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Fabrication of high-performance and long lifetime GaAs-based laser on Si substrate

Research Project

Project/Area Number 06555013
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field Applied optics/Quantum optical engineering
Research InstitutionNagoya Institute of Technology

Principal Investigator

UMENO Masayoshi  Nagoya Institute of Technology, Department of Electrical and Computer Engineering, Professor, 工学部, 教授 (90023077)

Co-Investigator(Kenkyū-buntansha) MATSUMOTO Koh  Nippon Sanso Corporation, Tsukuba Laboratries, Manager, つくば研究所, 室長
EGAWA Takashi  Nagoya Institute of Technology, Research Center for Micro-Structure Devices, Ass, 極微構造デバイス研究センター, 助教授 (00232934)
JIMBO Takashi  Nagoya Institute of Technology, Research Center for Micro-Structure Devices, Pro, 極微構造デバイス研究センター, 教授 (80093087)
Project Period (FY) 1994 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥18,000,000 (Direct Cost: ¥18,000,000)
Fiscal Year 1996: ¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1995: ¥4,800,000 (Direct Cost: ¥4,800,000)
Fiscal Year 1994: ¥11,000,000 (Direct Cost: ¥11,000,000)
KeywordsDroplet epitaxy / Metalorganic chemical vapor deposition / Island / Lifetest / Laser on Si / Dislocation / Self-formed / Quantum well structure / 暗線欠陥 / ピニング効果 / 寿命 / 量子井戸レーザー / 熱処理 / 有機金属気相成長法 / シリコン上ガリウム砒素
Research Abstract

We have demonstrated 300 K lasing oscillation of the self-formed AlGaAs/GaAs laser diode on Si grown by metalorganic chemical vapor deposition for the first time. The AlGaAs/GaAs laser diodes with the self-formed GaAs islands active regions on Si substrates showed the threshold current of 260 mA,the threshold current density of 5.4 kA/cm^2 and the lasing wavelength of 791 nm with the FWHM of 2.8 nm under pulsed condition at 300 K.The self-formed GaAs islands on Si grown by the droplet epitaxy exhibited a conical shape with heights of 8 nm and effective diameters of 300 nm. Compared with the conventional quantum well laser diode on Si, the self-formed laser diode on Si exhibited the improved reliability due to the reduction of the dislocation number in the active region.

Report

(4 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • 1994 Annual Research Report
  • Research Products

    (28 results)

All Other

All Publications (28 results)

  • [Publications] T. Egawa et al.: "Optical degradation of InGaN/AlGaN light-emitting diode on sapphire substrate grown by metalorganic chemical vapor deposition" Appl. Phys. Lett.69・6. 830-832 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T. Egawa et al.: "Stimulated emission from current injected InGaN/AlGaN surface emitting diode with Al reflector at room temperature" Electronics Lett.32・5. 486-487 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Hasegawa et al.: "AlGaAs/GaAs light-emitting diode on a Si substrate with a self-formed GaAs islands active region grown by droplet epitaxy" Appl. Phys. Lett.68・4. 523-525 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Murata et al.: "GaAs-based vertical-cavity surface-emitting laser on Si substrate by metalorganic chemical vapor deposition" Jpn. J. Appl. Phys.35・12B. L1631-L1633 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Hasegawa et al.: "Suppression of 〈100〉 dark-line defect growth in AlGaAs/InGaAs single quantum well lasers grown on Si substrates" Jpn. J. Appl. Phys.35・11. 5637-5641 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T. Egawa et al.: "First fabrication of AlGaAs/GaAs laser diodes with GaAs islands active regions on Si grown by droplet epitaxy" Technical digest of International Electron Devices Meeting. 413-416 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Egawa et al.: "Optical degradati on of InGaN/AlGaN light-emitting diodeon sapphire substrate grown by metalorganic chemical vapor deposition" Appl.Phys.Lett.Vol.69, No.6. 830-832 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Egawa et al.: "Stimulated emission from current injected InGaN/AlGaN surface emitting diode with Al reflector at room temperature" Electronics Lett.Vol.32, No.5. 486-487 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Hasegawa et al.: "AlGaAs/GaAs light-emitting diode on a Si substrate with a self-formed GaAs island sactive region grown by droplet epitaxy" Appl.Phys.Lett.Vol.68, No.4. 523-525 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Hasegawa et al.: "Suppression of <100> dark-line defect growth in AlGaAs/InGaAs single quantum well lasers grown on Si substrates" Jpn.J.Appl.Phys.Vol.35, No.12B. L1631-L1633 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Murata et al.: "GaAs-based vertical-cavity surface-emitting laser on Si substrate by metalorganic chemical vapor deposition" Jpn.J.Appl.Phys.Vol.35, No.11. 5637-5641 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Egawa et al.: "First fabrication of AlGaAs/GaAs laser diodes with GaAs islands active regions on Si grown by droplet epitaxy" Technical digest of International Electron Devices Meeting. 413-416 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Egawa et al.: "Optical degradation of InGaN/AlGaN light-emitting diode on sapphire substrate grown by metalorganic chemical vapor dcposition" Appl.Phys.Lett.69・6. 830-832 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Egawa et al.: "Stimulated emission from current injected InGaN/AlGaN surface emitting diode with Al reflector at room temperature" Electronics Lett.32・5. 486-487 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Hasegawa et al.: "AlGaAs/GaAs light-emitting diode on a Si substrate with a self-formed GaAs islands active region by droplet epitaxy" Appl.Phys.Lett.68・4. 523-525 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.hasegawa et al.: "Suppression of <100> dark-line defect growth in AlGaAs/InGaAs single quantum well lasers grown on Si substrates" Jpn.J.Appl.Phys.35・11. 5637-5641 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Murata et al.: "GaAs-based vertical-cavity surface-emitting laser on Si substrate by metalorganic chemical vapor deposition" Jpn.J.Appl.Phys.35・12B. L1631-L1633 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Egawa et al.: "First fabrication of AlGaAs/GaAs laser diodes with GaAs islands active regions on Si grown by droplet epitaxy" Technical digest of International Electron Devices Meeting. 413-416 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Egawa: "Structure of AlAs/GaAs distributed Bragg reflector grown on Si substrate by metalorganic chemical vapor deposition" J. Appl. Phys.77. 3836-3838 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y.Hasegawa: "Influences of dark line defects on characteristics of AlGaAs/GaAs quantum well lasers grown on Si substrate" Jpn. J. Appl. Phys.34. 2994-2999 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 長谷川義晃: "ヘテロエピタキシャル成長技術を用いたSi基板上半導体レーザー" レーザー研究. 23. 506-514 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Egawa: "Degradation mechanism of AlGaAs/GaAs laser diodes grown on Si substrates" Aool Phys. Lett.67. 2995-2997 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Egawa: "2000h stable operation in 0.87 μm light-emitting diode using stress-free InGaP/GaAs/Si" Appl. Phys. Lett.67. 3605-3607 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Egawa: "Stable operation 0.87-μm light-emitting diode on Si substrate using Al-free materials" IEEE Photonics Technology Letters. 7. 1264-1266 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Egawa: "Room-Temperature Pulsed Operation of AlGaAs/GaAs Vertical-Cavity Surface-Emitting Laser Diode on Si Substrate." IEEE Photonics Technology Letters. 61. 681-683 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 長谷川義晃: "歪量子井戸構造を用いたSi上GaAs系レーザーの寿命改善" レーザー研究. 22. 17-24 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Y.Hasegawa: "Vertically-stacked GaAs quantum wires grown on Si substrate by metalorganic chemical vapor deposition." Journal of Crystal Growth. 145. 728-733 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Egawa: "Structure of AlAs/GaAs distributed Bragg reflector grown on Si substrate by metalorganic chemical vapor deposition." J.Appl.Phys.77(発表予定). (1995)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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