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Development of simultaneous in-situ measurements of size, density, and refractive index of particles in rf silane plasmas using a polarization-sensitive laser-light-scattering method

Research Project

Project/Area Number 06555023
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Applied physics, general
Research InstitutionKYUSHU UNIVERSITY

Principal Investigator

SHIRATANI Masaharu  KYUSHU UNIVERSITY,FACULTY OF ENGINEERING,ASSOCIATE PROFESSOR, 工学部, 助教授 (90206293)

Co-Investigator(Kenkyū-buntansha) KONDOH Kaoru  RION INCORPRATION,RESEARCHER, 環測技術部, 主任
KAWASAKI Hiroharu  KYUSHU UNIVERSITY,FACULTY OF ENGINEERING,RESEARCH ASSOCIATE, 工学部, 助手 (10253494)
FUKUZAWA Tsuyoshi  KYUSHU UNIVERSITY,FACULTY OF ENGINEERING,RESEARCH ASSOCIATE PROFESSOR, 工学部, 助手 (70243904)
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥5,400,000 (Direct Cost: ¥5,400,000)
Fiscal Year 1995: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1994: ¥4,500,000 (Direct Cost: ¥4,500,000)
Keywordslaser-light-scattering / two demensional measurement / simultaneous / polarization / particles / plasma CVD / plasma process / silane plasma / レーザ偏光散乱法 / ダスト / バ-ティクル / 屈折率 / その場測定
Research Abstract

A polarization-sensitive laser-light-scattering method is developed for simultaneous in-situ measurements of properties (size, size dispersion, density and refractive index), and two dimensional spatial distributions of size and density of particles formed in processing plasmas. The developed system is applied to observe the growth processes of particulates in a range of their size larger than about 10 nm in rf silane plasmas. A size, a size dispersion (logarithm of a standard deviation of size), a density, and a refractive index of particulates in the plasmas are found to be 10-200 nm, about 0.1,10^7-10^9cm^<-3> and about 3-5i, respectively. The developed two demensional system can view the whole discharge area of 50*200mm^3 illuminated by a sheet laser beam with a spatial resolution of 2*2*2mm^3 and a time resolution of 33 ms, and measure particles larger than 50 nm in size and higher than 10^6cm^<-3> in density. The former such values agree fairly well with ones deduced from scanning electron microscopic (SEM) observation. These particles grow through three phases of nucleation and initial growth, rapid growth and growth saturation. Co-existence of two size-groups of particulates with narrow size dispersions during and after the rapid growth phase verified by the SEM observation may be explained by a model taking into account coagulation between oppositely charged particulates.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] M.Shiratani et al.: "Simultanious in-situ measurements of preperties in rf silane plasmas using a polarization-senstive laser-light scattering method." L.Apple.Phys.79. 104-109 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Shiratani et al.: "Two demensional spatial profiles of size and density of particulates grown in RF silane plasmas" IEEE Trans.Plasma Sci.24(印刷中). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Shiratani et al.: "In-situ polarization-senstive lazer light-scattering method for simultanious measurements of two-demensional spatial size and density distributions of particles in plasmas" J.Vac.Sci.& Technol.A.14(印刷中). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Watanabe et al.: "Growth processes of particles in high frequency silane plasmas" J.Vac.Sci.& Technol.A.14(印刷中). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Shiratani, H.Kawasaki, T.Fukuzawa, T.Yoshioka, Y.Ueda, S.Singh and Y.Watanabe: "Simultaneous in-situ measurements of properties in rf silane plasmas using a polarization-sensitive laser-light-scattering method" J.Appl.Phys.Vol.79. 104-109 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Shiratani, N.Kisghigaki, H.Kawasaki, T.Fukuzawa and Y.Watanabe: "Two dimensional spatial profiles of size and density of particulates grown in RF silane plasmas" IEEE Trans.Plasma Sci.Vol.24, (in press). (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Shiratani, H.Kawasaki, T.Fukuzawa and Y.Watanabe: "In-situ polarization-senstive laser-light scattering method for simultaneous measurements of two dimensional spatial size and density distributions of particles in plasmas" J.Vac.Sci.& Technol.A. Vol.14, (in press). (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y.Watanabe, M.Shiratani, H.Kawasaki, S.Singh, T.Fukuzawa, Y.Ueda and H.Ohkura: "Growth processes of particles in high frequency silane plasmas" J.Vac.Sci.& Technol.A. Vol.14, (in press). (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Masaharu Shiratani: "In-situ polarization-senstive laser-light scattering method for simultanious measurements of two dimensional spatial size and density distributions of particles in plasmas" Journal of Vacuum Science & Technology A. (印刷中). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Masaharu Shiratani: "Two dimensional spatial profiles of size and density of particulates grown in rf silane plasmas" IEEE Transactions on Plasma Science. (印刷中). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Masaharu Shiratani: "Simultanious in-situ measurement of properties in rf silane plasmas using a polarization-sensitive laser-light-scattering method" Journal of Applied Physics. 79. 1-6 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 白谷 正治: "Study on growth Processes of particulates in helium-diluted silane RF Plasmas using scanning electron microscopy" Appl.Phys.Lett.65. 1900-1902 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 白谷 正治: "Formation Processes of Particulates in Helium-Diluted silane RF plasmas" IEEE Trams. Plasma Sci.22. 103-107 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 川崎 仁晴: "レーザ散乱光の偏光特性を利用した微粒子のサイズ・サイズ分散・密度・屈折率のその場同時測定法の開発" 電気関係学会九州支部連合大会論文集. 47. 122-122 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 岩垣 暢浩: "プロセスプラズマ中微粒子のサイズと密度の2次元空間分布その場同時測定の開発" 電気関係学会九州支部連合大会論文集. 47. 123-123 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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