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Quantitative evaluation of scale-parameter on material properties by an ultrasonic micro-spectrometer with a high apatial resolution

Research Project

Project/Area Number 05555175
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Composite materials/Physical properties
Research InstitutionNagaoka University of Technology

Principal Investigator

IHARA Ikuo  Nagaoka Univ.of Tech., Eng.Div., Research Associate, 工学部, 助手 (80203280)

Co-Investigator(Kenkyū-buntansha) MIYASAKA Chiaki  Olympus Optical Co., Inf.Div., Chief Researcher, 技術開発本部, 主任研究員
NAKASO Noritaka  Toppan Printing Co., Research Institute, Chief Researcher, 総合研究所, 研究員
AIZAWA Tatsuhiko  Univ.of Tokyo, Eng.Div., Associate Professor, 工学部, 助教授 (10134660)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥5,500,000 (Direct Cost: ¥5,500,000)
Fiscal Year 1994: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1993: ¥4,300,000 (Direct Cost: ¥4,300,000)
KeywordsUltrasonic spectroscopy / Nondestructive evaluation / Elastic surface waves / Anisotropy / Elasticity / Inverse analysis / Thin films / Inhomogeneous material / 微小領域 / コーティング膜 / 表面波 / 超音波顕微鏡 / 力学特性
Research Abstract

An ultrasonic micro-spectrometer (UMSM) with a high spatial resolution was developed in order to evaluate scale-parameters which are related to material properties. The UMSM developed here is expected to be useful for the materials characterization by ultrasonic spectroscopy at a small area on the materials surface. The results obtained in this work are summarized as follows :
1) The UMSM enables us to measure precisely the reflection coefficients of materials at a small area in the frequency range from 10 to 150 Mhz ; (2) Using the measured reflection coefficients we can precisely determined phase velocities and attenuation factors of acoustic surface waves which are closely related to mechanical and electrical properties of materials. Elastic properties and grain size of materials are quantitatively estimated from the surface wave velocities and the attenuations, respectively, and also anisotropy can be detected from the reflection coefficients ; (3) An inversion technique based on th … More e ultrasonic reflectivity measurement was proposed for quantitatively estimating elastic properties of caoting films on substrate. This inversion enables us to determined materials properties of the thin film composite with randomly dispersed inclusions ; (4) Mean reflection coefficients on liquid-polycrystals interface are newly proposed for quantitatively estimating mean properties of inhomogeneous materials, and are examined experimentally and numerically. It was confirmed that the mean reflection coefficient defined here should be available as a useful parameter for estimating the local average properties in inhomogeneous materials as well as polycrystalline materials. The scale parameter on elastic properties of materials may also be estimate effectively by the mean reflection coefficient.
Because the spatial resolution and frequency characteristic in the reflectivity measurements can easily be improved by reconstructing the UMSM,efficient measurements for estimating the scale parameter will be performed in near future. Less

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (28 results)

All Other

All Publications (28 results)

  • [Publications] Ikuo IHARA: "Determination of Ultrasonic Attenuation in Surface Layer of Materials by Ultrasonic Reflectivity Measurement" Electronics Letters. 29. 1999-2000 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 井原郁夫: "超音波反射率測定に基づくスペクトロスコピー法による材料表面層の超音波減衰評価" 日本機械学会論文集. 60. 1444-1449 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 井原郁夫: "表面波スペクトロスコピーに基づく逆解析による薄膜特性評価に関する検討" 日本機械学会論文集. 60. 2664-2971 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Microscopic Determination of Surface Wave Velocities in Heat Treated Steels by Ultrasonic Reflectivity Measurement." Nondestructive Characterization of Materials. 5. 87-94 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 井原郁夫: "表面波による微小領域の異方性評価(弾性異方性評価のための超音波反射率測定法の適用に関する基礎的研究)" 日本機械学会論文集. 61. 769-776 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Estimation of Mean Acoustic Reflection Coefficient of Polycrystalline Aggregate" Applied Physics Letters. 66. 956-958 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Measurement of Ultrasonic Attenuation in Material Surface Layer by Spectroscopy Technique with Ultrasonic Reflectivity Measurement" JSME International Journal. 38. 393-399 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Inverse Analysis with Surface Wave Spectroscopy to Determine Material Properties of Thin Film on Substarate" Simulation of Materials Processing : Theory,Methods and Applications. 575-581 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Determination of Ultrasonic Attenuation in Surface Layr of Materials by Ultrasonic Reflectivity Measurement" Electronics Letters. 29-22. 1999-2000 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Determination of Ultrasonic Attenuation in Surface Layr of Materials by Spectroscopy Method with Ultrasonic Reflectivity Measurement" Trans.Jpn.Soc.Mech.Eng.60-574. 1444-1449 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Approach for Estimating Material Properties of Thin Film on Substrate by Inverse Analysis with Surface Wave Spectroscopy" Trans.Jpn.Soc.Mech.Eng.60-579. 2664-2671 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Microscopic Determination of Surface Wave Velocities in Heat Treated Steels by Ultrasonic Reflectivity Measurement" Nondestructive Characterization of Materials, Plenum Press.VI. 87-94 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Anisotropy Detection in Small Area of Materials using Surface Acoustic Waves (Basic Research on Utilization of Ultrasonic Reflectivity Measurement for Estimating Elastic Anisotropy)" Trans.Jpn.Soc.Mech.Eng.61-584. 769-776 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Measurement of Ultrasonic Attenuation in Material Surface Layr by Spectroscopy Technique with Ultrasonic Reflectivity Measurement" JSME International Journal. 38-3. 393-399 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Estimation of Mean Acoustic Reflection Coefficient of Polycrystalline Aggregate" Applied Physics Letters. 66-8. 956-958 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Inverse Analysis with Surface Wave Spectrocsopy to Determine Material Properties of Thin Film on Substarate" Simulation of Materials Processing : Theory, Methods and Applications, A.A.Balkema, Rotterdam.575-581 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ikuo IHARA: "Microscopic Determination of Surface Wave Velocities in Heat Treated Steels by Ultrasonic Reflectivity Measurement" Nondestructive Characterization of Materials VI,Plenum Press.87-94 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 井原郁夫: "超音波反射率測定に基づくスペクトロスコピー法による材料表面層の超音波減衰評価" 日本機械学会論文集. 60-574A. 1444-1449 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 井原郁夫: "表面波スペクトロスコピーに基づく逆解析よる薄膜特性評価に関する検討" 日本機械学会論文集. 60-579A. 2664-2671 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Ikuo IHARA: "Estimation of Mean Acoustic Reflection Coefficient of Polycrystalline Aggregate," Applied Physics Letters. 66-8. 956-958 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 井原郁夫: "表面波による微小領域の異方性評価(弾性異方性評価のための超音波反射率測定法の適用に関する基礎的研究)" 日本機械学会論文集,掲載決定. 61-584A. (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] Ikuo IHARA: "Inverse Analysis with Surface Wave Spectroscopy to Determine Material Properties of Thin Film on Substrate" Proceedings of Numerical Methods in Industrial Forming Processes,to be published from Balkema Publishers. (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 井原 郁夫: "表面波による微小領域の非破壊材料評価" 日本機械学会論文集A編. 59-564. 1909-1916 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Ikuo IHARA: "Determination of ultrasonic attenuation in surface layer of materials by ultrasonic reflectivity measurement" Electronics Letters. 29-22. 1999-2000 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 井原 郁夫: "ちょっぴり新しい超音波による材料評価" バウンダリー. 10-1. 15-17 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] 井原 郁夫: "表面波による微小領域の力学特性評価(超音波スペクトロスコピー法による減衰特性と音速の微視的測定)" 精密工学会秋季大会学術講演会論文集(II). 555-556 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 井原 郁夫: "超音波反射率測定による微小領域の減衰特性評価" 日本非破壊検査協会秋季大会講演概要集. 33-38 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 井原 郁夫: "超音波マイクロスペクトロスコピーによる微小領域の減衰特性評価" 日本機械学会平成5年度材料力学部門講演会講演論文集. 970-73. 251-252 (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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