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ELECTRON AND ION SWARM PROCESS AND ITS APPLICATION INCLUDING INELASTIC EFFECT.

Research Project

Project/Area Number 06302033
Research Category

Grant-in-Aid for Co-operative Research (A)

Allocation TypeSingle-year Grants
Research Field Applied physics, general
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

TAKEBE Masahiro  TOHOKU UNIVERSITY,FACULTY OF ENGINEERING,PROFESSOR., 工学部, 教授 (30005392)

Co-Investigator(Kenkyū-buntansha) SHIMAMORI Hiroshi  FUKUI INSTITUTE OF TECHNOLOGY,FACULTY OF ENGINEERING,PROFESSOR., 工学部, 教授 (80139815)
MAKABE Toshiaki  KEIO UNIVERSITY,FACULTY OF SCIENCE AND ENGINEERING,PROFESSOR., 理工学部, 教授 (60095651)
HATANO Yoshihiko  TOKYO INSTITUTE OF TECHNOLOGY,FACULTY OF SCIENCE,PROFESSOR., 理学部, 教授 (90016121)
FUJIMOTO Takashi  KYOTO UNIVERSITY,FACULTY OF ENGINEERING,PROFESSOR., 工学部, 教授 (90026203)
SATO Nobuyasu  IWATE UNIVERSITY,FACULTY OF EDUCATION,PROFESSOR., 教育学部, 教授 (20001290)
橘 邦英  京都工芸繊維大学, 工芸学部, 教授 (40027925)
土手 敏彦  福井工業大学, 工学部, 教授 (20087422)
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥11,600,000 (Direct Cost: ¥11,600,000)
Fiscal Year 1995: ¥4,600,000 (Direct Cost: ¥4,600,000)
Fiscal Year 1994: ¥7,000,000 (Direct Cost: ¥7,000,000)
KeywordsElectron swarm / Ion swarm / Inelastic effect / 荷電粒子輸送方程式 / Boltzmann方程式 / 衝突脱励起 / イオン・電子再結合 / 超励起状態 / 電子付着 / 電荷移行断面積
Research Abstract

The present co-operative research deals with the inelastic effect on electron-and ion-swarm phenomena, which is one of the most interesting research subjects in recent gas-phase electron-and ion-chemistry as well as many other applied fields. Inelastic proces occurred in the collisions between an electron (or an ion) and a polyatomic molecule will change their translational energies, because the translational energy will partly be absorbed into the internal energy of polyatomic molecule and will make it an internally excited state. Therefore, many swarm parameters which are functions of the translational energy will seriously be affected by the inelastic energy loss process.
In order to carry out the present research program more effectively, we haved devided the investigators into three sub-groups.
The researchers in the first group have developed electron and ion swarm theory including inelastic process. Based upon Boltzmann analysis, they have elucidated the relation between the solutions of Boltzmann equation and the transport equation including inelastic cross sections.
The second group have carried out the experiments on electron and ion swarm to derive directly the information on the inelastic process from the measurement data. Using two drift tubes and a micro-wave apparatus, the members have measured the coefficients of electron attachment, electron/ion recombination, ion mobility, and electron mobility in polyatomic gases.
The third group have mainly investigated the applied techniques of electron and ion swarms, related especially to the inelastic effect on photo ionization and weakly ionized plasmas. They have measured the number density of excited neutral molecules in plasma and the relaxation time of electron energy distribution. Also, as two newly developed fields, the separation of isotopes in plasma using laser beam technique and Coulomb lattice in weakly ionized plasma have intensively been investigated.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (39 results)

All Other

All Publications (39 results)

  • [Publications] 武部雅汎: "希ガスおよび大気成分中のアルカリイオンの移動度とクラスター反応" 質量分析学会誌. 43. 225-238 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 真壁利明: "低温プロセスプラズマモデリングの現状と課題" 応用物理. 64. 547-553 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] A. Hishikawa: "Monte Carlo study of population and alignment relaxation by trapped line radiation" Phupical Review. A52. 189-196 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M. Ukai: "State-to-state behawcon in the neutral dissociation of O_2 for beyond the ionijation〜" Phupical Review Letters. 74. 239-242 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] R.E.Robson: "Frequency variation of the mean energy of rf electron swarm" Aust. J. Phys. 48. 335-346 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N. Ikuta: "Theory of FTI method for the analysis of electron and in transport propertus" J. Phup. Soc. Jpn.64. 1148-1163 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Takebe, Y.Satoh, and K.Iinuma: "Mobilities and clustering reactions of alkali ions in rare gases and atmospheric molecules. (in Japanese)" J.Mass Spectrom. Soc. Jpn.43. 225-238 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Makabe: "Recent progress and issues in low temperature plasma modeling for material processings. (in Japanese)" Japanese Journal of Applied Physics. 64. 547-553 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] A.Hishikawa and T.Fujimoto: "Monte Carlo study of population and alignment relaxation by trapped line radiation." Phys. Rev.A 52. 189-196 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Ukai, S.Machida, K.Kameta, M.Kitajima, N.Kouchi, Y.Hatano, and Ito: "State-to-state behavior in the neutral dissociation of 02 far beyond the ionization threshold." Phys. Rev. Lett.74. 239-242 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] R.E.Robson, K.Maeda, T.Makabe, and R.D.White: "Frequency variation of the mean energy of rf electron swarm." Aust. J.Phys.48. 335-346 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N.Ikuta and S.Nakajima: "Theory of FTI method for the analysis of electron and ion transport properties." J.Phys. Soc. Jpn.64. 1148-1163 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Iinuma: "Design and performance of new drift-velocity filter for ion swarm experiments." Int.J.Mass Spectrom.Ion Processes. 142. 151-162 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 佐藤信安: "RFプラズマ中、非平衡電子輸送のモデリング" 電気学会放電研究会資料ED-95-282. 282-289 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Dote: "The transition from free to ambipolar diffusion including inertia terms in charged particle trunsport." Progress Rep.Atom.Colli.Research in Jpn.21. 109-110 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] A.Hishikawa: "Monte Carlo study of population and alignment relaxation by trapped line radiation." Physical Revieu. A52. 189-196 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M.Ukai: "State-to-state behavior in the neutral dissociation of O_2 for beyond the ionization threshold." Physical Revieu Letters. 74. 239-242 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] R.E.Robson: "Frequency variation of the mean energy of rf electron swarm." Aust.J.Phys.48. 335-346 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Sawada: "Effectire ionization and dissguation rate coefficients of molecular hydrogen in plasma." J.Appl.Phys.78. 2913-2924 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Ito: "Monochrometer at beamline 20A of the Photon Factory." Rev.Sci.lnstrun.66. 2119-2121 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Odagiri: "Electron energy-loss study of superexeited hydrogen nolecules with the coincidence detection of 〜" J.Phys.B:At.Mol.Opt.Phys.28. 465-470 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] N.Nakano: "lnfluence of driving frequency on narrow-gap reactive-ion etching in SF_6" J.Phys.D. 28. 31-39 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M.Shibata: "O_2 rfdischarge structure is parallel plates reactor at 13.56MHz" J.Appl.Phys.77. 6181-6187 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Sunagawa: "Low-energn electron attachment to brominated ethanes and ethylenes." Int.J.Mass Spectrom Ion Processes. 149/150. 123-129 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Sakurai: "Dissociation processes of SiCl_4 and plasma parameters measured by trannint spectroscopy 〜" Aust.J.Phys.48. 515-526 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] N.Ikuta: "Theory of FTI method for the analysis of electron and ion transport properties." J.Phys.Soc.Jpn.64. 1148-1163 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Kondo: "Relaxation process of the velocity distribution and transport coefficients of electron swarms in krypton." J.Phys.D:Appl.Phys.27. 1894-1905 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Shimamori: "Low-energy electron attachment to C_6H_5X (X=Cl,Br,and I)" Chemical Physics Letters. 232. 115-120 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 真壁利明: "低温プロセスプラズマモデリングの現状と課題" 応用物理. 64. 547-553 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 武部雅汎: "希ガスおよび大気成分中のアルカリイオンの移動度とクラスター反応" 質量分析学会誌. 43. 225-238 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Dote: "Availability of constant ratio opprotimation thesry of tramsition from free to ambi polar diffusion" J.Phys.Soc.Jpn. 63. 299-3002 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Suzuki: "Contact ionizotion ion source for cyclotron rosonence separation" Jpn.J.Appl.Phys.33. 4247-4250 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] K.Isoda: "The effect of an external eloctric field on diffusion-entrolhd bulk ion-recombination" J.Chem.Phys.100. 5874-5881 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] N.Ikuta: "Volidity of pseudo-isotropic analysis of elatron trausport using momentum tranpter aross sections" J.Phys.Soc.Jpn. 63. 536-545 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] K.Kondo: "Relotation process of the velocity distribution and trausport tsefficients of electron swarms in krypton" Journal of Physics D:Applied Physics. 27. 1894-1905 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Shimamori: "Low-energy electron attachment to C_6F_5X(X=F.Cl,Br and I)" Chem.Phys.Lett.227. 609-616 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] K.Tachibana: "Diffusion and quenching of metastable Xeatoms in mixtures of Xe and rare gases" Jpn.J.Appl.Phys.33. 6716-6717 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] H.Sugawara: "Properties of electron swarms in goses in the upstream rezion of an electron source" J.Phys.D:Appl.Phys.28. 61-67 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] K.Iinuma: "Analysis of Iwo ion surarms in dynamic ezailibrium:Simultaneous determinetion of two drift veloeities and tworeaction fregueucies" J.Chem.Phys.101. 2949-2952 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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