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Atomic and Electronic Design ob Ceramic/Metal Interfaces

Research Project

Project/Area Number 06044059
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research
Research InstitutionUniversity of Tokyo

Principal Investigator

SUGA Tadatomo (1996)  Research Center for Advanced Science and Technology, University of Tokyo, Professor, 先端科学技術研究センター, 教授 (40175401)

石田 洋一 (1994-1995)  東京大学, 大学院・工学系研究科, 教授 (60013108)

Co-Investigator(Kenkyū-buntansha) KOYAMA Masanori  Government Industrial Research Insitute, Osaka. Chef. Researcher, 大阪工業技術試験所・ガラスセラミックス材料部, 主任研究官
OHUCHI Fumio  University of Washington, Dept.of Materials Science and Engineering, Professor, 教授
ITOH Toshihiro  Research Center for Advanced Science and Technology, University of Tokyo, Lectur, 先端科学技術研究センター, 講師 (80262111)
須賀 唯知  東京大学, 先端科学技術研究センター, 教授 (40175401)
S Ohuchi Fum  Dept. of Materials Science and Engineerin, 教授
Project Period (FY) 1994 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 1996: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1995: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1994: ¥1,300,000 (Direct Cost: ¥1,300,000)
KeywordsSiC-Al interface / first-principle molecular dynamics method / electronic structure / adhesive energy / electron microscopy / deformation / ceramic-metal interfaces / sapphire-Al interface / 原子間力顕微鏡 / セラミックス / 界面 / 原子構造 / バンド計算 / カーボンナノチューブ
Research Abstract

Adhesive energies and atomic/electronic structure of metal to ceramic interfaces have been investigated by using the first principle molecular dynamics method based on the density-function theory. This investigation have been conducted through the tight collaboration between Prof.Ohuchi and Dr.Kohyama. The most important finding of the research was that in case of SiC (110) and SiC (100) and Al bonding, there is a strong attractive C-Al interactions with both ionic and covalent characters in the bonded interface, which are considered to play a favorable role in adhesion between SiC and Al. These theoretical results are confirmed by the bonding experiments conducted by Prof.Suga. By means of the surface activated bonding method, he has succeeded in bonding ceramic-metal system at room temperature. TEM study on the microstructure of the bonded interfaces, which has been continued since the last year, showed that a direct bonding of such ceramic-metal interface is formed actually only by contact between such clean surfaces. However, a closer observation of the bonded interface between Al2O3 and Al using the high resolution TEM showed that there is a strong distorted region of several nm thickness which possesses another structure which is different from both Al2O3 and Al. Formtion of such thin intermediate layr was interpreted as a result of strong deformation of the interfaces in contac that would lead to compensate the lattice mismatch. There results have been analyzed and complied for further development of interface engineering, and published in several international conferences. Also possibilities of these findings in application of the packaging technology in the near future has been discussed with fairly good expectations.

Report

(4 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • 1994 Annual Research Report
  • Research Products

    (54 results)

All Other

All Publications (54 results)

  • [Publications] M.Koyama: "Ab Initio Calculations for Sic-Al Interfaces." Materials SScience Forum. 207-209. 269-272 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Koyama: "Ab Initio Calculations for Sic-Al Interfaces by Conjugate-Gradient Techniques." MAS Symp.Proc.408. 49-54 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Koyama: "Ab Initio Calculations for Sic-Al Interfaces:Tests of Electronic-Minimization Techniques." Modelling Simul.Master.Sci.Eng.4. 397-408 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Hosoda,L.YANG,T.Suga: "Reversible Interconnection by control of interface structure" 日本MRS1996年度学術シンポジウム. 92 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] L.Yang,N.Hosoda,T.Suga: "TEM Inverstigation of the SUS/Al Interface Created by the Surface Activated Bonding Method." 日本MRS1996年度学術シンポジウム. 151 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suga: "Recent Progress of the Surface Activated Bonding" Intrnational Materials Conference Ceramic Microstructures '96 "Control at the Atomic Level". 57 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suga: "The Surface Activated Bonding for Materials Interconnection" 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". 2a1-6 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Hosoda,T.Suga: "Reversible Interconnection" 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". p-64 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] L.Yang,N.Hosoda,T.Suga: "Microstructure Evolution of Stainless-Steel/Aluminium Interface created by the Surface Activated Bonding Method." 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". 2p2-6 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.R.Chung,L.Yang,N.Hosoda,T.Suga: "Room Temperature Wafer Direct Bonding by The Surface Activated Bonding Method" 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". p-63 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Akatsu,I,Misumi,G.Sasaki,N.Hosoda,T.Suga: "Microstructure of Metal-Ceramic Interfaces Fabricated Using the Surface Activated Bonding Method" 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". p-62 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Takagi,R.Maeda,T.R.Chung,T.Suga: "Room Temperature Bonding of Silicon Wafers by The Surface Activation Method" 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". 2p2-3 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.C.Rechards,M.R.Richards and F.S.Ohuchi: "A New,Versatile Coating Technique:Leviation Chemical Vapor Deposition" Surface Coating Engieering. (In Press). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.W.Little and S.S.Ohuchi: ""X-ray photoeletron spectroscopy investigation of the interaction of NF3 with silicon" Materials Research Society Proceeding. (In Press). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.L.Bech,M.H.Lee,and F.S.Ohuchi: "Effect of ion bombardment on chemical interactions at SiC surface and Al/SiC interfaces" Materials Research Society Proceeding. In Press. (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.L.Bech,and F.S.Ohuchi: "Aluminum-Silicon Carbide Interfaces:Effects Of Ion Bombardment On Chemical Interactions" the 8th Japan Institute of Metals International Symposium. (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.L.Bech and F.S.Ohuchi: "Preferential Sputtering of SiC(001)by Ar+ Ion Beam" in preparation.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 葛巻 徹,林 卓哉,市野瀬 英喜,宮澤薫一,伊藤邦夫,石田洋一: "塑性変形したカーボンナノチューブの微細組織" 日本金属学会誌. 61・1. 1-5 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Koyama: "Ab Initio Calculations for Sic-Al Interfaces." Materials SScience Forum. 207-209. 269-272 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Koyama: "Ab Initio Calculations for Sic-Al Interfaces by Conjugate-Gradient Techniques." MAS Symp.Proc.408. 49-54 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Koyama: "Ab Initio Calculations for Sic-Al Interfaces : Tests of Electronic-Minimization Techniques." Modelling Simul.Master.Sci.Eng.4. 397-408 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] L.Yang, N.Hosoda, T.Suga: "TEM Inverstigation of the SUS/Al Interface Created by the Surface Activated Bonding Method." '96 MRS Symp.151 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suga: "Recent Progress of the Surface Activated Bonding" International Materials Conference Ceramic Microstructures '96 "Control at the Atomic Level". 57 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Hosoda, L.YANG,T.Suga: "Reversible Interconnection by control of interface structure" '96 MRS Symp. 92 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suga: "The Surface Activated Bonding for Materials Interconnection" 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". 2a1-6 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Hosoda, T.Suga: "Reversible Interconnection" 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". p-64 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] L.Yang, N.Hosoda, T.Suga: "Microstructure Evolution of Stainless-Steel/Aluminium Interface Created by the Surface Activated Bonding Method." 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". 2p2-6 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.R.Chung, L.Yang, N.Hosoda, T.Suga: "Room Temperature Wafer Direct Bonding by The Surface Activated Bonding Method" 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". p-63 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Akatsu, I.Misumi, G.Sasaki, N.Hosoda, T.Suga: "Microstructure of Metal-Ceramic Interfaces Fabricated Using the Surface Activated Bonding Method" 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". p-62 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Takagi, R.Maeda, T.R.Chung, T.Suga: "Room Temperature Bonding of Silicon Wafers by The Surface Activation Method" 8th Japan Institute of Materials International Symposium "Interface Science and Materials Interconnection". 2p2-3 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.C.Rechards, M.R.Richards and F.S.Ohuchi: "A New, Versatile Coating Technique : Levitation Chemical Vapor Deposition" Surface Coating Engineering. n Press. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.W.Little and F.S.Ohuchi: ""X-ray photoelectron spectroscopy investigation of the interaction of NF3 with silicon" Materials Research Society Proceeding. n Press. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.L.Bech, M.H.Lee, and F.S.Ohuchi: "Effect of ion bombardment on chemical interactions at SiC surface and Al/SiC interfaces" Materials Research Society Proceeding. n Press. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.L.Bech, and F.S.Ohuchi: "Aluminum-Silicon Carbide Interfaces : Effects Of Ion Bombardment On Chemical Interactions" the 8th Japan Institute of Metals International Symposium the 8th Japan Institute of Metlas International Symposium. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.L.Bech, and F.S.Ohuchi: "Preferential Sputtering of SiC (001) by Ar+Ion Beam" in preparation.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kuzumaki, T.Hayashi, H.Ichinose.K.Miyazawa, K.Ito, Y.Ishida: "Fine Structure of Plastically deformed Carbon Nanotube" J.Japan Inst.Metals. 60. 1-5 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Koyama: "Ab Initio Calculations for Sic-A1 Interfaces." Materials SScience Forum. 207-209. 269-272 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Koyama: "Ab Initio Calculations for Sic-A1 Interfaces by Conjugate-Gradient Techniques." MAS Symp.Proc.408. 49-54 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Koyama: "Ab Initio Calculations for Sic-A1 Interfaces : Tests of Electronic-Minimization Techniques." Modellin Simul.Master.Sci.Eng.4. 397-408 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Hosoda,L.YANG,T.Suga: "Reversible Interconnection by control of interface structure" 日本MRS1996年度学術シンポジウム. 92 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] L.Yang,N.Hosoda,T.Suga: "TEM Inverstigation of the SUS/A1 Interface Created by the Surface Activated Bonding Method." 日本MRS1996年度学術シンポジウム. 151 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Suga: "Recent Progress of the Surface Activated Bonding" International Materials Conference Ceramic Microstructures '96 ″Control at the Atomic Level″. 57 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Suga: "The Surface Activated Bonding for Materials Interconnection" 8th Japan Institute of Materials International Symposium ″Interface Science and Materials Interconnection″. 2a1-6 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Hosoda,T.Suga: "Reversible Interconnection" 8th Japan Institute of Materials International Symposium ″Interface Science and Materials Interconnection″. p-64 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] L.Yang,N.Hosoda,T.Suga: "Microstructure Evolution of Stainless-Steel/Aluminium Interface Created by the Surface Activated Bonding Method." 8th Japan Institute of Materials International Symposium ″Interface Science and Materials Interconnection″. 2p2-6 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.R.Chung.L.Yang,N.Hosoda,T.Suga: "Room Temperature Wafer Direct Bonding by The Surface Activated Bonding Method" 8th Japan Institute of Materials International Symposium ″Interface Science and Materials Interconnection″. p-63 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Akatsu,I,Misumi,G.Sasaki,N.Hosoda,T.Suga: "Microstructure of Metal-Ceramic Interfaces Fabricated Using the Surface Activated Bonding Method" 8th Japan Institute of Materials International Symposium ″Interface Science and Materials Interconnection″. p-62 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Takagi,R.Maeda,T.R.Chung,T.Suga: "Room Temperature Bonding of Silicon Wafers by The Surface Activation Method" 8th Japan Institute of Materials International Symposium ″Interface Science and Materials Interconnection″. 2p2-3 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] A.C.Rechards,M.R.Richards and F.S.Ohuchi: "A New,Versatile Coating Technique : Levitation Chemical Vapor Deposition" Surface Coating Engieering. (In Press). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.W.Little and S.S.Ohuchi: "″X-ray photoelectron spectroscopy investigation of the interaction of NF3 with silicon" Materials Research Society Proceeding. (In Press). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.L.Bech,M.H.Lee,and F.S.Ohuchi: "Effect of ion bombardment on chemical interactions at SiC surface and A1/SiC interfaces" Materials Research Society Proceeding. (In Press). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.L.Bech,and F.S.Ohuchi: "Aluminum-Silicon Carbide Interfaces : Effects Of Ion Bombardment On Chemical Interactions" the 8th Japan Institute of Metals International Symposium. (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.L.Bech and F.S.Ohuchi: "Preferential Sputtering of SiC (001) by Ar+Ion Beam" in preparation.

    • Related Report
      1996 Annual Research Report
  • [Publications] 葛巻徹,林卓哉,市野瀬英喜,宮澤薫一,伊藤邦夫,石田洋一: "塑性変形したカーボンナノチューブの微細組織" 日本金属学会誌. 60・1. 1-5 (1996)

    • Related Report
      1996 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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