真空蒸着における不純物放出をおさえた蒸発源の試作

• Project/Area Number: 05914013
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: 物理
• Research Institution: Yamagata University
• Principal Investigator: 長沼 博 山形大学, 工学部, 技術系職員
• Project Period (FY): 1993
• Project Status: Completed (Fiscal Year 1993)
• Budget Amount: ¥210,000 (Direct Cost: ¥210,000); Fiscal Year 1993: ¥210,000 (Direct Cost: ¥210,000)