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The effect of elastic deformation and dimensional errors of a magnification lever on the displacement characteristics of the parallel spring for positioning

Research Project

Project/Area Number 05650153
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 設計工学・機械要素・トライボロジー
Research InstitutionTokyo National College of Technology

Principal Investigator

YOSHIMURA Yasuo  TOKYO NATIONAL COLLEGE OF TECHNOLOGY,Department of Mechanical Engineering, Prof., 機械工学科, 教授 (20042682)

Co-Investigator(Kenkyū-buntansha) KUROSAKI Shigeru  TOKYO NATIONAL COLLEGE OF TECHNOLOGY,Department of Mechanical Engineering, Prof., 機械工学科, 教授 (70042710)
OTSUKA Jiro  SHIZUOKA INSTITUTE OF SCIENCE & ENGINEERING,Department of Mechanical Engineering, 工学部・機械工学科, 教授 (30016787)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 1994: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1993: ¥1,000,000 (Direct Cost: ¥1,000,000)
KeywordsPositioning / Parallel Spring / Interference / Displacement magnification / XYZ table / Elastic hinge / Piezoelectric element / Dimensional error / 一体構造 / ヒンジ / 変位 / 動剛性 / 拡大率 / 拡大効率 / てこ / PZT / 変位誤差
Research Abstract

The followings are conduced through the theory, FEM anlysis and experiment in 1944.
1) The effect of the dimensional error on the liner motion of the movable stage.
2) Design and manufacture of the one-piece XYZ table.
1.The effect of the dimensional error on the linear motion of the movable stage
Manufacturing a parallel spring movement with the magnifying lever made of alminume, 80 in length, 60 in width and 6 mm in thickness, we investigate the effect of the dimensional error and the error of the lever ratio on the linear motion of the movable stage. The facts made clear in study are ;
(1) The movable stage declines clockwise with increase of dimensional error in the thickness, vice versa.
(2) The slope per unit vertical displacement remains unchanged regadless of the load value.
(3)The asymmetry of the movement creates the inclination on the movalble stage.
2.Design and manufacture of the one-piece XYZ table
Using the wire cutter we made an one-piece XYZ table cut from an alminum plate, measuring 40*40*40 mm in heigt, withand depth, respectively. The maximum travel of the each table is expected to reach 20 mum. The table is activated by PZT.The results obtained in the study are ;
1) High possibility of design and manufacture of a prominent one-pice XYZ table
2) The interference of the displacement in each of three axis is confiremed to be less than around 3-4%。

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] 吉村靖夫: "変位拡大機構付き平行ばね機構の変位特性(寸法誤差が移動台の直接連動に及ぼす影響" 1994年度精密工学会秋季大会学術講演会講演論文集. No.2. 571-572 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 大塚二郎: "超精密位置決めの現状と問題点" 機械と工具. 5月号. 18-25 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.YOSHIMURA: "Displacement characteristics of One-piece Parallel spring Movement for Balance" Int.J of JSPE(Japan Society for Precision Engineering). Vol.28 No.3. 255-260 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 大塚二郎: "超精密生産技術大系(第2巻)" フジテクノシステム. No.2. (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 黒崎茂: "超小型ひずみゲージによるモード工応力拡大係数の実験解析法" 日本機械学会論文集. Vol.59 No.565. 2143-2148 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.YOSHIMURA: "Displacement characteristics of Parallel Spring Movement with Magnifying Lever" Proc.of 1994 Autumn General Meeting of JSPE. No.2. 571-572 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] J.OTSUKA: "Present Situation in Ultra Fine Positioning" Machine and Tool (Periodicals). No.5. 18-25 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.YOSHIMURA: "Displacement Characteristic of One-piece Parallel Spring Movement for Balance (6th Report)" Int.J.of JSPE. Vol.28, No.3. 255-260 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] J.OTSUKA: "Outline of Ultra Fine Positioning System in Productinity (No.2) (co-authored)" Fuji Techno Sytem. (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.KUROSAKI: "Experimental Strees Intensity Factor Analysis of Mode I be Extremely Small-Sized Strain Gange" J.of JSME (A). Vo59, No.565. 2143-2148 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 吉村靖夫: "変位拡大機構付き平行ばね機構の変位特性(寸法誤差が移動台の直線運動に及ぼす影響)" 1994年度精密工学会秋季大会学術講演会講演論文集. NO.2. 571-572 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 大塚二郎: "超精密位置決めの現状と問題点" 機械と工具. 5月号. 18-25 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Y.Yoshimura: "Displacement characteristics of one-piece Parallel Spring Movement for Balance(6th Report)" International Journal of the Japan Society for Precision Engineering. Vol.28 NO.3. 255-260 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 大塚二郎: "超精密生産技術大系(第2巻)" フジテクノシステム. NO.2. (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 黒崎茂: "超小型ひずみゲージによるモードI応力拡大係数の実験解析法" 日本機械学会論文集A編. 59. 2143-2148 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 吉村靖夫: "精密位置決め用平行ばね機構の変位特性(第2報)" 精密工学会1993年度春季大会講演論文集No.1. P.367-P.368 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 吉村靖夫: "精密位置決め用平行ばね機構の変位特性(非対称変位縮小てこ)" 日本設計工学会平成5年度春季研究発表会講演論文集. P.37-P.38 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 吉村靖夫: "精密位置決め用平行ばね機構の変位特性(第3報)" 精密工学会1993年度秋季大会講演論文集. P.779-P.780 (1993)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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