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Design and fabrication of multilayr thin film 3D optical planar circuit using birefringence

Research Project

Project/Area Number 05650336
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 電子デバイス・機器工学
Research InstitutionKANAGAWA UNIVERSITY

Principal Investigator

HSU Jui-pang  Kanagawa university, Dept.of Electrical engineering, Professor, 工学部・電気工学科, 教授 (10078298)

Co-Investigator(Kenkyū-buntansha) ANADA Tetsuo  Kanagawa university, Dept.of Electrical engineering, Lecturer, 工学部・電気工学科, 専任講師 (20260987)
Project Period (FY) 1993 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1994: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1993: ¥1,600,000 (Direct Cost: ¥1,600,000)
Keywordsoptical planar circuit / multilayred thin film structure / 3-D optical waveguide / structure anisotropy / strong confinement / polarization maintaining waveguide / 導波路
Research Abstract

In this research, wide separation of TE and TM slab-mode propagation constant being realized by multilayred thin-film structure, three dimentional (3D) optical wave guides, where single mode operation or polarization-maintaining operation are expected, are analyzed based on optical planar circuittheory. The corresponding 3D optical waveguides are fabricated, measured and compared with the analytical results. Also as a basic research for optical planar circuit with 2D pattern to confined the optical field laterally, simple optical circuit such as bend with large bend angle, Y branch line with large branching angle and circular bend are analyzed and experimented. Following results, still preliminary, are obtained.
(1) Multilayred thin-film slab waveguide being constructed by TiO2/SiO2,10 layrs are enough for sufficient TE-TM mode separation, which is also confirmed by calculation and experiment.
(2) Loss at this time is measured to be l. 6dB/cm for TM mode and 3dB/cm for TE mode.
(3) As for … More the analysis of 3D optical waveguide, supposing the top and bottom metal boundary at the proper position, about 25 height modes of TE and TM are necessary to realize the continuity of the tangential field components.
(4) As for multilayred 3D optical wave guide, single mode operation is possible for 0.3mu thickness but multi mode operation for 0.6mu with step-type side-confinement, Rib-type side-confinement again makes this structure single mode operation.
(5) Dielectric strip loaded 3D optical waveguide with multilayred structure is analyzed theoretically.Effect of the dielectric thickness is saturaed with thickness because of exp decay of the field.
(6) Using the above structure, maximum bend angle is estimated based on geometrical optics. This result is confirmed by experiment.
(7) Rib-type multilayred 3D optical waveguide with asymmetrical structure is analyzed theoretically, where number of layrs at both side are controlled separately. Interesting results are obtaind.
(8) It is pointed out that parallel coupled optical waveguide using above structure can control the coupling strength widely. Propagation constant of the parallel coupled waveguides is calculated, which confirms the existence of strong coupling.
(9) In addition, it must be noted that field analysis of the strongly confined 3D optical waveguide discontinuity and thecorresponding experiment has beeen carried out in parallel with the research of the multilayred optical waveguide. Less

Report

(3 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • Research Products

    (23 results)

All Other

All Publications (23 results)

  • [Publications] T.Anada,Hsu,Jui-Pang: "Analysis of polarisation maintaining 3D waveguide in very thin multilayer films structure" 24th European Microwave Conference 94. B2.2. 567-572 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 大井,許: "多層超薄膜非対称構造3次元光導波路の理論解析" 電子情報通信学会信学技報. OPE94-125. 103-108 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 外丸,大井,穴田,許: "多層超薄膜3次元光導波路の導波モード特性-高次伝送モードのモード結合の検討-" 1994年電子情報通信学会秋季大会. C-226(発表). (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 関根,村上,穴田,許: "3次元光導波路不連続部の電磁界解析(第4報)" 1995年電子情報通信学会春季大会. C-206(発表). (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 大井,松本,許: "多層超薄膜非対称構造3次元光導波路を用いた平行結合線路の理論解析" 1995年電子情報通信学会春季大会. C-207(発表). (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 外丸,穴田,許: "多層超薄膜ストリップ装荷形3次元光導波路ベンドの導波特性" 1995年電子情報通信学会春季大会. C-306(発表). (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Anada, Hsu, Jui-Pang: "Analysis of polarisation maintaing 3D waveguide in very thin multilayr film structure" 24th European Microwave Conference 94. B2.2. 567-572

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] M.Ohi, Hsu, Jui-Pang: "Analysis of Three Dimensional Thin-films Optical Waveguide with Asymmetrical Structure" OPE94-125. 103-108 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Tomaru, M.Ohi, T.Anada, Hsu, Jui-Pang: "Guided mode properties of very thin multilayr films 3-D optical waveguide." THE 1994 IEICE FALL CONFERENCE. C-226. 227

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Sekine, T.Murakami, T.Anada, Hsu, Jui-Pang: "Field Analysis of 3-Dimensional Optical Waveguide Discontinuity (Fourth-Report)" THE 1995 IEICE GENERAL CONFERENCE. C-206. (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] M.Ohi, Y.Matsumoto, Hsu, Jui-Pang: "Analysis of Parallel Coupled Three Dimensional Optical Waveguide with Multilayred Thin-film Structure" THE 1995 IEICE GENERAL CONFERENCE. C-207. (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Tomaru, T.Anada, Hsu, Jui-Pang: "Propagation Properties of Strip Loaded Type 3D Optical Waveguide Bend using Multilayr Thin-film" THE 1995 IEICE GENERAL CONFERENCE. C-360. (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Anada,Hsu,Jui-Pang: "Analysis of polarisation maintaining 3D waveguide in very thin multilayer films structure" 24 th European Microwave Conference 94. B2.2. 567-572 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 大井,許: "多層超薄膜非対称構造3次元光導波路の理論解析" 電子情報通信学会信学技報. OPE94-125. 103-108 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 外丸,大井,穴田,許: "多層超薄膜3次元光導波路の導波モード特性-高次伝送モードのモード結合の検討-" 1994年電子情報通信学会秋季大会. C-226. (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 関根,村上,穴田,許: "3次元光導波路不連続部の電磁界解析(第4報)" 1995年電子情報通信学会春季大会. C-206(発表). (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 大井,松本,許: "多層超薄膜非対称構造3次元光導波路を用いた平行結合線路の理論解析" 1995年電子情報通信学会春季大会. C-207(発表). (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 外丸,穴田,許: "多層超薄膜ストリップ装荷形3次元光導波路ベンドの導波特性" 1995年電子情報通信学会春季大会. C-360(発表). (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 関根、藤田、穴田、許: "3次元光導波路不連続の電磁界解析(第2報)" 電子情報通信学会信学技報. OQE93-140. 31-36 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 藤田、関根、穴田、許: "C-31" 1993. 2-481.

    • Related Report
      1993 Annual Research Report
  • [Publications] 大井、外丸、穴田、許: "非対称ステップ形多層超薄膜3次元光導波路構造の伝搬定数の解析" 1994年電子情報通信学会春季大会. C-263(発表). (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] 大井、平家、穴田、許: "多層超薄膜スラブ光導波路の作製と伝搬定数の測定" 1993年電子情報通信学会秋季大会. C-140. 4-220 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 穴田、水野、許: "ストリップ装荷形多層超薄膜3次元光導波路の高次モードの伝搬特性" 1992年電子情報通信学会秋季大会. C-206. 4-228 (1992)

    • Related Report
      1993 Annual Research Report

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Published: 1993-04-01   Modified: 2016-04-21  

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