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Functional Design of Semiconductor Gas Sensors for Development of Odor Sensors

Research Project

Project/Area Number 05555231
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 工業物理化学
Research InstitutionNagasaki University

Principal Investigator

EGASHIRA Makoto  Nagasaki Univ., Faculty of Eng.Professor, 工学部, 教授 (60037934)

Co-Investigator(Kenkyū-buntansha) MATSUURA Yoshinobu  Figaro Engineering Inc., Material Development Group Manager, 材料開発グループ, マネージャー
TAKAO Yuji  Nagasaki Univ., Graduate School of Marine Sci.and Eng.Research Associate, 大学院海洋生産科学研究科, 助手 (20206709)
SHIMIZU Yasuhiro  Nagasaki Univ., Faculty of Eng.Associate Progessor, 工学部, 助教授 (20150518)
Project Period (FY) 1993 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥14,100,000 (Direct Cost: ¥14,100,000)
Fiscal Year 1995: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 1994: ¥3,900,000 (Direct Cost: ¥3,900,000)
Fiscal Year 1993: ¥8,600,000 (Direct Cost: ¥8,600,000)
KeywordsOdor sensor / Semiconductor gas sensor / Trimethylamine / Dimethylamine / Ammonia / Sensitizer / Gas sensing mechanism
Research Abstract

The present project was focused on functional design of semiconductorgas sensors for development of odor sensors capable of detecting of odor components, such as trimethylamine (TMA), dimethylamine (DMA) and ammonia, with high sensitivity and selectivity.
Thickness dependence of TMA gas sensistvity of sensors equipped with interior electrodes have been investigated by employing semiconductor metal oxides loades with and without different amounts of noble metals. It has revealed that optimum design of both the thickness and the catalytic activity for TMA oxidation of sensor materials is of primary importance for the development of TMA gas sensors.
It was found that In_2O_3-MgO (5mol%) loaded with 3.0 wt% Pt (3.0Pt/In_2O_3-MgO (5mol%)) was the only sensor which exhibited higher sensitivity to DMA than TMA at 300゚C,among the sensors tested. The DMA sensitivity was further enhanced by coating the surface of 3.0Pt/In_2O_3-MgO (5mol%) sensor with a TiO_2 or 0.5Pt/TiO_2 layr. The high DMA sensitivity of the single layr sensor was found to be attributed to its high activity for producing ethylenimine and less activity for producing NO_X. Ethylenimine produced during the oxidation of TMA is more reactive with chemisorbed oxygen on the sensor material, while NO_X are oxidation products of TMA and act as interference gases.
High NH_3 sensitivity could be realized with the doible layr sensor consisting of an In_2O_3-MgO (5mol%) sensing layr, a 0.5Ir/TiO_2 coating layr atop the sensing layr and electrodes between these two layrs. It was found that selection of both the sensor materials having moderate NH_3 oxidation without producing large amounts of NO_X and the coating layr exhibiting high activity for reduction of NO_X into N_2 by NH_3 is of primary importance for developing an NH_3 sensor having high sensitivity.

Report

(4 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • 1993 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] Y.Takao, M.Nakanishi, T.kawaguchi, Y.Shimizu, M.Egashira: "Semiconductor Dimethylamine Gas Sensors with High Sensitivity and Selectivity" Sensors and Actuators B. B25. 375-379 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Mochida, K.Kikuchi, T.Kondo, H.Ueno, Y.Matsuura: "Highly Sensitive and Selective H_2S Gas Sensor from r.f. Sputtered SnO_2 Thin Film" Sensors and Actuators B. B25. 433-437 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] H.Murayama, Y.Matsuura: "Ru-Loaded WO_3 Ammonia Sensor" Japanese Sensor Newsletter. 9. 21-25 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Egashira: "Functional Design of Semiconductor Gas Sensors for Odor Sensing" Proc. of the 6th Conf. on Sensor Technology(Teagu, Korea, Nov.10-11). 6. 21-30 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 江頭 誠: "半導体ガスセンサの組織制御とニオイ・鮮度測定への応用" 電気化学. 63. 583-587 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Takao, M.Egashira, T.Kawaguchi, Y.Shimizu, M.EGashira: "Semiconductor Dimethylamine Gas Sensors With High Sensitivity and Selectivity" Sensors and Actuators B. B25(1-3). 375-379 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Machida, K.Kikuchi, T.Kondo, H.Ueno, Y.Matsuura: "Highly Sensitive and Selective H_2S Gas Sensor from r.f.Sputtered SnO_2 Thin Film" Sensors and Actuators B. B25(1-3). 433-437 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] H.Murayama, Y.Matsuura: "Ru-Loaded WO_3 Ammonia Sensor" Japanese Sensor Newsletter. 9(3). 21-25 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Egasira: "Functional Design of Semiconductor Gas Sensors for Odor Sensing" Proc.of the 6th Conf.on Sensor Technology(Teagu, Korea, Nov.10-11). 6. 21-30 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Egasira: "Microstructural Design of Semiconductor Gas Sensors and Their Application to Odor and Freshness Sensors" Denki Kagaku. 63(7). 583-587 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Egashira: "Odor Sensing by Semiconductor Metal Oxides" Sensors and Actuators B. 13/14. 443-446 (1993)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y.Shimizu: "Trimethylamine-Sensing Mechanism of TiO_2-Based Sensors. 3.Temperature Programmed Desorption Behaviour of Trimethylamine and Variation of Sensitivity with Sensor Thickness" Sensors and Actuators B. 13/14. 623-624 (1993)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y.Takao: "High Ammonia Sensitive Semiconductor Gas Sensors with Double-Layer Structure and Interface Electrodes" J.Electrochem.Soc. 141. 1028-1034 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y.Takao: "Semiconductor Dimethylamine Gas Sensor with High Sensitivity and Selectivity" Sensors and Actuators B. B25. 375-379 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Mochida: "High Sensitive and Selective H_2S Gas Sensor form r.f.Sputterd SnO2 Thin Film" Sensors and Actuators B. B25. 433-437 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 江頭 誠: "半導体ガスセンサの組成制御とニオイ・鮮度測定への応用" 電気化学. 63. 583-587 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M.Egashira: "Chemical Sensor Technology Vol.5(分担)" Kodansha Ltd., 274(18) (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] 江頭 誠: "アドバンストセンサハンドブック(分担)" 培風館, 763(10) (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y.Takao: "Semiconductor Dimethylamine Gas Sensors with High Sensitivity and Selectivity" Technical Digest of the 5th International Meeting on Chemical Sensors,July 11-14,Rome,Italy. 1. 462-465 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Egashira: "Semiconductor Trimethylamine Sensors to Detect Fish Freshness" Chcmical Sensor Tcchnology,Kodansha. 5. 237-254 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Egashira: "Selective Detection of Dimethylamine with Semiconductor Gas Sensor by Controlling Its Oxidation Process" Japanese Sensor Newsletter. 8. 11-15 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Y.Takao: "High Ammonia Sensitive Semiconductor Gas Sensors with Double-Layer Structure and Interface Electrodes" J.Electrochem.Soc.141. 1028-1034 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Egashira: "Fish Freshness Detection by Semiconductor Gas Sensors" Olfaction and Taste XI(Proc.of the 11th Intern.Symp.on Olfac-tion and Taste and of the 27th Japan.Symp.on Taste and Smell. 715-719 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Y.Takao: "High Ammonia Sensitive Semiconductor Gas Sensors with Double‐Layer Structure and Interface Electrodes" J.Electrochem.Soc.141(in press). (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.H.Han: "Effect of Thickness on TMA Sensitivity of In_2O_3‐Based Sensors" Proc.of the 4th Conf.on Sensor Technology(Sensors'93),Taegu,Korea,Dec.10‐11. 53-57 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Miyazaki: "The Role of Catalysts in Ammonia Sensing Characteristics of Semiconductor Gas Sen‐sors with Double‐Layered Structure" Proc.of East Asia Conf.on Chemical Sensors,Fukuoka,Japan,Oct.12‐13. 181-184 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.Shimizu: "Trimethylamine‐Sensing Mechanism of TiO_2‐Based Sensors,3." Sensors and Actuators B. 13/14. 623-624 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Egashira: "Odor Sensing by Semiconductor Metal Oxides" Sensors and Actuators B. 13/14. 128-131 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Egashira: "Configurational Design of Semiconductor Thick Film Sensors for Odor Sensing" Proc.Symp.on Chemical Sensors II,Hawaii,U.S.A.,May 16‐21. 510-521 (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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