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Fabrication of Nanometer Structure and Its Application

Research Project

Project/Area Number 06044139
Research Category

Grant-in-Aid for Overseas Scientific Survey.

Allocation TypeSingle-year Grants
SectionJoint Research
Research InstitutionOSAKA UNIVERSITY (1995)
Tokyo National Museum (1994)

Principal Investigator

TAKAI Mikio  Faculty of Engineering Science, Osaka University Associate Professor, 基礎工学部, 助教授 (90142306)

NISHIOKA Yasuhiro (1994)  Head Curator, Programming Dept., Tokyo National Museum, 学芸部, 企画課長 (40000351)

Co-Investigator(Kenkyū-buntansha) SEIDL Albert  Fachnochschule Magdeburg Professor, 電子工学科, 教授
LANG Walter  Fraunhofer Institut fuer Festkoerpertechnologie Researcher, 研究員
BOLLMANN Dieter  Fraunhofer Institut fuer Festkoerpertechnologie Researcher, 研究員
BUCHNER Reinhold  Fraunhofer Institut fuer Festkoerpertechnologie Researcher, 研究員
HEBERGER Karl  Fraunhofer Institut fuer Festkoerpertechnologie Director, 部長
RUGE Ingolf  Fraunhofer Institut fuer Festkoerpertechnologie Director, 所長
YANAGISAWA Junichi  Faculty of Engineering Science, Osaka University Assistant, 基礎工学部, 助手 (60239803)
YUBA Yoshihiko  Faculty of Engineering Science, Osaka University Assistant, 基礎工学部, 助手 (30144447)
FURUYA Takeshi  Assistant Curator, Dept.of Proto-Historic Age Section, Tokyo National Museum, 考古課原史室, 研究員 (40238697)
INOUE Youichi  Curator, Dept.of Japanese Archaeology, Tokyo National Museum, 考古課, 主任研究官 (60176451)
ANDO Kohichi  Head Curator, Dept.of Japanese Archaeology, Tokyo National Museum, 考古課, 課長 (60202785)
DAINOBU Yuji  Curator, Education and Public Relations Section, Tokyo National Museum, 企画課普及室, 室長 (80163715)
KOIZUMI Yoshihide  Assistant Curator, South and Southeast Asia Section, Dept.of Oriental Antiquitie, 東洋課インド・南東アジア室, 研究員 (40205315)
TANI Toyonobu  Curator, Chinese Archaeology Section, Dept.of Oriental Antiquities, Tokyo Nation, 東洋課, 主任研究官 (70171824)
MATSUMOTO Nobuyuki  Curator, Chinese Arts Section, Dept.of Oriental Antiquities, Tokyo National Muse, 東洋課中国美術室, 室長 (30229562)
SAOTOME Masahiro  Curator, Northeast Asia Section, Dept.of Oriental Antiquities, Tokyo National Mu, 東洋課北東アジア室, 室長 (80150035)
TAKAHAMA Shu  Curator, South and Southeast Asia Section, Dept.of Oriental Antiquities, Tokyo N, 東洋課インド・南東アジア室, 室長 (60000353)
GOTO Takeshi  Curator, Middle East Section, Dept.of Oriental Antiquities, Tokyo National Museu, 東洋課西アジア・エジプト室, 室長 (40132758)
鷲塚 泰光  東京国立博物館, 学芸部, 学芸部長 (80191740)
MOCHIZUKI Mikio  Curator, Historic Age Section, Dept.of Japanese Archaeology, Tokyo National Muse
HABARGER Kar  フラウンホーファー固体工学研究所, 部長
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥10,800,000 (Direct Cost: ¥10,800,000)
Fiscal Year 1995: ¥5,300,000 (Direct Cost: ¥5,300,000)
Fiscal Year 1994: ¥5,500,000 (Direct Cost: ¥5,500,000)
KeywordsLocalized electrytic reaction / Nanometer process / STM tip / Ion scattering / Porous Si emitter / Nano-structure / Beam process / Field evaporation / Pakistan / Hazara / Shinkiari / stupa / Buddhist monument
Research Abstract

Fabrication of nanometer structure and its application have been investigated by a joint research between Osaka University and Fraunhofer Institut fuer Feskoerpertechnologie under the International Scientific Research Program of the Ministry of Education, Science, Sport and Culture.
Localized electrolytic reaction by a scanning tunneling microscope (STM) tip, dipped in a solution, induced a localized metal deposition with a size of several hundred nanometers, while a metal-covered STM tip could realize a controlled deposition with a size of nanometer by field evaporation. Metal species could be controlled by a precise adjustment of applied pulsed-bias between the tip and a target sample, which would determine the electric field for field evaporation on the STM tip. This technique would facilitate to fabricate metal electrode structures of quantum electron devices such as single electron transistors. Nano-scale interdigital metal structures would also provide a new sensing application.
Medium energy ion scattering with and without focused ion beams has been applied to modified surface nano-structures in order to characterize the atomic positions of ad-atoms. The results were compared with those investigated by STM to exactly locate ad-atoms on crystalline surface.
A silicon (Si) nanometer structure by anodization, porous Si, has been applied to electron emitter tips of field emission arrays (FEAs). FEAs with nano-structure emission tips showed enhanced emission by an order of magnitude over FEAs with conventional single crystalline Si emitter tips. Further application of nano-structures fabricated by the technique developed in this study is in progress.

Report

(3 results)
  • 1995 Final Research Report Summary
  • 1994 Annual Research Report   Final Research Report Summary
  • Research Products

    (42 results)

All Other

All Publications (42 results)

  • [Publications] H.Andoh: "Nanoscale Deposition from a Metal-Covered Scanning Tunneling Microscope Tip" J.Appl.Phys.(in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] H.Andoh: "Nanofabrication with a Metal-Covered Scanning Tunneling Microscope Tip" Physica A. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N.Yokoi: "Surface Structure of (NH_4)_2S_x-treated GaAs (100) Studied in an Atomic Resolution" Appl.Phys.Lett.64. 2578-2580 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N.Yokoi: "Atomic Sites of S on (NH_4)_2S_x-Treated GaAs (100) Surface" Jpn.J.Appl.Phys.33. 7130-7134 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N,Yokoi: "Atomic Scale Characterization of (NH_4)_2S_x-Treated GaAs (100) Surface" Mat.Res.Soc.Symp.Proc.332. 489-494 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Enhanced Electron Emission from N-type Porous Si Field Emitter Arrays" Appl.Phys.Lett.66. 422-423 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Enhancement in Emission Current from Dry-Processed N-type Si Field Emitter Arrays after Tip Anodization" J.Vac.Sci.Techn.B13. 441-444 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Fabrication of N-Type Porous Si Field Emitter Arrays and Their Characteristics" Proc.of thr 2nd Asia Symp.Information Display (Technical Report of IEICE). EID94-58. 81-86 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Nuclear Microprobe Development and Application to Microelectronics" Nucl.Instr.and Methods. B85. 664-675 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Application of Focused Ion Beams to Nondestructive Analyses" Nucl.Instr.and Methods B. B96. 176-186 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] R.Mimura: "Development of a 200 kV FIB System for Nondestructive Three Dimensional Surface Analysis" Nucl.Instr.and Methods. B85. 756-759 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Mokuno: "Me V Heavy Ion Microprobe PIXE for the Analysis of the Materials Surface" Nucl.Instr.and Methods. B85. 741-743 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Application of Nuclear Microprobes to Semiconductor Process Developments" Nucl.Instr.and Methods B. B104. 501-507 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Kishimoto: "Three Dimensional Surface Analysis System Using a Compact Nuclear Microprobe System" Nucl.Instr.and Methods B. B104. 52-54 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] H.Andoh: "Nanoscale Deposition from a Metal-Covered Scanning Tunneling Microscope Tip" J.Appl. Phys.(in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] H.Andoh: "Nanofabrication with a Metal-Covered Scanning Tunneling Microscope Tip" Physica A. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N.Yokoi: "Surface Structure of (NH_4) _2Sx-treated GaAs (100) Studied in an Atomic Resolution" Appl. Phys. Lett.64. 2578-2580 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N.Yokoi: "Atomic Sites of S on (NH_4) _2Sx-Treated GaAs (100) Surface" Jpn. J.Appl. Phys.33. 7130-7134 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N.Yokoi: "Atomic Scale Characterization of (NH_4) _2Sx-Treated GaAs (100) Surface" Mat. Res. Soc. Symp. Proc.332. 489-494 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Enhanced Electron Emission from N-type Porous Si Field Emitter Arrays" Appl. Phys. Lett.66. 422-423 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Enhancement in Emission Current from Dry-Processed N-type Si Field Emitter Arrays after Tip Anodization" J.Vac. Sci. Technol.B13. 441-444 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Fabrication of N-type Porous Si Field Emitter Arrays and Their Characteristics" Proc. of the 2nd Asian Symp. Information Display (Technical Report of IEICE). EID94-58. 81-86 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Nuclear Microprobe Development and Application to Microelectronics" Nucl. Instr. and Methods. B85. 664-675 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Applications of Focused Ion Beams to Nondestructive Analyzes" Nucl. Instr. and Methods. B96. 179-186 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] R.Mimura: "Development of a 200kV FIB System for Nondestructive Three Dimensional Surface Analysis" Nucl. Instr. and Methods. B85. 756-759 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Mokuno: "Me V Heavy Ion Microprobe PIXE for the Analysis of the Materials Surface" Nucl. Instr. and Methods. B85. 741-743 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takai: "Applications of Nuclear Microprobes to Semiconductor Process Developments" Nucl. Instr. and Methods. B104. 501-507 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Kishimoto: "Three Dimensional Surface Analysis System Using a Compact Nuclear Microprobe System" Nucl. Instr. and Methods. B104. 52-54 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N.Yokoi: "Surface Structure of (NH_4)_2S_X-treated GaAs(100)Studied in an Atomic Resolution" Appl.Phys.Lett.64. 2578-2580 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] N.Yokoi: "Atomic Sites of S on(NH_4)_2S_X-Treated GaAs(100)Surface" Jpn.J.Appl.Phys.33. 7130-7134 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] N.Yokoi: "Atomic Scale Characterization of(NH_4)_2S_X-Treated GaAs(100)Surface" Mat.Res.Soc.Symp.Proc.332. 489-494 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Takai: "Enhanced Electron Emission from N-type Porous Si Field Emitter Arrays" Appl.Phys.Lett.66. 422-423 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Takai: "Enhancement in Emission Current from Dry-Processed N-type Si Field Emitter Arrays after Tip Anodization" J.Vac.Sci.Techn.(in press).

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Takai: "Fabrication of N-Type Porous Si Field Emitter Arrays and Their Characteristics" Proc.of the 2nd Asian Sypm.Information Display(Technical Report of IEICE). EID94-58. 81-86 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Takai: "Nuclear Microprobe Development and Application to Microelectronics" Nucl.Instr.and Methods. B85. 664-675 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Takai: "Applications of Focused Ion Beams to Nondestructive Analyses" Nucl.Instr.and Methods B(in press).

    • Related Report
      1994 Annual Research Report
  • [Publications] R.Mimura: "Development of a 200 kV FIB System for Nondestructive Three Dimensional Surface Analysis" Nucl.Instr.and Methods. B85. 756-759 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Y.Mokuno: "MeV Heavy Ion Microprobe PIXE for the Analysis of the Materials Surface" Nucl.Instr.and Methods. B85. 741-743 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Takai: "Laser Surface Processing of Thin Films for Micro Electronics Application" SPIE-The International Society for Optical Engineering(to be published).

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Takai: "Channeling Contrast Analysis of GaAs Side-Walls Fabricated by Laser Wet Chemical Etching" Nucl.Instr.and Methods. B85. 752-755 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] M.Takai: "Applications of Nuclear Microprobes to Semiconductor Process Developments" Nucl.Instr.and Methods B. (to be published).

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Kishimoto: "Three Dimensional Surface Analysis System Using a Compact Nuclear Microprobe System" Nucl.Instr.and Methods B. (to be published).

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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