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Fundamental study on spherical aberration correction of the objective lens of an electron microscope using a foil lens

Research Project

Project/Area Number 05650051
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field Applied physics, general
Research InstitutionNagoya University

Principal Investigator

HANAI Takaaki  Nagoya University, Electron Optics Lab.Associate Professor, 工学部, 講師 (00156366)

Co-Investigator(Kenkyū-buntansha) TANAKA Shigeyasu  Nagoya Univ., Electronics, Assist.Prof., 工学部, 助手 (70217032)
HIBINO Michio  Nagoya Univ., Electronics, Professor, 工学部, 教授 (40023139)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥2,400,000 (Direct Cost: ¥2,400,000)
Fiscal Year 1994: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1993: ¥1,000,000 (Direct Cost: ¥1,000,000)
Keywordstransmission electron microscopy / spherical aberration correction / foil lens / electron lens / 球面収差 / 収差補正 / 球面収差測定法
Research Abstract

1. Development of a foil lens for the objective lens of a transmission electron microscope (TEM) : In order to design the foil lens with the optimum characteristics in spherical aberration correction, spherical aberration coefficients were calculated for variable geometries of the foil lens. It was found that the correction is achieved by locating the foil lens close to the lower polepiece and making the diameter of the electrode aperture as small as 0.3mm. A side-entry type foil lens was developed based on the calculation. A device for heating the foil was incorporated to avoid contamination build-up on the foil due to intense transmitted electron beam focused on it.
2. Measurements of spherical aberration of the corrected objective lens : The spherical aberration was measured from the deviation of dark-field TEM images of MgO particles from the corresponding bright-field image. The spherical aberration decreased as the foil lens voltage was increased up to 600 V and became negative at … More 800 V.A small spherical aberration caused around the optimum foil lens voltage, however, could not be measured because the dark-field image of MgO quickly fades out at high magnifications due to radiation damage. Fine gold particles which is not sensitive to electron irradiation, therefore, were observed around the optimum voltage at sufficiently high magnifications, which also enabled us to reduce the error in measured spherical aberrations caused by defocus because the defocus effect was detected from the phase contrast of the carbon supporting film. At the foil lens voltage of 615 V the deviation of the dark-field image disappeared, which proved the correction of spherical aberration.
3. Construction of an optical Fourier transform system for measurements of spherical aberration coefficients. : In order to investigate the performance of the foil lens not only at single diffraction angle but over a wide range of the aperture angle, an optical Fourier transform system, which consists of a diffractmeter and a computer for data treatments, was constructed. The spherical aberration coefficients were accurately measured from spatial frequencies providing maxima and minima in the power spectrum of TEM images of thin carbon films. Less

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] 花井 孝明: "Effect of the three-fold astigmatism on the foil lens used for correction of the spherical aberration of a probe-forming lens" Optik. 97. 86-90 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 花井 孝明: "Improvement of maximum entropy method for reduction of the statistical noise in electron microscope images" Electron Microscopy 1994. 1. 435-436 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 田中 成泰: "Electron microscope study of modulated structures in LPE-grown InGaAsP epitaxial layers lattice matched on (001) GaAs" Electron Microscopy 1994. 1. 617-618 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 日比野 倫夫: "STEM elemental mapping system using PEELS of a moderate-scale detector" Electron Microscopy 1994. 1. 621-622 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 花井 孝明: "Characteristics and effectiveness of a foil-lens in correcting the spherical aberration of electron probe instruments" Proc.4th Int.Conf.Charged Particle Optics. 226-227 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 日比野 倫夫: "Detection system for fast STEM elemental mapping using parallel EELS with a moderate-scale detecter" Microbeam Analysis. 3. 299-303 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Takaaki HANAI: "Effect of the three-fold astig-matism of the foil lens used for correction of the spherical aberration of a probe-forming lens" Optik. 97. 86-90 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Takaaki HANAI: "Improvement of maximum entropy method for reduction of the statistical noise in electron microscope images" Electron Microscopy 1994. 1. 435-436 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Shigeyasu TANAKA: "Electron microscopy study of modulated structure in LPE-grown InGaAsP epitaxial layrs lattece matched on (001) GaAs" Electron Microscopy 1994. 1. 617-618 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Michio HIBINO: "STEM elemental mapping system using PEELS of a moderate-scale detector" Electron Microscopy 1994. 1. 621-622 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Takaaki HANAI: "Characteristics and effectiveness of a foil lens in correcting the spherical aberration of electron probe instruments" Abstr.4th Int.Conf.Charged Particle Optics. 226-227 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Michio HIBINO: "Detection system for fast STEM elemental mapping using parallel EELS with a moderate-scale detector" Microbeam Analysis. 3. 299-303 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Michio HIBINO: "Formation of fine electron probe by correction of the spherical aberration and its application to scanning transmission electron microscopy" Proc.1st China-Japan Joint Symposium on Microbeam Analysis. 33-38 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 花井孝明: "Effect of the three-fold astigmatism on the foil lens used for correction of the spherical aberration of a probe-forming lens" Optik. 97. 86-90 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 花井孝明: "Improvement of maximum entropy method for reduction of the statistical noise in electron microscope images" Electron Microscopy 1994. 1. 435-436 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 田中成泰: "Electron microscope study of modulated structures in LPE-grown InCaAsP epitaxial layers lattice matched on (001)GaAs" Electron Microscopy 1994. 1. 617-618 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 日比野倫夫: "STEM elemental mapping system using PEELS of a moderate-scale detector" Electron Microscopy 1994. 1. 621-622 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 花井孝明: "Characteristics and effectiveness of a foil lens in correcting the spherical aberration of electron probe instruments" Proc.4th Int.Conf.Charged Particle Optics. 226-227 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 日比野倫夫: "Detection system for fast STEM elemental mapping using parallel EELS with a moderate-scale detector" Microbeam Analysis. 3. 299-303 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 花井孝明: "最大エントロピー法を用いた画像処理のSTEMへの応用" 日本電子顕微鏡学会「電子顕微鏡による材料研究のための新手法」研究部会予稿集. 16-20 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 日比野倫夫: "Spectrum-acquisition Imaging System for STEM Elemental Mapping using PEELS with a Moderate-scale Detector." Proc.7th Chinese-Japanese Electron Microscopy Seminar(in print). 1. (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 田中成泰: "Raman Scattering of InGaAsP Lattice-matched to GaAs in the Region of Immiscibility." Japanese Journal of Applied Physics. 32. 2718-2721 (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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