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FUNCTIONAL COATING BY MEANS OF RADIATE RF MAGNETRON SPUTTERING

Research Project

Project/Area Number 05555043
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 機械工作・生産工学
Research InstitutionNAGOYA UNIVERSITY

Principal Investigator

MORI Tshihiko  NAGOYA UNIVERSITY,ENGINEERING,ASSOCIATE PROFESSOR, 工学部, 助教授 (90023340)

Co-Investigator(Kenkyū-buntansha) SAKURAI Masatoshi  OSG CO Ltd., DEVELOPMENT RESEARCH,MANAGER, 研究部開発課, 係長
MATSUMURO Akihito  NAGOYA UNIVERSITY,ENGINEERING,LECTURE, 工学部, 講師 (80173889)
NAKAMOTO Takeshi  NAGOYA UNIVERSITY,ENGINEERING,LECTURER, 工学部, 講師 (30198262)
NIIMI Tomohide  NAGOYA UNIVERSITY,ENGINEERING,ASSOCIATE PROFESSOR, 工学部, 助教授 (70164522)
羽根 一博  名古屋大学, 工学部, 助教授 (50164893)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥7,500,000 (Direct Cost: ¥7,500,000)
Fiscal Year 1994: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1993: ¥6,800,000 (Direct Cost: ¥6,800,000)
KeywordsRADIATED SPUTTERING / RADIO FREQUENCY SPUTTERING / MAGNETRON SPUTTERING / FUNCTIONAL COATING / FUNCTIONALLY GRADIENT FILM / TITANIUM NITRIDE FILM / TUNGSTEN CARBIDE FILM / 傾斜機能 / TiN層
Research Abstract

Coatings of cutting tips are demanded not only for their good surface properies but also for good adherence to the substrate. The former are related to high stability, high strength and etc. and the latter to bonding characteristics between film layr and substrate and etc. The WC-TiN gradient coating was conducted by rf magnetron sputtering using multi S-guns. In order to explain the gradient coating mechanism, various analyzes were carried out ; an X-ray Diffraction for an inspection of crystalline structures, an Auger Electron Spectral Analysis for an inspection of chemical compositions and a Scanning Electron Microscopy for observations for sectioned film layrs. Two mechanisms play an important role in improving the bonding characteristics. One is that sputter-deposited elements of each layr are composed of the same crystalline structure as NaCl type. Another one is a part of carbon from WC diffuses into the substrate. The deposition of a beta-WC_<1-X>, when in a stable state at high temperature, is due to a rapid cooling and removal of partial carbon.

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] 森 敏彦: "超音波メカノケミカル加工の熱流体的考察" 1994年度精密工学会秋季大会学術講演会講演論文集. 719-720 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 森 敏彦: "板成形に対するエキスパートシステムの応用" 1994年度精密工学会秋季大会学術講演会講演論文集. 767-768 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 森 敏彦: "ステンレス-アルミニウム積層板の一軸引張り変形特性" 日本機械学会論文集(A編). 60. 2107-2112 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 森 敏彦: "回転逐次内面しごき加工の開発" 塑性と加工. 35. 1342-1347 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 中本 剛: "複合形合金鋼粉焼結材の被削特性と快削化" 日本機械学会論文集(C編). 60. 687-693 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 松室 昭仁: "高圧力合成Sr-Ca-Cu-O超伝導体の機械的性質" 日本機械学会論文集(A編). 60. 2822-2828 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] MORI TOSHIHIKO: "CONSIDERATION OF FLUID MECHANICS OF ULTRASONIC MECHANO-CHEMICAL PROCESS" PROCEEDING OF JPSE AUTUMN CONFERENCE. 719-720 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] MORI TOSHIHIKO: "APPLY OF EXPERT SYSTEM TO SHEET METAL FORMING" PROCEEDING OF JPSE AUTUMN CONFERENCE. 767-768 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] MORI TOSHIHIKO: "DEFORMATION CHARACTERISTICS OF STAINLESS STEEL AND ALUMINUM CLAD SHEETUNDER UNIAXIAL TENSION" TRANSACTIONS OF JSME (A). 60. 2107-2112 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] MORI TOSHIHIKO: "DEVELOPMENT OF ROTATING GRADUAL INNER-IRONING" JOURNAL OF JSTP. 35. 1342-1347 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] NAKAMOTO TAKESHI: "IMPROVEMENT OF THE MACHINABILITY OF SINTERED ALLOY STEEL FROM COMPOSITE-TYPE(PARTIAL PREALLOYED)POWDER" TRANSACTIONS OF JSME (C). 60. 687-693 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] MATSUMURO AKIHITO: "MECHANICAL PROPERTIES OF Sr-Ca-Cu-O SUPERCONDUCTOR SYNTHESIZED UNDER HIGHPRESSURE" TRANSACTIONS OF JSME (A). 60. 2822-2828 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 森敏彦: "超音波メカノケミカル加工の熱流体的考察" 1994年度精密工学会秋季大会学術講演会講演論文集. 719-720 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 森敏彦: "板成形に対するエキスパートシステムの応用" 1994年度精密工学会秋季大会学術講演会講演論文集. 767-768 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 森敏彦: "ステンレス-アルミニウム積層板の一軸引張り変形特性" 日本機械学会論文集(A編). 60. 2107-2112 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 森敏彦: "回転逐次内面しごき加工の開発" 塑性と加工. 35. 1342-1347 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 中本剛: "複合形合金鋼粉焼結材の被削特性と快削化" 日本機械学会論文集(C編). 60. 687-693 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 松室昭仁: "高圧力合成Sr-Ca-Cu-O超伝導体の機械的性質" 日本機械学会論文集(A編). 60. 2822-2828 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Mori: "WC-TiN GRADIENT COATING BY MEANS OF RF MAGNETRO SPUTTERING" Proc.of IMMM'93. 399-406 (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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