| Project/Area Number |
05650143
|
|---|
| Research Category |
Grant-in-Aid for General Scientific Research (C)
|
| Allocation Type | Single-year Grants |
|---|
| Research Field |
設計工学・機械要素・トライボロジー
|
|---|
| Research Institution | Nagaoka University of Technology |
|---|
Principal Investigator |
KYUSOJIN Akira Nagaoka University of Technology Mechanical Engineering, Professor, 工学部, 教授 (20016661)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
OIWA Takaaki Shizuoka University Mechanical Engineering, Associate Professor, 工学部, 助教授 (00223727)
|
|---|
| Project Period (FY) |
1993 – 1994
|
| Project Status |
Completed (Fiscal Year 1994)
|
| Budget Amount *help |
¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 1994: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 1993: ¥1,000,000 (Direct Cost: ¥1,000,000)
|
|---|
| Keywords | friction force / impulsive force / X Y GAMMA positioning device / inertial slider / piezoelectric actuator / 圧電モータ / 円筒ラッピング / 積層型圧電素子 / 楕円軸 |
|---|
| Research Abstract |
Last fiscal year, we finished a ellipsoidal shaft by lapping and tried to rotate by pushing with a micrometer head, but failed. It is difficult to rotate a shaft very small amount using PZTs, because of the friction in contact parts and bearings.
This fiscal year, we thought over again about this principle. We thought out a new mechanism, namely x y GAMMA positioning device using impulsive force without any bearings. Minimum step sizes were obtained as follows.
minimum step size 0.05mu m in X direction
0.05mu m in Y direction
0.6 arcsec in GAMMA direction
Motion errors were obtained as follows.
motion errors over <plus-minus> 25mu m scan in X directi
0.03mu m in Y direction
0.6 arcsec in GAMMA direction
motion errors over <plus-minus> 250 arcsec scan inGAMMA directi
0.03mu m in X direction
0.03mu m in Y direction
|
