Preparation of Zirconia Thin Films by Electrochemical Vapor Deposition and their Application to Oxygen Sensors
| Project/Area Number |
05453119
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| Research Category |
Grant-in-Aid for General Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
工業物理化学
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| Research Institution | KYOTO UNIVERSITY |
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Principal Investigator |
OGUMI Zempachi Kyoto University, Faculty of Engineering, Professor, 工学部, 教授 (60110764)
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| Co-Investigator(Kenkyū-buntansha) |
INABA Minoru Kyoto University, Faculty of Engineering, Instructor, 工学部, 助手 (80243046)
UCHIMOTO Yoshiharu Kyoto University, Faculty of Engineering, Instructor, 工学部, 助手 (50193909)
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| Project Period (FY) |
1993 – 1994
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| Project Status |
Completed (Fiscal Year 1994)
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| Budget Amount *help |
¥5,700,000 (Direct Cost: ¥5,700,000)
Fiscal Year 1994: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 1993: ¥4,200,000 (Direct Cost: ¥4,200,000)
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| Keywords | Electorochemical Vapor Deposition / Yttria-stabilized Zirconia / Vapor-Phase Reaction / Thin Films / Ionic Conductor / Oxygen Sensor / イオン伝導体 |
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| Research Abstract |
A novel method for the preparation ofion-conductive thin films by electrochemical vapor deposition was developed, and oxygen sensors were prepared using this method. The results obtained are summarized as follows :
i) Dense yttria-stabilized zirconia (YSZ) films were formed on surface-oxidized nickel plates and nickel oxide pellets using a chemical vapor deposition-electrochemical vapor deposition (CVD-EVD) method.
ii) Dense YSZ films were formed on the surface-oxidized nickel wire (100 mum in diameter) by the above method, and hollow YSZ fibers, which is a promising material for oxygen permeation membrane, were prepared by removing the Ni and NiO layrs from the YSZ/Ni/NiO composite.
iii) A YSZ thin film formed on a small Ni/NiO pellet by CVD-EVD method, and an oxygen sensor was prepared using this composite.
The sensor had a sensitivity for oxygen partial pressure even at a low temperature of 500ﾟC.
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Report
(3 results)
Research Products
(3 results)
