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Development of high-performance Schottky diode detector in the submillimeter wave region

Research Project

Project/Area Number 06452236
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 電子デバイス・機器工学
Research InstitutionThe Institute of Physical and Chemical Research (RIKEN)

Principal Investigator

NOZOKIDO Tatsuo  The Institute of Physical and Chemical Research (RIKEN), Frontier Research System, Researcher, フロンティア研究システム, 研究員 (00261149)

Co-Investigator(Kenkyū-buntansha) MIZUNO Koji  The Institute of Physical and Chemical Research (RIKEN), Frontier Research Syste, フロンティア研究システム, チームリーダー (30005326)
CHANG Jan-jue  The Institute of Physical and Chemical Research (RIKEN), Frontier Research Syste, フロンティア研究システム, 研究員 (70271525)
水野 晧司  理化学研究所, フロンティア研究システム, チームリーダー
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥6,800,000 (Direct Cost: ¥6,800,000)
Fiscal Year 1995: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1994: ¥5,800,000 (Direct Cost: ¥5,800,000)
KeywordsSubmillimeterr wave / Terahertz region / Schottky diode / High-performance detector / Reverse honeycomb diode / Modulation / Optical semiconductor switching / 半導体光スイッチング
Research Abstract

The aim of the research is to realize a high-performance Pt/GaAs Schottky Diode (SD) detector operated in the submillimeter wave (SMMW) region with characteristics of high-sensitivity and good mechanical stability. The detector consists of reverse honeycomb SD,whisker antenna and RF microstrip filter which are fabricated using photolithographic technique. Concerning a fabrication process of reverse honeycomb SD,we have successfully developed an ECR plasma anisotropic etching technique to make a dot-matrix pattern (diameter : 0.17mum, pitch : 0.5mum) on SiO_2 with thickness of 4000A without damaging the underlying GaAs epi-layr. This is essential to obtain low-noise SD and the technique would also be applicable to fabrication processes for other semiconductor devices. We also made the whisker antenna and RF microstrip filter and have verified their dimensions as designed. We plan to complete the reverse honeycomb SD,make the detector mount, assemble these components and then measure the detector characteristics.
For the testing and characterization of the detector we have succeeded in developing an optically pumped SMMW laser with highly stable output power and a diplexer with propagation loss of 0.2dB.In the course of the development we have discovered a new lasing line (wavelength : 746.4mum) when using CH_2F_2 gas as a lasing media. We further tried to modulate the SMMW radiation by laser-produced free carriers in semiconductors. Modulation of 214.6mum radiation was carried out by irradiating high-resistivity silicon or GaAs wafers with optical pulses from a Nd : YAG laser. We have achieved SMMW switching with rise time of 6nsec and generation of SMMW short pulses with duration of 10nsec. This optical switching technique is very useful for measuring the speed of SMMW detectors and could be applied to fields like molecular spectroscopy and solid-state physics.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] T. Nozokido: "Optimization of a Schottky Barrier Mixer Diode in the Submillimeter Wave Region." International Journal of Infrared and Millimeter Waves. 15. 1851-1866 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] C. M. Mann: "Measurement and Study of the Embedding Impedance Presented by the Whisker Antenna of a Schottky Diode Corner Cube Mixer." International Journal of Infrared and Millimeter Waves. 15. 1867-1882 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T. Nozokido: "Optimized design of GaAs Schottky-barrier diodes mixer/detector for the Terahertz region." conference digest of the 19-th International conference on Infrared and Millimeter waves. 33-34 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] J. J. Chang: "Fubrication of GaAs Sxhottky-barrier diodes mixer/detetor for the Tera-Hertz region." Conference Digest of the 19-th International Conference on Infrared and Millimeter Waves. 35-36 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 南出泰亜: "光照射によるサブミリ波光の変調" 第56回応用物理学会学術講演会予稿集. 27a-P-9 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 鈴木哲: "サブミクロン径ショットキ・バリア・ダイオードの研究開発(サブミリ波帯のデバイス及び金属/半導体界面評価の新しい手段)" 日本赤外線学会第5回(1995年)研究発表会予稿集. 1-1-1-2 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Nozokido, J.J.Chang, C.M.Mann, T.Suzuki, and K.Mizuno: "Optimization of a schottky Barrier Mixer Diode in the Submillimeter Wave Region" International Journal of Infrared and Millimeter Waves. vol.15. 1851-1866 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] C.M.Mann, T.Nozokido, J.J.Chang, T.Suzuki, and K.Mizuno: "Measurement and Study of the Embedding Impedance Presented by the Whisker Antenna of a Schottky Diode Corner Cube Mixer" International Journal of Infrared and Millimeter Waves. vol.15. 1867-1882 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Nozokido, J.J.Chang, T.Suzuki, C.M.Mann, Y.Kuwano, and K.Mizuno: "Optimized design of GaAs Schottky-barrier diodes mixer/detector for the Terahertz region" Conference Digest of the 19-th International Conference on Infrared and Millimeter Waves. 33-34 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] J.J.Chang, T.Suzuki, T.Nozokido, C.M.Mann, Y.Kuwano, and K.Mizuno: "Fabrication of GaAs Schottky-barrier diodes mixer/detector for the Tera-Hertz region" Conference Digest of the 19-th International Conference on Infrared and Millimeter Waves. 35-36 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] J.J.Chang, T.Nozokido, C.M.Mann, T.Suzuki, and K.Mizuno: "Development of Schottky barrier diodes for the submillimeter wave region" RIKENR Review. no.11. 9-10 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Nozokido, H.Minamide and K.Mizuno: "Generation of submillimeter wave short pulses and their measurements" RIKEN Review. no.11. 11-12 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.nozokido: "Optimization of a Schottky Barrier Mixer Diode in the Submillimeter wave Region" Interraticnal Journal of Infrared and Millimeter Waves. 15. 1851-1866 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] C. M. Mann: "Measurement and Study of the Embeding Impedance presented by the Whiskre Artenna of a Schottky Diode Corner Cube Mixer" Interraticnal Journal of Infrared and Millimeter Waves. 15. 1867-1882 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Nozokido: "Optimized design of GuAs Schottky-barrier diodes mixer/detector for the Teranertz region" Conference Digest of the 19-th International Conference on Infrared and Millimeter Waves. 33-34 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] J. J. Chang: "Fabrication of GaAs Schottky-barrier dlodes mixer/detector for the Tera-Hertz region" Conference Digest of the 19-th International Conference on Infrared and Millimeter Waves. 35-36 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] 南出泰亜: "光照射によるサブミリ波光の変調" 第56回応用物理学会学術講演会講演予稿集. 27a-P-9 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Nozokido: "Optimization of a Schottky Barrier Mixer Diode in the Submillimeter wave Region" International Journal of Infrared and Millimeter Waves. 15. 1851-1866 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] C.M.Mann: "Measurement and Study of the Embedding Impedance Presented by the Whisker Antenna of a Schottky Diode Corner Cube Mixer" International Journal of Infrared and Millimeter Waves. 15. 1867-1882 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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