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Formation of IV-Element Nano-Clusters by Laser Ablation and Time-resolved Spectroscopy Measurements of Its Dynamics

Research Project

Project/Area Number 06452212
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionUniversity of Tsukuba

Principal Investigator

MURAKAMI Kouich  Institute of Materials Sicence Professor, 物質工学系, 教授 (10116113)

Co-Investigator(Kenkyū-buntansha) YODA Osamu  Takasaki Research Establishment, JAERI Group Subleader, 高崎研究所, グループサブリーダー
Project Period (FY) 1994 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥7,400,000 (Direct Cost: ¥7,400,000)
Fiscal Year 1996: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1995: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1994: ¥4,400,000 (Direct Cost: ¥4,400,000)
KeywordsLaser Ablation of Si, C and SiC / Dynamics / Time-resolved Laser Plasma Soft X-ray Absorption Spectroscopy / Time-resolved Photon-emission Measurements / Si Nanoclusters / Visible Photoluminescence / 可視発光 / 動的機構 / 動的形成機構 / Siクラスター / Si超微粒子 / レーザープラズマ軟X線吸収分光 / 時間分解発光測定 / 二次元発光分布測定 / 時間分解測定
Research Abstract

We have studied dynamical mechanism of laser ablation of silicon and graphite using combined time- and spatially-resolved measurements of laser plasma soft X-ray absorption spectroscopy and visible light emission imaging/spectroscopy. The obtained results indicate that there are no significant formation of silicon clustres and no growth of silicon nanoclusters till 15 mus after laser ablation. It is also found from measurements of Si nanoclusters embedded in SiO_2 layr that silicon nanoclusters have X-ray absorption lines at around 102.5 to 104 eV.We have fabricated nanocluster-based silicon films by laser ablation in ambient gases and investigated photoluminescence (PL) at room temperature from the films. We found that the 1.6 eV PL may originate from the inetrface region between Si nanocluster and the surrounding native SiO_2 layr and theat the growth of silicon nanocluster-based films with visible light emisiion can be well controlled by means of novel laser ablation methods.

Report

(4 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • 1994 Annual Research Report
  • Research Products

    (38 results)

All Other

All Publications (38 results)

  • [Publications] K.Murakami: "Laser-Plasma Soft X-Ray Absorption Seectroscopy of Laser-Ablated Si and C Particles" AIP Conference Proceedings. 288. 375-384 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Ohyanagi: "Time-and-Space Resolved X-ray Absorption Spectroscopy of Laser Ablated Si Particles" Jpn・J.Appl.Phys.33. 2586-2592 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Makimura: "Time-Resolved X-Ray Absorption Spectroscopy for Laser-Ablated Silicon Particles in Xenor Gas" Jpn.J.Appl・Phys. 35. L735-737 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Murakami: "Dynamics of Si Laser-Ablation Studied by Time-Resolved Soft X-Ray Absorption Spectroscopy" Pmc Intern.Symp・on Material Chemistry on Nuclear Enveonment. 115-121 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Makimura: "Light Emission from Nanometer-Sized Silicon Particles Fabricated with Laser Ablation Method" JPN.J.Appl.Phys.35. 4780-4784 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Makimura: "Visible Light Emission from SiOx Films Synthesized by Laser Ablation" Jpn.J.Appl.Phys.35. L1703-1705 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Murakami, T.Ohyanagi, A.Miyashita and O.Yoda: "Laser-Plasma Soft X-Ray Absorption Spectroscopy of Laser-Ablated Si and C Particles (Invited Paper)" Proc.Intern.Conf.on Laser Ablation, AIP Conf.Proc.vol.288. 375-384 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Ohyanagi, A.Miyashita, K.Murakami and O.Yoda: "Time-and-Space Resolved X-ray Absorption Spectroscopy of Laser Ablated Si Particles" Jpn.J.Appl.Phys.33. 2586-2592 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Ohyanagi, A.Miyashita, K.Murakami and O.Yoda: "Dynamic Behavior of Laser Ablated Si Particles" Proc.6th Intern.Symp.on Advanced Nuclear Energy Research. 881-890 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Miyashita, T.Ohyanagi, O.Yoda and K.Murakami: "Diagnosis of Laser Ablated Carbon Particles Measured by Time-Resolved" Proc.6th Intern.Symp.on Advanced Nuclear Energy Research. 873-880 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Miyashita, T.Ohyanagi, O.Yoda and K.Murakami: "Dynamic Observation of Laser Ablated Carbon Particles Using Time-Resolved X-Ray Absorption Spectroscopy" Surface Reviews and Letters. 3. 191-195 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Ohyanagi, A.Miyashita, K.Murakami and O.Yoda: "Initial Process of Cluster Formation of Laser-Ablated Si Particles" Surface Reviews and Letters. 3. 187-190 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Makimura and K.Murakami: "Dynamics of Silicon Plume Gnenerated by Laser Ablation and Its Chemical Reaction (Invited Paper)" Proc.3rd Intern.Conf.on Laser Ablation (1995, Strasbourg) Appl.Surf.Science. 96-98. 242-250 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Makimura, T.Sakuramoto and K.Murakami: "Time-Resolved X-Ray Absorption Spectroscopy for Laser-Ablated Silicon Particles in Xenon Gas" Jpn.J.Appl.Phys.35. L735-737 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Ohyanagi, A.Miyashita, K.Murakami and O.Yoda: "Sputtering Phenomenon induced by Laser-Ablatied Particles" Jpn.J.Appl.Phys.35. 3436-3439 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Murakami: "Time-Resolved Spectroscopies of Laser Processing -LAPXS and Light Emission Measurements- (Invited Paper)" Proc.12th Yokohama 21st Cent.Forum on Fullerenes and Laser Processing (Yokohama, 1996). 135-142

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Murakami: "Dynamics of Si Laser-Ablation Studied by Time-Resolved Soft X-Ray Absorption Spectroscopy (Invited Paper)" Proc.Intern.Symp.on Material Chemistry on Nuclear Enveronment (Tsukuba, 1996). 115-121

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Makimura, Y.Kunii and K.Murakami: "Light Emission from Nanometer-Sized Silicon Particles Fabricated with Laser Ablation Method" Jpn.J.Appl.Phys.35. 4780-4784 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Makimura, Y.Kunii, N.Ono, and K.Murakami: "Visible Light Emission from SiO_X Films Synthesized by laser Ablation" Jpn.J.Appl.Phys.35. L1703-1705 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Makimura, T.Sakuramoto, Y.Kunii, N.Ono and K.Murakami: "Nanometer-sized Silicon Particles Synthesized by Laser Ablation of a Silicon Target in Rare Gas" Transactions of Material Research Society of Japan. 20. 392-395 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Makimura他: "Time-Resolved X-Ray Absorption Spectroscopy for Laser-Ablated Silicon Particles in Xenon Gas" Jpn.J.Appl.Phys.35. L735-L737 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Ohyanagi他: "Sputtering Phenonaenon induced by Laser-Ablated Particles" Jpn.J.Appl.Phys.35. 3436-3439 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Makimura他: "Light Emission from Nanometer-Sized Silicon Particles Eabricated with Laser Ablation Method" Jpn.J.Appl.Phys.35. 4780-4784 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Murakami他: "Hydrogen Molecules in Crystalline Silicon treated with Atomic Hydrogen" Phys.Reu.Lett.77. 3161-3164 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Makimura他: "Visible Light Emission from SiO_x Films Synthesized by Laser Ablation" Jpn.J.Appl.Phys.35. L1703-L1705 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Fukata他: "Formation of Hydrogen Moleules in n-type Silicon" Jpn.J.Appl.Phys.35. L1069-L1071 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N. Fukata: "Screening Effect of Binding of Si-P-H Complex in Silicon" Materials Science Forum. 196-201. 873-878 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K. Murakami: "Time-Resolved Spectroscopies of Laser Processing(招待講演)" Proc. 12th Yokohama 21st Cent. Forum. (印刷中). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] K. Murakami: "Dynamics of Si haser-Ablation Studied by Time-Resolved Soft X-Ray Absorption Spectroscopy(招待講演)" Proc. Interm.Symp. on Material Chemistry on Nuclean Enverovment. (印刷中). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] T. Makimura: "Pynamics of Silicon Plume Generated by Laser Ablation and Its Chemical Reaction (招待講演)" Proc. 3rd Interm. Conf. on Laser Ablation. (印刷中). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] K. Masuda: "Effect of Ion Rose Rate on Rapid Laser Annealing of Implanted GaAs" J. Elert. Mat.25. 3-5 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] T. Makimura: "Time-Resolved X-Ray Absorption Spectroscopy for haser-Ablated Silicon Particles in a Xenon Gas" Jpn. J. Appl. Phys.(印刷中). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Murakami 他: "Laser-Plasma Soft X-Ray Absorption Spectroscopy of Laser-Ablated Si and C Particles" AIP Conf.Pvoc.288. 375-384 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Ohyanagi 他: "Time-and-Space Resolved X-ray Absorption Spectroscopy of Laser Ablated Si Particles" Jpn.J.Appl.Pbys.33. 2586-2592 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] K.Murakami 他: "Shallow Doner Clusters in InP" Jpn.J.Appl.Pbys.33. 4513-4520 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Ohyanagi 他: "Initicl Process of Cluster Formation of Laser-Ablated Si Particles" Proc.Intern.Symp.on Small Particles and Inorganic Clusters. (印刷中).

    • Related Report
      1994 Annual Research Report
  • [Publications] A.Miyashita 他: "Dynamic Observation of Laser Ablatecl Carbon Panticles Using Time-Rosolvecl X-Ray Absorption Spectroscopy" Pnoc.Intern.Symp.on Small Particles and Inorganic Clusters. (印刷中).

    • Related Report
      1994 Annual Research Report
  • [Publications] K.Masuda 他: "Effects of Collision Processes between Laser Ablated Fragments and Ambient Gases" AIP Conf.Proc.288. 398-400 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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