| Project/Area Number |
06452310
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| Research Category |
Grant-in-Aid for General Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Physical properties of metals
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
HASHIZUME Hiroo Tokyo Inst.of Tech., Res.Lab.of Eng.Materials, Professor, 工業材料研究所, 教授 (10011123)
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| Co-Investigator(Kenkyū-buntansha) |
SAKATA Osami Tokyo Inst.of Tech., Res.Lab.of Eng.Materials, Research Associate, 工業材料研究所, 助手 (40215629)
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| Project Period (FY) |
1994 – 1995
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| Project Status |
Completed (Fiscal Year 1995)
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| Budget Amount *help |
¥5,400,000 (Direct Cost: ¥5,400,000)
Fiscal Year 1995: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1994: ¥4,600,000 (Direct Cost: ¥4,600,000)
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| Keywords | magnetic multilayr / thin-film structure characterization / grazing-angle X-ray scattering / interface roughness / 薄膜構造評価 / 薄膜評価 |
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| Research Abstract |
Designing a practical X-ray reflectometer, we have determined the layr structures and surface/interface structures in various magnetic multilayrs. The reflectometer uses a two-axis diffractometer and asymmetric silicon channel-cut crystals for the monochromator and analyzer at a rotating-anode X-ray generator. The asymmetric Si 111 reflection used in the monochromatorprovides a three times more intense CuK alpha beam than the conventional design. For the analyzer a mechanical slit and an asymmetric channel-cut crystal can be used depending on the resolution requirement. The software correction extended the linear range of photon counting to 5*10^5 cps. The X-ray source is run at a constant output to avoid the shift of the optics setting due to the slight displacement of the X-ray focus on the rotating anode. The reflectometer is controlled by a HITACHI UNIX workstation, which allows rheta, 2rheta and rheta-2rheta scans exploring reciprocal space. Specular reflection profiles are recorded in an overnight measurement and non-specular diffuse scattering profiles can be measured in reasonably short time. The data analysis software developed uses the distorted-wave Born approximation of X-ray scattering, which allows the thickness and interface roughness of individual layrs tp be determined by least-squares fit of specular profiles. The software also includes routines to determine the intra and inter-interface correlations of the roughness structures, and the fractal dimension, from nonspecular data.
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