• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Fabrication of Micro/Millimeter Wave Integrated Circuit by Novel Ferrite Plating Enhanced by Laser

Research Project

Project/Area Number 05555086
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionTOKYO INSTITUTE OF TECHNOLOGY

Principal Investigator

ABE Masanori  Tokyo Inst.Tech., Faculty of Eng., Professor, 工学部, 教授 (70016624)

Co-Investigator(Kenkyū-buntansha) INUI Tetsuji  NEC Environment Engin.Ltd., Director, 資源環境技術研究所, 主管研究員
KAWAMATA Tadashi  Matsushita Electronic Co., Corpor.Mat.Dev.Lab., Director, 電子部品研究所, 室長
ITOH Tomoyuki  Seiko Epson Co., Active Device Lab., Head, アクティブデバイス研究室, 主任 (40203153)
GOMI Manabu  J.A.I.S.T., Assoc.Professor, 材料科学研究科, 助教授 (80126276)
TAMAURA Yutaka  Tokyo Inst.Tech., Res.Cntr.Carbon Recycl.Utliz., Professor, 炭素循環素材研究センター, 教授 (00108185)
Project Period (FY) 1993 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥22,400,000 (Direct Cost: ¥22,400,000)
Fiscal Year 1995: ¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 1994: ¥6,500,000 (Direct Cost: ¥6,500,000)
Fiscal Year 1993: ¥13,000,000 (Direct Cost: ¥13,000,000)
KeywordsMicrowave / Millimeter wave / Ferrite film / Ferrite plating / MnZn ferrite / NiZn ferrite / Dielectric loss / フェライト / メッキ / 誘電率 / 透磁率
Research Abstract

The purpose of this study was to fabricate micro/millimeter wave devices in which ferrite-film nonreciprocal circuits (i.e.isolators and circulators) prepared by the novel laser-enhanced ferrite plating are integrated. The ferrite plating is low in process temperature (<100 C), and, when enhanced by laser beams, high in deposition rate and capable of selective area deposition by scanning. The plated films of NiZn and MnZn spinel ferrites were found to be highly lossy at microwave freguency. This was because concentration of Ni and Mn was low which gave rise Fe^<2+> ions in the spinel lattice. Therefore, we have developed a novel ferrite plating method utilizing highly alkaline aqueous solution of chelated Fe and other metal ions, by which the Ni and Mn concentration were successfully increased. Furthermore, we have fabricated films of hexagonal Ba-ferrite by novel electro-ferrite plating utilizing alternate electric current. The dielectric loss in the plated films of NiZn and MnZn ferrites were successfully reduced by exposing the films in vacuum at room temperature, without deteriorating their magnetic characteristics. We could not, unfortunately, realize the microwave/millimeter-wave devices integrated with the non-reciprocal ferrite devices, however, we have shown the potential feasibility to fabricate them.

Report

(4 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • 1993 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] Tomoyuki ITOH: "Ferrite Films Containing Mn,Ni and Ba Synthesized from Chelated Aqueous Solution at High pH (=11-13)" Journal of The Magnetics Society of Japan. 18. 307-310 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Tomoyuki ITOH: "Ferrite Plating of Ba-Containing Iron Oxide Films Using Chelated Highly Alkaline (pH=11-13) Aqueous Solutions" Jpn.J.Appl.Phys.34. 1534-1536 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Tomoyuki ITOH: "Ferrite Plating of Fe_<3-x>M_xO_4 (M=Ni and Zn) Films Utilizing Alternate Electric Current" Journal of The Magnetics Society of Japan. 18. 311-314 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Q.Zhang: "FERRITE PLATING OF Fe_3O_4 FILMS USING ALTERNATE ELECTRIC CURRENT" IEEE TRANSACTIONS ON MAGNETICS. 30. 4900-4902 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Abe: "Microwave Dielectric Loss Reduction by Vacuum Treatment for (Ni,Zn,Fe)_3O_4 Films Prepared by Ferrite Plating" IEEE TRANSACTIONS ON MAGNETICS. 32(発表予定). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Tomoyuki ITOH: "Ferrite Films Containing Mn, Ni and Ba Synthesized from Chelated Aqueous Solution at High pH (=11-13)" Journal of The Magnetics Society of Japan. 18. 307-310 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Tomoyuki ITOH: "Ferrite Plating of Ba-Containing Iron Oxide Films Using Chelated Highly Alkaline (pH=11-13) Aqueous Solutions" Jpn.J.Appl.Phys.34. 1534-1536 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Tomoyuki ITOH: "Ferrite Plating of Fe_<3-x>M_xO_4 (M=Ni and Zn) Films Utilizing Alternate Electric Current" Journal of The Magnetics Society of Japan. 18. 311-314 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Q.ZHANG: "FERRITE PLATING OF Fe_3O_4 FILMS USING ALTERNATE ELECTRIC CURRENT" IEEE Trans Magn.30. 4900-4902 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.ABE: "Microwave Dielectric Loss Reduction by Vacuum Treatment for (Ni, Zn, Fe)_3O_4 Films Prepared by Ferrite Plating" IEEE Trans.Magn.32 (To appear.). (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 阿部正紀: "キレート化フェライトメッキ法によるMnZnフェライトの作製" 日本応用磁気学会誌. 20(予定). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Masanori ABE: "Ferrite Plating of Ba-Containing Iron Oxide Films Using Chelated Highly Alkaline(pH=11-13)Aqueous Solutions," Jpn. J. Appl. Phys.34. 1534-1536 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Masanori ABE: "Ferrite Films Containing Mn, Ni and Ba Synthesized from Chelated Aqueous Solution at High pH(=11-13)" Journal of The Magnetics Society of Japan. 18. 307-310 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] M. Abe: "Wet-process preparation of amorphous Y-Fe oxide films ferromagnetic at room temperature" J. Appl. Phys.75. 6094-6096 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] M. Abe: "FERRITE PLATING OF Fe_3O_4 FILMS USING ALTERNATE ELECTRIC CURRENT" IEEE TRANSACTIONS ON MAGNETICS. 30. 4900-4902 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] M.Abe: "LOW TEMPERATURE(<100℃)FERRITE FILM SYNTHESIS FROM AQUEOUS SOLUTION BY FERRITE PLATING." Trans. Mat. Res. Soc. Jpn.15B. 1117-1122 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] Tomoyuki Itoh: "Ferrite Films Containing Mn,Ni and Ba Synthesized from Chelated Aqueous Solution at High pH (=11-13)" J.Mametic Soc.Jpn.(Supplement). 18. 307-310 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Tomoyuki Itoh: "Ferrite Plating of Ba-Containing Iron Oxide Films Using Chelated Highly-Alkalihe (pH=11-13) Aqueons Solution" Jpn.J.Appl.Phys.34. (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Abe: "Ferrite Plating:A Versatile Preparation Technique of Ferrite Films in Aqnecus Solution at low Temperature(<100℃)" Ferrites:Proceedings of ICF 6,Tokyo and Kyoto,Japan 1992. 472-477 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Abe: "Low Temperature(<100℃).Ferrite Film Synthesis from Aqueous Solution by Ferrite Plating" The 3rd MRS International Conference on Advanced Materials Abstracts. 77 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Abe: "Ferrite Plating:A Novel Technique Making Oxide Magnetic Films in Aqueons Solution" The Electrochemical Society,183RD Society Meeting Abstracts. 93-1. 850 (1993)

    • Related Report
      1993 Annual Research Report

URL: 

Published: 1993-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi