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Microtribological Properties of Singlecrystal Silicon and Silicondioxide Layr

Research Project

Project/Area Number 06452165
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 設計工学・機械要素・トライボロジー
Research InstitutionThe University of Tokyo

Principal Investigator

KATO Takahisa  The University of Tokyo, Eng., Associate Prof., 大学院・工学系研究科, 助教授 (60152716)

Co-Investigator(Kenkyū-buntansha) FUKUDA Katsumi  The University of Tokyo, Eng., Assistant, 大学院・工学系研究科, 助手 (20134471)
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥7,400,000 (Direct Cost: ¥7,400,000)
Fiscal Year 1995: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 1994: ¥5,700,000 (Direct Cost: ¥5,700,000)
KeywordsSinglecrystal Silicon / Microtribology / Ultramicro Hardness / Dynamic Ultramicro Hardness of High Temperature / Silicondioxide / スクラッチ試験 / 微小硬さ
Research Abstract

With the developement of micro fabrication, singlecrystal silicon has been used in many microelements such as micromachines. The aim of this research is to clarify the microtribological properties of synglecrystal siliconand to improve their characteristics by siliocondioxide over coat. First of all micro hardness of the surfce of singlecrystal silicon is measured by using a dynamic hardness tester. The relation between the indentation load and indentation depth is measured under the usual environment and under ultra high temperature. The specimen used in this experiment is singlecrystal silicon of (1,1,1) and with a ovre coat of silicondioxide. Thickness of silicondioxide is 988 nm wich is coated by plazma CVD method. Temperature is varied from room temperature to 800 deg. It is found that (1) dynamic hardness is small when the surface is coated by silicondioxide, (2) dynamic hardness is small when the indentation is small and (3) dynamic hardness becomes maximum at 300-400 deg (C).

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] 福田勝己: "単結晶シリコンの微小硬さ" 日本機械学会第72期全国大会講演会講演論文集. 940-30. 424-426 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 福田勝己: "単結晶シリコンの摩擦特性(摩擦速度の影響)" 日本トライボロジー学会トライボロジー会議予稿集. 801-804 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 加藤孝久: "AFM,SEMの微小硬さ試験への応用" トライボロジスト. 40. 211-216 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 福田勝己: "単結晶シリコンの動的微小硬さ" 日本機械学会第72期通常総会講演会講演論文集. 95-1. 113-114 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 福田勝己: "単結晶シリコンの摩擦特性(結晶方向の影響)" 日本トライボロジー学会トライボロジー会議予稿集. 353-356 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 福田勝己: "単結晶シリコンの高温動的微小硬さ" 日本機械学会第73期全国大会講演会講演論文集. 95-10. 154-155 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Fukuda, at al: "Nanoscopic Hardness of Silicon Monocrystal" Prepr.JSME. 940(30). 424-426 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Fukuda, at al: "Friction Characteristics of Single Crystal Silicon(part4)" Proc.JAST Conf.Kanazawa. 801-804 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Kato, at al: "Microhardness Testing Using AFM and SEM" J.Jpn.Soc.Tribologists. 40(3). 211-216 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Fukuda, at al: "Dynamic Nanoscopic Hardness of Silicon Monocrystal" Prepr.JSME. 95(1). 113-114 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Fukuda, at al: "Friction Characteristics of Single Crystal Silicon(Part5)" Proc.JAST Conf.Tokyo. 353-356 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Fukuda, at al: "Dynamic Nanoscopic Hardness of Silicon Monocrystal at High Temperature" Prepr.JSME. 95(10). 154-155 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 加藤孝久,福田勝己: "AFM,SEMの微小硬さ試験への応用" トライボロジスト. 40. 211-216 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 福田勝己,上原良浩、加藤孝久: "単結晶シリコンの動的微小硬さ" 日本機械学会第72期通常総会講演会講演論文集. 95-1. 113-114 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 福田勝己,上原良浩、加藤孝久: "単結晶シリコンの摩擦特性(結晶方向の影響)" 日本トライボロジー学会トライボロジー会議予稿集. 353-356 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 福田勝己,上原良浩、加藤孝久: "単結晶シリコンの高温動的微小硬さ" 日本機械学会第73期全国大会講演会講演論文集. 95-10. 154-155 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 福田勝己、上原良浩、加藤孝久: "単結晶シリコンの微小硬さ" 日本機械学会第72期全国大会講演論文集. 940-30. 424-426 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 福田勝己、上原良浩、加藤孝久: "単結晶シリコンの摩擦特性(摩擦速度の影響)" 日本トライボロジー学会トライボロジー会議予稿集. 801-804 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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