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Active Controlled Type Ultra-precision Table System Using Electro-Rheological Liquid

Research Project

Project/Area Number 05555041
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 機械工作・生産工学
Research InstitutionTokyo Institute of Technology

Principal Investigator

ITO Yoshimi  Tokyo Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授 (60016441)

Co-Investigator(Kenkyū-buntansha) SHIMA Koji  Mitsubishi Chemical Kasei Corporation, Central Laboratory, Researcher, 総合研究所, 研究員
SATO Chuichi  NSK Ltd. Production Engineering Laboratory, General Manager, 生産技術研究所, 所長
HASHIZUME Hitoshi  Tokyo Institute of Technology, Faculty of Engineering, Research Associate, 工学部, 助手 (50218400)
INABA Chikao  Tokyo Institute of Technology, Faculty of Engineering, Research Associate, 工学部, 助手 (10223231)
SHINNO Hidenori  Tokyo Institute of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (40196639)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥12,400,000 (Direct Cost: ¥12,400,000)
Fiscal Year 1994: ¥4,800,000 (Direct Cost: ¥4,800,000)
Fiscal Year 1993: ¥7,600,000 (Direct Cost: ¥7,600,000)
KeywordsMachine Tool / Table System / Structural design / Active control / Damping capacity / Simulation / Design methodolgy / Ultraprecsion / 能動形テーブル
Research Abstract

Development of advanced ultra-precision table system has recently become the most important problem to materialize an ultra-precision machine tool of the future, a high-performance scanning probe measuring system, etc.
However, there is no effective ultra-precision table system to realize the high performances, i.e., static and dynamic rigidities, ultra-precision movement function, compactness, ease of operation, active control function, etc.
In this research project, therefore, to develop a design methodology of advanced table system, actual aerostatic table systems based on a new design concept have been proposed and investigated. The proposed table system using Electro-reological liquid can be actively controlled by operation the electric field under the actual moving conditions. Validity of the proposed table structures have also been verified through experimental investigations under various constraints.

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (4 results)

All Other

All Publications (4 results)

  • [Publications] 橋詰等,新野秀憲,伊東誼,佐藤忠一: "電気粘性流体によるテーブルシステムの特性制御" 日本機械学会論文集(C編). 61. (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Hitoshi HASHIZUME,Hidenori SHINNO,Yoshimi ITO and Chuichi SATO: Transactions of the JSME. Vol.61, (to be published). (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 橋詰等,新野秀憲,伊東誼,佐藤忠一: "電気粘性流体によるテーブルシステムの特性制御" 日本機械学会論文集(C編). 61. (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 橋詰等,菊地英晴,新野秀憲,伊東諠,島耕司: "電気粘性流体によるテーブルシステムの特性制御" 日本機械学会第71期全国大会講演論文集. F. 401-403 (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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