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量子半導体プロセス技術

Research Project

Project/Area Number 06238106
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Research InstitutionOsaka University

Principal Investigator

中島 尚男  大阪大学, 産業科学研究所, 教授 (20198071)

Co-Investigator(Kenkyū-buntansha) 浅田 雅洋  東京工業大学, 工学部, 助教授 (30167887)
福井 孝志  北海道大学, 量子界面エレクトロニクス研究センタ, 教授 (30240641)
冷水 佐壽  大阪大学, 基礎工学部, 教授 (50201728)
長田 俊人  東京大学, 先端科学技術研究センター, 助教授 (00192526)
小間 篤  東京大学, 大学院・理学系研究科, 教授 (00010950)
白木 靖寛  東京大学, 先端科学技術研究センター, 教授 (00206286)
Project Period (FY) 1994 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥176,200,000 (Direct Cost: ¥176,200,000)
Fiscal Year 1996: ¥26,600,000 (Direct Cost: ¥26,600,000)
Fiscal Year 1995: ¥73,800,000 (Direct Cost: ¥73,800,000)
Fiscal Year 1994: ¥75,800,000 (Direct Cost: ¥75,800,000)
KeywordsMBE / MOCVD / ファンデァワールス成長 / 量子細線 / 量子ドット / ルミネセンス / C_<60> / 電子波干渉素子 / TEM / 層状物質 / ワイス振動
Research Abstract

平成8年度の研究実績をまとめると以下の通りである。
(1)巨大ステップをもつ微傾斜GaAs(100)面上に2段階MBE成長により、積層型GaAs量子細線を形成し、断面TEMによりその構造を確認した。また、フォトルミネセンスにより量子細線間の結合があることが判明した。さらにこの巨大ステップ構造上にInAsを成長するとステップ端に量子細線およびドットが形成されることを明らかにした。
(2)ファンデルワールス・エピタキシャル成長によりMoS_2上にGaSe膜をマスクとしてC_<60>を選択的に成長することに成功した。AFMによるGaSeマスクの微細加工にも成功した。
(3)顕微分光法により自己形成AlInAs量子ドットを評価し、単一量子ドットからの発光線幅の明瞭な温度依存性を見出し、新しい知見を得た。これは音響フォノンに依る散乱と思われる。
(4)斜入射MBE法により斜めT字形量子細線を形成したカソードルミネセンスで評価した。この量子細線からの発光線幅は10meVと狭いことが判明した。また、(775)B面上に超高密度の自然形成型GaA_S/AlAs量子細線を形成し、断面TEM、フォトルミネセンスで確認した。
(5)微傾斜基板上にMOCVD法で自己組織的に形成される多段原子ステップにより新しい電子波干渉素子の作製を試みた。電気的特性にはコンダクタンスの振動があり、コヒーレントな電子波干渉とランダムな電子波干渉が見出された。
(6)平面構造の電界制御型量子効果デバイスで、極短チャンネルでも動作可能な基本構造のCoSi_2/Si/CdF_2ヘテロ構造の結晶成長条件を明らかにした。

Report

(3 results)
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • 1994 Annual Research Report
  • Research Products

    (50 results)

All Other

All Publications (50 results)

  • [Publications] H.Nakashima: "Photo-and Cathodoluminescence of AlGaAs Single Quantum Wires on Vicinal GaAs(110)Surfaces" Solid State Electron. 40. 319-322 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Nakashima: "Size-dependent luminescence of GaAs quantum wires on vicinal GaAs(110)surfaces with giant steps formed by MBE" Physica B. 227. 291-294 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Takeuchi: "Uniform GaAs quantum wires formed on vicinal GaAs(110)surfaces by two-step MBE growth" Superlattices and Microstructures. 22・1(発表予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Yamada: "Preparation of GaS thin Films by Molecular Beam Epitaxy" Jpn.J.Appl.Phys.35. 568-570 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Fujikawa: "High-Resolution Electron Energy Loss Spectroscopy on C_<60> and C_<70> Ultrathin Films" Surf.Sci.357/358. 176-179 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Nishikawa: "Epitaxial Growth of TiSe_2 Thin Films on Se-Terminated GaAs(111)B" J.Vac.Sci.Technol.A. 14. 2893-2896 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] J.Mptohisa: "Theoretical and Experimental Investigation of an Elctron Interference Devive Using Multiatomic Step on Vicinal GaAs Surfaces" Physica B. 227. 295-298 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Akabori: "A Novel Electron Wave Interference Devices using Multiatomic Steps on Vicinal GaAs Surfaces Grown by MOVPE" Jpn.J.Appl.Phys.(発表予定).

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Asada: "A Possible Three-Terminal Amplifier Devices in the Terahertz Frequency Range Using Photon-Assisted Tunneling" Jpn.J.Appl.Phys.35. L685-L687 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] W.Saitoh: "Proposal and Analysis of Very Short Channel Field Effect Transistor Using Vertical Tunneling with New Heterostractures on Silicon" Jpn.J.Appl.Phys.35. L1104-L1106 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Suemasu: "Transfer Efficiency of Hot Electron in a Metal(CoSi_2)/Insulator(CaF_2)Quantum Interference Transistor" Surf.Sci.361/362. 209-212 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Mori: "Room-Temperature Observation of Multiple Negative Differential Resistance in a Metal(CoSi_2)/Insulator(CaF_2)Quantum Interference Transistor Structure" Physica B. 227. 213-215 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Sunamura: "Observation of lateral confinement effect in Ge quantum wires self-aligned at step edges on Si(100)" Appl.Phys.Lett.68. 1847-1849 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Usami: "Role of heterointerface on enhancement of no-phonon luminescence in-Si-based neighboring confinement structure" Appl.Phys.Lett.68. 2340-2342 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Usami: "Excition diffusion dynamics in quantum nonstructures on V-groove patterned substrates" Superlattices and Microstructures. (発表予定).

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Higashiwaki: "High-Density GaAs/AlGaAs quantum wires grown on(775)B-oriented GaAs substrates by molecular beam epitaxy" Jpn.J.Appl.Phys.35. L606-L608 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Higashiwaki: "High-density GaAs/(GaAs)_2(AlAs)_2 quantum wires naturally formed on(775)B-oriented GaAs substrates by molecular beam epitaxy" J.Crystal Growth. (発表予定).

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Tomita: "Improved optical qualities of GaAs/AlGaAs tilted T-shaped quantum wires fabricated by glancing angle molecular beam epitaxy" J.Crystal Growth. (発表予定).

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Inoue: "Compositional Modulation in Quantum Wire Structures on Vicinal(110)GaAs Studied by Photoluminescence" Jpn. J. Appl. Phys. 34. 1342-1344 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M.Takeuchi: "Formation and Charactrization of GaAs Quantum Wires at Giant Step Edges on Vicinal (110)GaAs Surfaces" Jpn. J. Appl. Phys. 34. 4411-4413 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Nakashima: "Formation of AlGaAs quantum Wires on Vicinal GaAs(110)surfaces misoriented 3° toward(111)A by molecular beam epitaxy" Mat. Sci Eng.B35. 295-298 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Ueno: "Van der Waals Epitaxy on Hydrogen teeminates Si(111)Surfaces and Inrestigations of Its Growth Mechanism by Atomic Force Microscope" J. Crystal Growth. 150. 1180-1185 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] A.Koma: "Molecular Beam Epitaxial Grawth of Organic Thin Films" Prog. Crystal Growth and Charact. 30. 129-152 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Abe: "Scanning Tanneling Microscope Observation of the Metal-Adsorbed Layer Semicondacter Surfaces" Jpn. J. Appl. Phys.34. 3342-3345 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Sunamura: "Island formation during growth of Ge on Si(100): A study using photoluminescence spectroscopy" Applied Physics Letter. 66. 3024-3026 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] N.Asami: "Dynamics of exciton diffusim in SiGe quantum wells on a V-groone patterned Si substrate" Physical Review. B52. 5132-5135 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] N.Usami: "Enhancement of radiative secombination in Si-based quantum wells with neighoboring confinement structure" Applied Physics Letter. 67. 524-526 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y.Liu: "In_<1-x>Ga_xAs/GaAs quantum wire structures grown on GaAs(100)patterned substrates" J. Cryst. Growth. 150. 299-305 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] D.Marx: "Metalorganic molecular beam epitaxy of GaSb on Patterned GaSb substrates using triethylgallium and Sb_4" J. Cryst. Growth. 150. 874-878 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] N.Tomita: "Selective area griwth of GaAs using a Ga beam with a step functional lateral profile intensity" J. Cryst. Growth. 150. 377-382 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] R.Notzel: "Seft-organization of straind GaInAs microstructures on Inp(311)substrates grown by melaloranic vapor epitaxy" Appl. Phys. Lett.66. 2525-2527 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Kumakura: "Novel formation method of quantum dot structure by self-limited selective area metalorganic vapor phase epitaxy" Jpn. J. Appl. Phys.34. 4387-4389 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Hara: "Quantum well aire fabrication method using self-organized multiatomic steos on GaAs(100)vicinal sufgaces by MOVPE" Jpn. J. Appl. Phys.34. 4401-4404 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] W.Satoh: "Mulitiple Negative diffrential resistance Quantum Onterference of Hot Electron Waves in Metal(CoSi_2)/Insulator(CaF_2)Heterostructures and Influence of Parasitic Elements" Jpn. J. Appl. Phys.34. 4481-4484 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M.Watanabe: "Formation of Silicon and Cobalt Silicide Nanoparticles in CaF_2" Jpn. J. Appl. Phys.34. 4380-4383 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] W.Saitoh: "Metal(CoSi2)/Insulator(CaF2)Hot Electron Transistor Fabricated by Electron-Beam Lithography on a Si Substrate" Jpn. J. Appl. Phys.34. L1254-L1256 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 中島尚男: "AlGaAs量子細線構造の作製と評価" 学術月報. 47. 928-933 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 井上恒一: "Compositional Modulation in Quantum Wire Structures on Vicinal(110)GaAs Studied by Photoluminescence" Jpn.J.Appl.Phys.(発表予定).

    • Related Report
      1994 Annual Research Report
  • [Publications] 武内道一: "Structural Analysis of AlGaAs Quantum Wires on Vicinal (110)GaAs by Transmission Electron Microscopy and Energy Dispersive X-ray Spectroscopy." J.of Crystal Growth. (発表予定).

    • Related Report
      1994 Annual Research Report
  • [Publications] 山本秀樹: "Improved Heteroepitaxial Growth of Layerd NbSe_2 on GaAs(111)B" J.Vac.Sci.Technol.A12. 125-129 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 上野啓司: "Van der Waals Epitaxy on Hydrogen teeminates Si(111)Surfaces and Inrestigations of Its Growth Mechanism by Atomic Force Microscope" J.Crystal Growth. (発表予定).

    • Related Report
      1994 Annual Research Report
  • [Publications] 劉翊: "Highly uniform GaAs/AlAs quantum wire grown on [001]ridges of GaAs(100)patterned substrates by molecular beam epitaxy" Jpn.J.Appl.Phys.33. 7199- (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 田中充浩: "TEM observation of GaAs/Al_<0.3>Ga_<0.7>As T-shaped quantum well structure fabricated by glancing angle MBE on GaAs(100)reverse-mesa etched substrates" J.Cryst.Growth. (発表予定).

    • Related Report
      1994 Annual Research Report
  • [Publications] 劉翊: "In_xGa_<1-x>As/GaAs quantum wire structures grown on GaAs(100)patterned substrates with [001]ridges" J.Cryst.Growth. (発表予定).

    • Related Report
      1994 Annual Research Report
  • [Publications] 熊倉一英: "Dynamics of Selective MOVPE Growth for GaAs/AlGaAs Micro-Pyramids" J.Cryst.Growth. (発表予定).

    • Related Report
      1994 Annual Research Report
  • [Publications] 原真二郎: "Formation and Photoluminescence Characterization of Quantum Well Wires using Multiatomic Steps Grown by MOVPE" J.Cryst.Growth. (発表予定).

    • Related Report
      1994 Annual Research Report
  • [Publications] 本久順一: "Fabrication of GaAs/AlGaAs Quantum Dots by MOVPE on Patterned GaAs Substrates" Jpn.J.Appl.Phys.34. 1098-1101 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 末益崇: "Interference of Electron Wave in Metal(CoSi_2)/Insulator(CaF_2)Resonant Hot Electron Transistor Structure" Jpn.J.Appl.Phys.33. L1762-L1765 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 末益崇: "Different Characteristics of Metal(CoSi_2)/Insulator(CaF_2)Resonant Tunneling Transistors Depending on Base Quantum Well Layer" IEICE Trans.Electron.E77-C. 1450-1454 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 浅田雅洋: "Epitaxial Growth of Metal(CoSi_2)/Insulator(CaF_2)Nanometer-Thick Heterostructure and Its Application to Quantum-Effect Devices" J.Vac.Sci.Tech.A. (発表予定).

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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