.,: "High Speed Electrostatic Discharge between a Charged Thin Film and a Sphere Electrode with or withouto a Thin Dielectric Film on That" IEEE Trans.on Ind.Appl. 30. 595-601 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.,: "Floated Backing Electrode Effects on Peeling Electrostatic Discharge between a Charged Dielectric Film and Metal Thin Film" Conf.Rec.of 1994 IEEE/IAS Annual Meeting,. 1406-1413 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.,: "Electrostatic Charging Properties of Polytetrafluoroethylene Surface" Proc.of 12th Int.Symp.-Contamination Control,Yokohama,. 661-666 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.: "Charging of HDPE Films due to Surface Effects during Fabrication" Journal of Electrostatics. 35. 167-177 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.: "Space and Surface Charge Behavior Analysis of Charg-Eliminaed Polymer Films" Conf.Rec.of 1995 IEEE/IAS Ann.Meeting. 1523-1528 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.: "High Speed Electrostatic Discharge between a Charged Thin Film and a Sphere Electrode with or without a Thin Dielectric Film on That" IEEE Trans.on Ind.Appl.vol.30. 595-601 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.: "Floated Backing Electrode Effects on Peeling Electrostatic Discharge between a Charged Dielectric Film and metal Thin Film" Conf.Rec.of 1994 IEEE/IAS Annual Meeting. 1406-1413 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.: "Thermally Stimulated Discharge Current Observation of Plasma Processed Polyethylene Films" Proc.of ESA/IEJ. Joint Symp.196-205 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.: "Electrostatic Charging Properties of Polytetrafluoroethylene Surface" Proc.of 12th Int.Symp.-Contamination Control, Yokohama. 661-666 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.: "Electrostatic Charge Behavior in and near the Dielectric Material" Proc.of NEPTIS-3 Technology Electrostatic Problems in Powder. 46-51 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.: "Low Pressure and Atmospheric Discharge Plasma Processing for Polymer Surfaces-TSDC of Plasma Processed HDPE and LDPE films-" Proc.of 6th Asian Conf.on Rlectrical Discharge. 17-20 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Oda et al.: "Surface Morphology and Thermally Stimulated Discharge Current of Ultra Short Pulse Induced Plasma Processing (in Japanese)" Proc.of the Inst.of Electrostatics Japan. vol., 19. 56-61 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T,Oda et al: "Charging of HDPE Films dueto Surface Effects during Fabrication" Journal of Electrostatics. 35. 167-177 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Oda et al: "Space and Surface Charge Behavior Analysis of Chavge-Eliminated Polymer Films" Conf.Rec.of 1995 IEEE/IAS Annual Meeting. 1523-1528 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 汪士楠、小田哲治: "超短パルス放電によるプラズマ表面処理を施したポリエチレン薄膜の表面状態と熱刺激電流特性" 静電気学会誌. 11. 56-61 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 汪士楠、小田哲治: "CVケーブルの熱刺激電流とその繰り返し測定の影響" 静電気学会誌. 11. 314-3 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Takashima and T.Oda: "Space and Surface Charge Behavior Analysis of Plasma Pre-Processed PTFE Films" 静電気学会講演論文集. 49-54 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 小田哲治,市山慎一郎: "プラズマ処理による薄膜の帯電防止の試み" 静電気学会講演論文集. 271-274 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Oda and Y.Sakai: "Electrostatic Discharges between a Charged Thin Dielectric Film and a Spherical Electrode with or without Dielectric Coating" IEEE Transactions on Industrial Applications. 30. 595-601 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Oda and T.Takahashi: "Floated Backing Electrode Effects on Peeling Electrostatic Discharge Between a Charged Dielectric Film and Metal Thin Film" Conf.Rec.of 1994 IEEE/IAS Annual Meeting. 2. 1406-1413 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] S.Wang and T.Oda: "Thermally Stimulated Discharge Current Observation of Plasma Processed Polyethylene Film" Proc.of ESA/IEJ Joint Symposium23GE03:1994. 196-205

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Oda et al: "Electrostatic Charging Properties of Polytetrafluoroethylene Surface" Proc.of 12th Int.Symp.Contamination Control. 661-666 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Oda: "Electrostatic Charge Behaviour in and near the Dielectric Material" Proc.NEPTIS-3. 46-51 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 汪士 楠、小田哲治: "ポリエチレン結晶性と熱刺激電流特性に対する薄膜生成プロセスの影響" 静電気学会誌. 18. 437-443 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Oda et al: "Fast Electrostatic Discharges between a charged Thin Dielectric Film and a Spherical Ekctrode with or without Dielectric Coating" IEEE Trans.on Ind.Appl.30. (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] 小田哲治 他: "背向電極を有する場合の剥離放電現象の観測-その2" 静電気学会講演論文集'93. 103-106 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 小田哲治 他: "剥離放電後の誘電体の熱刺激電流観測" 静電気学会講演論文集'93. 111-114 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 小田哲治 他: "帯電したテフロン薄膜における除電とその効果" 第12回空気清浄とコンタミネーションコントロール研究大会予稿集. 237-242 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 小田哲治 他: "新クリーンルームの運転・管理・清浄化ハンドブック" (株)NTS, 676 (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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