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Studies of miky transparent conducting ZnO : Al films with textured surface

Research Project

Project/Area Number 05650315
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionKANAZAWA INSTITUTE OF TECHNOLOGY

Principal Investigator

FUKUDA Ichirou  KANAZAWA INSTITUTE OF TECHNOLOGY,DEPARTMENT OF ELECTRONICS,PROFESSOR, 工学部, 教授 (10064445)

Co-Investigator(Kenkyū-buntansha) ISHII Makoto  KANAZAWA INSTITUTE OF TECHNOLOGY,DEPARTMENT OF ELECTRONICS,PROFESSOR, 工学部, 教授 (30222946)
TAKATA Shinzo  KANAZAWA INSTITUTE OF TECHNOLOGY,DEPARTMENT OF ELECTRICAL,ENGINEERING,PROFESSOR, 工学部, 教授 (70064467)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1994: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1993: ¥1,100,000 (Direct Cost: ¥1,100,000)
KeywordsTransparent conducting ZnO films / milky transparent conducting ZnO films / ZnO films with a textured surface / haze ratio / sputterd ZnO films / CVD ZnO films / ZnO:Al / CVD / TCO / 太陽電池用透明電極 / ZnO / AlドープZnO / 表面テクスチャー / ミルキー膜 / 透明電極
Research Abstract

Purpose and results of this project are shown as follows. We report transparent and conductive zinc oxide thin films prepared by CVD and dc magnetron sputtering.
In the case of CVD films : Transparent and conducting zinc oxide (ZnO) films have been prepared on glass substrate by atomospheric and low pressure chemical vapor deposition (CVD) using zinc acetylacetonate (Zn(C_5H_7O_2)_2) and oxygen sources of water (H_2O) and hydrogen peroxide (H_2O_2). It was found that H_2O and H_2O_2, which incliude hydrogen, were better oxygen sources than an oxygen-containing gas such as air. Al-doped ZnO films with a resistivity as low as 7 X 10^<-3> OMEGAcm and haze ratio up to 62% at wave length of 550 nm were prepared at a substrate temperature of 350 ゚C and a low pressure of 60 Torr using aluminium acetylacetonate (Al(C_5H_7O_2)_3) as the dopant source.
In the case of sputtered films : Transparent and conductive milky ZnO films with a textured surface were prepared by dc magnetron sputtering using ZnO targets with an Al2O3 content in the range 0-2.0 wt%. The grain growth and surface morphology were considerably dependent on the Al2O3 content, ranging from a disk-like textured surface for undoped ZnO films to a wedge-like textured surface for ZnO : Al films prepared with a content above 0.5 wt%. The transmittance in the near-infrared range of milky ZnO : Al films prepared with an Al2O3 content of 0.75 wt% was considerably better than that of films prepared with a content of 2.0 wt%. A sheet resistance as low as 3.2 OMEGA/*, a transmittance of 78 % and a haze ratio of 65 % at a wave length of 550 nm were obtained for milky ZnO : Al films 3 mum thick prepared with an Al2O3 content of 0.75 wt%.

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] H.Sato et al.: "Transparent conducting ZnO thin films prepared on low temperature substrate by CVD using Zn(C5H7O2)2)" Thin Solid Films. 246. 65-70 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Sato et al.: "Alumlnium content dependence of milky transparent conducting ZnO : Al with textured surface prepared by dc magnetron sputtering" Thin Solid Films. 246. 86-91 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Minami et al.: "Preparation of milky transparent conducting ZnO films with textured surface by atmospheric CVD using (Zn(C5H7O2)_2)" Thin Solid Films. 253. 14-19 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Minami et al.: "Transparent and conductive ZnO thin films prepared by atmospheric-pressure CVD using zine acetylacetonate" Jpn.J.Appl.Phys.33. L743-L746 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Sato, T.Minami, T.Miyata, S.Takata and M.Ishii: ""Transparent conducting ZnO thin films prepared on low temperature substrates by chemical vapor deposition using Zn(C_5H_7O_2)_2"" Thin Solid Films. 246. 65-70 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Sato, T.Minami, Y.Tamura and S.Takata: ""Aluminium content dependence of milky transparent conducing ZnO : Al films with textured surface prepared by d.c. magntron sputtering"" Thin Solid Films. 246. 86-91 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Minami, H.Sonohara, S.Takata and H.Sato: ""Transparent conductive ZnO thin films prepared by atomospheric-pressure chemical vapor deposition using zinc acethylacetonate"" Jpn.J.Appl.Phys.33. L743-L746 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Minami, H.Sato, H.Sonohara, S.Takata and I.Fukuda: ""Preparation of milky transparent conducting ZnO films with textured surface by atomospheric chemical vapor deposition using Zn(C_5H_7O_2)_2"" Thin Solid Films. 253. 14-19 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] H.Sato: "Transparent Conducting ZnO Thin Films Prepared on Low Temperature Substrate by Chemical Vapor Deposition Using Zn(C_5H_7O_2)_2" Thin Solid Films. 246. 65-70 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Sato: "Aluminium Content Dependence of Milky Transparent Conducting ZnO:Al Films with Textured Surface Prepared by d.c.Magnetron Sputterir" This Solid Films. 246. 86-91 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Minami: "Preparation of Milky Transparent Conducting ZnO Films with Textured Surface by Atmospheric Chemical Vapor Deposition Using Zn(C_5H_7O_2)_2" Thin Solid Flims. 253. 14-19 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Tadatsugu Minami: "Transparent and Conductive ZnO Thin Films Prepared by Atmospheric-Pressure Chemical Vapor Deposition Using Zinc Acetylacetonate" Jpn.J.Appl.Phys.33. L743-L746 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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