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Development of Spin Valve type of Static Memory Devices using GMR Effect

Research Project

Project/Area Number 06452213
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionTOKYO INSTITUTE OF TECHNOLOGY

Principal Investigator

NAOE Masahiko  Tokyo Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授 (40016465)

Co-Investigator(Kenkyū-buntansha) MATSUSHITA Nobuhiro  Tokyo Institute of Technology, Faculty of Engineering, Research Associate, 工学部, 助手 (90229469)
NAKAGAWA Shigeki  Tokyo Institute of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (60180246)
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥7,500,000 (Direct Cost: ¥7,500,000)
Fiscal Year 1995: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1994: ¥5,500,000 (Direct Cost: ¥5,500,000)
KeywordsGMR effect / Spin valve / Ion irradiation / Control of Interface / Dual ion beam sputtering / デュアルイオンビームスパッタ法 / 多層膜 / メモリー素子 / Ni-Fe / Cu多層膜 / イオンビームスパッタ
Research Abstract

The giant magnetic multilayrs composed of Ni-Fe and Cu layrs whose thickness were from 10 to 35 A each were deposited on Fe buffer layr by using the dual ion beam sputtering apparatus. Assist ions were radiated to the interfaces between Ni-Fe and Cu layr and the change of giant magneto-resistance (GMR) effect on sub ion assist voltage V_<sub> from 0 to 350 V was investigated. Although the amplitude of magneto-resistivity (MR) ratio was slightly decreased, the field sensitivity of magneto-resistance was fairly improved by ion assist radiation and took the maximum value at V_<sub> of 160 V.
Since Fe-Mn layr, which is commonly deposited on top of the multilayrs and used for applying exchange bias field, has poor corrosion resistivity and is easily to be oxidezed, we proposed the reversed type spin valve structure, in which FeMn layr is deposited on substrate directly and Ni-Fe/Cu/Ni-Fe layrs was deposited on it. We succeeded to deposit FeMn layr with (111) orientation by deposited on Ni-Fe layr with well (111) orientation and ion-assist radiation. Ni-Fe/Cu/Ni-Fe layrs deposited on FeMn layr with (111) orientation possessed relatively well MR ratio and excellent field sensitivity. The exchange bias field of about 20 Oe was achieved in this type of multilayrs and it worked as spin valve device.
It seemed that the spin valve multilayrs deposited in this study has possibility to be applied as static memory device by using lithographic technology.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (36 results)

All Other

All Publications (36 results)

  • [Publications] Masahiro NAOE: "PREPARATION OF SOFT MAGNETIC Fe/To AND Fe : N/Ta : N MOLTILAYERED FILMS WITH LARGE MAGNETIZATION FOR INDUCTIVE RECORDIXG HEAD" Journal of Applied Physics. (発表予定). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Ichihara: "FABRICATION OF PUAL COMPLINEN TARY TYPE OF THIN FILM RECORDING HEADS FOR PERPENDICOLAR MAGNETIC RECORDING" Journal of Applied Physics. (発表予定). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Shigeki NAKAGAWA: "Improvement of Soft Migretism of Fego Coio Sputtered Films by Addition of N and Ta" Journal of Applied Physics. (発表予定). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Yasuyoshi MIYAMOTO: "Enhancement in MR Field Sensitivity of [Ni_<81>Fe_<14>/Cu] Multlayers by Control of Crystallite Orieneation in Fe Buoffer layer" Journal of Magnetics Society of Japan. 18(Si). 409-412 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Yasuyoshi MIYAMOTO: "Effect of Ion Bombardment and Bias Fielding for [Ni_<81>Fe_<19>/Cu] Multiayers with Giart Magnetoresistance Deposited by Dual Jar Bevn Sputeering" IEEE Trans.on Magn.31(6). 4103-4105 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 中川茂樹: "GMRスピンバルブ素子用多層膜の界面調整で特性制御" 日本応用磁気学会誌. 19(S2). 34-37 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Masahiko NAOE and Shigeki NAKAGAWA: "PREPARATION OF SOFT MAGNETIC Fe/Ta AND Fe : N/Ta : N MULTI-LAYERED FILMS WITH LARGE MAGNETIZATION FOR INDUCTIVE RECORDING HEAD" Journal of Applied Physics. (to be published in 1996).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Ichihara, S.Nakagawa, N.Matsushita and M.Naoe: "Theory, Fabrication and Testing of Dual Track Complimentary Type of Thin Film Recording Heads for Perpendicular Magnetic Recording" Journal of Applied Physics. (to be published in 1996).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Shigeki NAKAGAWA,Yasuyoshi MIYAMOTO,Tohru YOSHITANI and Masahiko NAOE: "Improvement of Soft Magnetism of Fe90Co10 Sputtered Films by Addition of N and Ta" Journal of Applied Physics. (to be published in 1996).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Yasuyoshi MIYAMOTO,Tohru YOSHITANI,Shigeki NAKAGAWA and Masahiko NAOE: "Effect of Ion Bombardment and Bias Fielding for [Ni_<81>Fe_<19>/Cu] Multilayrs with Giant Magnetoresistance Deposited by Dual Ion Beam Sputtering" IEEE Trans.on Magn.31 [6]. 4103-4105 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Yasuyoshi MIYAMOTO,Shigeki NAKAGAWA and Masahiko NAOE: "Enhancement in MR field sensitivity of [Ni_<81>Fe_<19>/Cu] Multilayrs by control of crystallite orientation in Fe buffer layr" Journal of Magn.Soc.of Jpn.18 [S2]. 409-412 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Shigeki NAKAGAWA,Yasuyoshi MIYAMOTO,Tohru YOSHITANI and Masahiko NAOE: "Adjustment of Interface and Control of Characteristics of GMR and Spin Valve Devices" Journal of Magn.soc.of Jpn., 19 [S2], Proceedings of PMRS'95. 34-37 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Masahiko NAOE: "PREPARATION OF SOFT MAGNETIC Fe/Ta AND Fe: N/Ta: N MULTILAYERED FILMS WITH LARGE MAGNETIZATION FOR INOUCTIVE RECORDING HEAD" Journal of Applied Physics. (発表予定). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] T. Ichihara: "FABRICATION OF DUAL COMPLIMENTARY TYPE OF THIN FILM RECORDING HEADS FOR PERPENDICULAR MAGNETIC RECORDING" Journal of Applied Physics. (発表予定). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Shigeki NAKAGAWA: "Improvement of Soft Magnetism of Fe_<90>Co_<10> Spyttered Films by Addition of Nand Ta" Journal of Applied Physics. (発表予定). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Yasuyoshi MIYAMOTO: "Enhancement in MR Field Sensitivity of [Ni_<81>Fe_<19>/Cu] Multilayers by Control of Crystallite Orientation in Fe Buffer Layer" Journal of Magnetics Society of Japan. 18(s1). 409-412 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] Yasuyoshi MIYAMOTO: "Effect of Ion Bombard ment and Bias Fielding for [Ni_<51>Fe_<19>/Cu] Mwltilayers with Giant Magnetoresistance Deposited by Deal Ion Bean Spitterry" IEEE Tran. on Magn.31(6). 4103-4105 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 中川 茂樹: "GMR-スピンバルブ素子用多層膜の界面調整と特性制御" 日本応用磁気学会誌. 19(S2). 34-37 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Nobuhiro MATSUSHITA: "Preparation of Co-Zn ferrite films at low substrate temperature by plasma-free DC sputtering for magnetic recording media" J. Appl. Phys.75[10]. 5975-5977 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Akimitsu MORISAKO: "Low-Temperature deposition of hexagonal ferrite films by sputtering" J. Appl. Phys.75[10]. 5969-5971 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Kiyoshi KUGA: "Improvement of anisotropy of perpendicular magnetic recoding tape by Ta addition and Kr sputtering gas" J. Appl. Phys.75[10]. 5987-5987 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Kibong SONG: "Magnetic and optical characteristics of bilayered films composed of Tb-Fe-Co layer with overlayers of Co-Cr, Ni-Fe, Ta and C" J. Appl. Phys.75[10]. 6357-6359 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Takakazu TAKAHASHI: "Structural and magretic characteristics of Co_<31>Cr_<19>/Al multilayers deposited by plasma-free sputtring with Kr gas" J. Appl. Phys.75[10]. 6509-6509 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Masahiko NAOE: "Preparation of Ni-Fe/Cu multilayers with low coercivity and GMR effect by ion beam sputtering." J. Appl. Phys.75[10]. 6525-6527 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Shigeki NAKAGAWA: "Preparation and magnetic properties of Mn_4N films by reactive facing targets sputtering" J. Appl. Phys.75[10]. 6568-6570 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Nobuhiro MATSUSHITA: "Preparation and magnetic properties of BaM films with excellent crystallinity by Xe sputtering" J. Appl. Phys.75[10]. 7131-7133 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Shigeki NAKAGAWA: "Methods to control internal stress in Co-Cr sputtered films on polymer tape for curl-free recording tape" J. Magn. Magn. Mater.134. 354-361 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Masahiko NAOE: "Physics and technolgy of sputtering for depositing magnetic films" J. Magn. Magn. Mater.134. 395-402 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Akimitsu MORISAKO: "The effects of Pb addition on crystal structure and magnetic properties of Ba-ferrite sputtered films" J. of Magn. Soc. of Jpn.18[S2]. 69-72 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Shigeki NAKAGAWA: "Dual track complimentary type of thin film recording heads for perpendicular magnetic recording" J. of Magn. Soc. of Jpn.18[S2]. 213-216 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Masahiko NAOE: "Voidless grainboundary growth process of Co-Cr thin films" J. of Magn. Soc. of Jpn.18[S2]. 331-334 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Yasuyoshi MIYAMOTO: "Enhancement in MR field sensitivity of [Ni_<81>Fe_<19>/Cu] Multilayers by control of crysiallite orientation in Fe buffer layer" J. of Magn. Soc. of Jpn.18[S2]. 409-412 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Kenji NOMA: "Preparation and recording characteristics of rigid disks using Co-Zn ferrite sputtered films for high density magnetic recording with perpendicular anisotropy" J. of Magn. Soc. of Jpn.18[S2]. 447-450 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Masahiko NAOE: "Control of microstructure of Co-Cr thin films by adjusting sputtering condition" J. of Magn. Soc. of Jpn.18[S2]. 479-484 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Nobuhiro MATSUSHITA: "Structure and magnetic properties of a hexagonal type ferrite thin films prepared by facing targets sputtering" Proc. the first Magneto-Electronics Int. Symp.11-14 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Shigeki NAKAGAWA: "Strict control of C-axis orientation and magnetic anisotropy in Co-Cr thin films for perpendicular magnetic recording media" Proc. the first Magneto-Electronics Int. Symp.15-18 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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