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Study on Measurement and Control of Dynamic Behavior of Subnano-mechanism

Research Project

Project/Area Number 06452168
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 設計工学・機械要素・トライボロジー
Research InstitutionTokyo Institute of Technology

Principal Investigator

SHIMOKOHBE Akira  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Professor, 精密工学研究所, 教授 (40016796)

Co-Investigator(Kenkyū-buntansha) SATO Kaiji  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Research A, 精密工学研究所, 助手 (00215766)
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥7,400,000 (Direct Cost: ¥7,400,000)
Fiscal Year 1995: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 1994: ¥5,900,000 (Direct Cost: ¥5,900,000)
KeywordsPositioning / PID control / Fuzzy control / neural network control / Optimal control / Coarse and fine positioning mechanism / Ball screw / Piezoelectric actuator / ファジイ制御 / フィルタリング / 位置決め分解能 / 位置決め分解能の評価 / 転がり案内 / 電磁モータ / ばね特性 / ヒステリシス特性
Research Abstract

The aim of this research project was to develop the coarse and fine mechanism system with a long working range on the order of 10 millimeters and high positioning resolution for realize more than sub-nanometers for realize sub-nanometer machining and measuring on the order of 10 millimeters. In the project, first, the experimental sub-nanomechanism which consists of the coarse and the fine mechaisms was made and modeled for the aim and then the best fit control methods for the mechanism were discussed. PID,Fuzzy, Neural network and Linear quadratic control method were selected for the discussion of the best fit one. In order to evaluate these control method, the specification of basic control design was determined and the robustness of the positioning systems with their controller were examined theoretically and experimentally. The results were the following ;
(1) The controller based on PID algorithm for the sub-nanometer mechanism was satisfied the specification of the control design and had the good robustness to the change of the step height.
(2) The controller based on Fuzzy algorithm for the mechanism was satisfied the specification and the good robustness to the change of the weight of the movable table and the addition of the constant load.
(3) In case of the controller based on Neural network algorithm, the number and the kind of the weight of the neuron changed by the back propagation algorithm influenced on the performance of the system. In the experiments, the limit of the number of the weight changed is necessary for high precision positioning.
(4) Though the linear quadratic controller designed for the fine positioning mechanism can control the table precisely, the controller for the coarse and fine positioning mechanism causes the vibration of its table near the reference position.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (8 results)

All Other

All Publications (8 results)

  • [Publications] 下河辺明,佐藤海二ほか: "粗微動位置決め機構の制御に関する研究-各種制御法による特性比較-" 1996年度精密工学会春季学術講演会講演論文集. (発表予定). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 下河辺明,佐藤海二ほか: "最適制御による粗微動位置決め機構の高精度制御" 日本機械学会第73期通常総会講演会講演論文集. (発表予定). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Akira SHIMOKOHBE,Kaiji SATO,et al.: ""Control of Coarse and Fine Mechanism-Positioning Characteristics Comparison between PID and Fuzzy Control"" Prepr.of JSPE. (to be published). (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Akira SHIMOKOHBE,Kaiji SATO,et al.: ""High Precision Positioning of the Coarse and Fine Positioning Mechanism with Linear Quadratic Control Method"" Prepr.of JSME. (to be published). (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 下河辺明,佐藤海二ほか: "粗微動位置決め機構の制御に関する研究-各種制御法による特性比較-" 1996年度精密工学会春季学術講演会講演論文集. (発表予定). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 下河辺明,佐藤海二ほか: "最適制御による粗微動位置決め機構の高精度制御" 日本機械学会第73期通常総会講演会講演論文集. (発表予定). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 下河辺 明: "精密位置決め制御とセンサ" 1994年度精密工学会秋季大会シンポジウム資料. 31-36 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 藤崎 正雄: "スチールベルト駆動位置決め機構の動特性と制御(第2報,微小変位特性)" 日本機械学会第72期通常総会講演会講演論文集. (発表予定). (1995)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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