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Toxicity of specialty chemical substances for manufacturing semiconductors

Research Project

Project/Area Number 06454231
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Hygiene
Research InstitutionKEIO UNIVERSITY

Principal Investigator

SAKURAI Haruhiko  Keio University, School of Medicine, Professor, 医学部, 教授 (70051357)

Co-Investigator(Kenkyū-buntansha) OMAE Kazuyuki  Keio University, School of Medicine, Associate Professor, 医学部, 助教授 (60118924)
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥7,400,000 (Direct Cost: ¥7,400,000)
Fiscal Year 1995: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1994: ¥6,700,000 (Direct Cost: ¥6,700,000)
KeywordsSemiconductor / Diborane / Indium Phosphide / Reproductive Toxicity / Respiratory Toxicity / 精子 / 気管支肺胞洗浄液 / ラット / 許容曝露限界
Research Abstract

1) Diborane
Diborane of 00.1,1 ppm (nominal value) was exposed to 12 male Wister rats in each group for 6 hours a day, 5 days a week for 8 weeks. After exposure, the rats were sacrificed and analysis of bronchoalveolar lavage fluid (BALF) and histopathological examination of the lung were performed. No histopathological changes were observed in all groups. However, dose dependent significant changes of such parameters of lung inflammation, impairment of lung epithelial cells or recovery from the inflammations as increases of polynuclear leucocyte count, enzymic activity of LDH,ALP,SOD and alpha-1-antitrypsin, and total and differential phospholipid in BALF were detected in diboraneexposed groups. These results suggest thet exposure to 0.1 ppm diborane is not safe for preventing lung impairments.
2) Induim phosphide
One, ten or a hundred mg/kg body weight of very fine particles of indium phosphide single crystal (InP,mean diameter=0.2 micrometer) was instilled into the lung of male Fisher 344 rats. Dose-dependent increases of such inflammatory parameters in BALF as polynuclear leucocyte, LDH activity and total phospholipid were observed. Indium consentrations in blood, liver and spleen were also detected dose-dependently. Further studies are necessary to clarify th emechanism of lung inflammation induced by InP,chemical form of indium in the organs and NOAEL or LOAEL of InP inhalation.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] 大前,和幸: "半導体特殊材料の毒性研究の現状" 医学のあゆみ. 170. 1022-1023 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Nomiyama T,Omae K,Uemura T,et al.: "No-observed-effect level of diborane on the respiratory organs of male mice in acute and subacute inhalation experiments" Journal of Occupational Health. 37. 157-160 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Uemura T,Omae K,Nakashima H,et al.: "Acute and subacute inhalation toxicity of diborane in male ICR mice." Archives of Toxicology. 69. 397-404. (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Nakashima H,Omae K,Takebayashi T,et al.: "Acute and subacute inhalation toxicity of dichlorosilane in male ICR mice" Archives of Toxicology. 69. 218-223 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Kabe I,Omae K,Nakashima H,et al.: "In vitro solubility and in vivotoxicity of indium phosphide" Journal of Occupational Health. (in press). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] NomiyamaT,Omae K,Ishizuka C,et al.: "Diborane toxicity assessment around the occupational exposure limit in subacute exposure in male rats" Applied Toxicology and Pharmacology. (in press). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 大前和幸、石塚千鶴: "半導体工業用ガスの有害性と対策。三浦豊彦他編。現代労働衛生ハンドブック(増補改訂2版、増補編)" 労働科学研究所, 389-394 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 桜井治彦編著: "半導体製造用特殊材料の生体影響" SEMIジャパン, 114 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Omae K: "Handoutai Tokushu Zairyou no Dokusei Kenkyuu no Gennjo (The situation of toxicological researches of specialty materials for manufacturing semiconductors)" Igaku-no-ayumi. 170. 1022-1023 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Nomiyama T,Omae K,Uemura T,et al.: "No-observed-effect level of diborane on the respiratory organs of male mice in acute and subacute inhalation experiments." Journal of Occupational Health. 37. 157-160 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Uemura T,Omae K,Nakashima H,et al.: "Acute and subacute inhalation toxicity of diborane in male ICR mice." Archives of Toxicology. 69. 397-404 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Nakashima H,Omae K,Takebayashi T,et al.: "Acute and subacute inhalation toxicity of dichlorosilane in male ICR mice" Archives of Toxicology. 69. 218-223 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Kabe I,Omae K,Nakashima H,et al.: "In vitro solubility and in vivo toxicity of indium phosphide" Journal of Occupational Health. (in press). (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Nomiyama T,Omae K,Ishizuka C,et al.: "Diborane toxicity assessment around the occupational exposure limit in subacute exposure in male rats" Applied Toxicology and Pharmacology. (in press). (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Sakurai H ed.: "Handoutai Seizouyo Takushu Zairyou no Seitai Eikyo (Effects of specialty substances for manufacturing semiconductors on health)" SEMI Japan, Tokyo. (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Omae K,Ishizuka C.: "Handoutai Kougyouyou Gasu no Yuugaisei to Taisaku (Toxicity and control of specialty gases for manufacturing semiconductors.in Miura T,et al.eds.Handbook of Modern Occupational Health)" Rado Kagaku Kenkyuusho (Institute of Labor Sciences) Kawasaki. 389-394 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Nomiyama T, Omae K, Uemura T, et al.: "No-observed-effect level of diborane on the respiratory organs of male mice in acute and subacute inhalation experiments." Journal of Occupational Health. 37. 157-160 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Uemura T, Omae K, Nakashima H, et al.: "Acute and subacute inhalation toxicity of diborane in male ICR mice." Archives of Toxicology. 69. 397-404 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Nakashima H, Omae K, Takebayashi T. et al.: "Acute and subacute inhalation toxicity of dichlorosilane in male ICR mice." Archives of Toxicology. 69. 218-223 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Kabe I, Omae K, Nakashima H, et al.: "In vitro solubility and in vivo toxicity of indium phosphide" Journal of Occupational Health. 38(in press). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Nomiyama T, Omae K, Ishizaka C, et al.: "Diborane toxicity assessment around the occupational exposure limit in subacute exposure in male rats" Applied Toxicology and Pharmacology. (in press). (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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