| Project/Area Number |
05555014
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| Research Category |
Grant-in-Aid for Developmental Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Applied optics/Quantum optical engineering
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| Research Institution | Osaka University |
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Principal Investigator |
HARUNA Masamitu Osaka University, Fac.Medi., Dept.Allied Health Sci., Professor, 医学部, 教授 (20029333)
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| Co-Investigator(Kenkyū-buntansha) |
URA Shogo Osaka University, Fac.Eng., Dept.Electron.Eng., Research.Associate, 工学部, 助手 (10193955)
NISHIHARA Hiroshi Osaka University, Fac.Eng., Dept.Electron.Eng., Professor, 工学部, 教授 (00029018)
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| Project Period (FY) |
1993 – 1994
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| Project Status |
Completed (Fiscal Year 1994)
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| Budget Amount *help |
¥4,600,000 (Direct Cost: ¥4,600,000)
Fiscal Year 1994: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1993: ¥3,700,000 (Direct Cost: ¥3,700,000)
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| Keywords | Integrated optics / Laser-beam writing system / Optical devices |
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| Research Abstract |
The research has been made to realize the practical laser-beam (LB) writing system with high accuracy for integrated optic devices by combination of a translation stage with<0.1mum accuracy, focusing and modulation optics and electronic circuits. Major research results are described in the following.
1.We have fabricated successfully the LB writing system using the closed-loop controlled X-Y translation stage where the 442-nm He-Cd laser is used as the light source. The system has the accuracy of <0.1mum over an area of 10x10cm^2 and the translation speed up to 10mm/s with a speed fluctuation of<5x10^<-4.>
2.the LB writing system described above was applied for fabrication of a novel TE-TM mode splitter using directional coupling between heterogeneous waveguides in LiNbO_3. The mode splitter exhibited the extinction ratio of >12dB,showing that the LB writing system had really<0.1mum accuracy in the waveguide patterning.
3.The LB periodic-dot writing proposed by ourselves was used for integration of eight optical wavelength filters with interdigiatal electrodes for TE-TM mode conversion. The center wavelength spacing was 5.4nm which was in good agreement with the design value. This result indicated that the speed fluctuation of the translation stage was <10^<-4>. The LB writing system with <0.1mum accuracy was successfully used for the waveguide patterning of Nd-doped MgO : LiNbO_3 lasers and fabrication of photo mask of the periodic electrodes placed on LiNbO_3 crystalline film grown by ArF excimer laser ablation.
5.In addition, we have been developing the practical LB writing system in co-operation with the researchers in a supplier of the translation stage. In this system, the auto focusing is possible with the accuracy of 0.05mum over 20x20cm^2.
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