| Project/Area Number |
05555004
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| Research Category |
Grant-in-Aid for Developmental Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Applied materials science/Crystal engineering
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| Research Institution | Kyoto Institute of Technology |
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Principal Investigator |
YAMADA Masasoshi Kyoto Institute of Technology, Faculy of Engineering and Design, Professor, 工芸学部, 教授 (70029320)
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| Co-Investigator(Kenkyū-buntansha) |
TATSUMI Masami Sumitomo Electric Industies, LTD., Itami Laboratories, Senior Researcher, 伊丹研究所, 主任研究員
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| Project Period (FY) |
1993 – 1995
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| Project Status |
Completed (Fiscal Year 1995)
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| Budget Amount *help |
¥7,300,000 (Direct Cost: ¥7,300,000)
Fiscal Year 1995: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1994: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 1993: ¥5,500,000 (Direct Cost: ¥5,500,000)
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| Keywords | Photoelasticity / Infrared Polariscope / Residual Strain / Compond Semiconductor / Microscopic Measurement |
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| Research Abstract |
In order to characterize two-dimensional profiles of residual strains in III-V compound semiconductors by means of photoelactic method, we have developed two kind of microscopic infrared polariscope. One is the scanning type polariscope with high sensitivity and good precision, in which the measurement is made point by point. The other is the multi-channel type polariscope with short measuring time, in which many points are measured simultaneously with an array detecter.
Scanning type polariscope After several trial manufacturing of the rotating polarizer which is the most important part of the scanning type polariscope, we have succeeded in manufacturing the scanning type polariscope with practicality on measuring time and precision. The spatial resolution is attained to several ten mum by using a infrared semiconductor laser. Varieties of III-V compound semiconductor wafers (LEC-GaAs, LEC-InP,VCZ-GaAs, VCZ-InP,HB-GaAs) were examed so that the scanning type polariscope was found to be very useful in checking the crystal growth conditions.
Multi-channel type polariscope A multi-channel type polariscope for visible light has been successfully developed with a data-processing system which is capable of processing a large amount of image data coming from the array detector. The polariscope developed showed fine performances on spatial resolution and mesearing time. A new technique was introduced for increasing the dynamic range of measurement.
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