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Developmental Research of Hydrostatic Air Spindle for Ultra-Precision Machine Tools

Research Project

Project/Area Number 06555044
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 設計工学・機械要素・トライボロジー
Research InstitutionTokyo Institute of Technology

Principal Investigator

ONO Kyosuke  Tokyo Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授 (40152524)

Co-Investigator(Kenkyū-buntansha) UEMOTO Hiroki  Ricoh Corporation, Production Technology Laboratory, Staff Engineer, 生産技術研究所, 主任研究員
SAI Choshoku  Tokyo Institute of Technology, Faculty of Engineering, Technician, 工学部, 教務職員 (00242280)
YAMAMOTO Hiroshi  Saitama University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (20220494)
植本 宏紀  (株)リコー, 生産技術研究所, 主任研究員
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥15,300,000 (Direct Cost: ¥15,300,000)
Fiscal Year 1995: ¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 1994: ¥11,500,000 (Direct Cost: ¥11,500,000)
KeywordsHydrostatic Air Bearing / Ultra-Precision Machine Tools / Maximum Dynamic Stiffness / High Damping Design / Circumferential Grooves / Lattice Grooves / Random Force Excitation / RMS Value of Response / ランダム外乱力変位反応 / 回転精度 / 高減衰空気軸受 / 静圧エアスピンドル / 格子形溝軸受面 / スラスト軸受 / ラジアル軸受 / 剛性 / 減衰
Research Abstract

1) Development of the maximized damping design at resonance frequency of bearing-rotor system : Based on the frequency characterisitics of squeeze film damping, we established a design method of maximizing air film damping at resonance frequency of the bearing-rotor system by fabricating the lattice grooves on the radial and thrust bearing surfaces. From this design concept we can increase the damping ratio at resonance up to more than 0.1.
2) Vibration analysis of hydrostatic air spindle including elastic deformation of rotor : Based on the finite element method, we developed the structural modal analysis program of the bearing-rotor system including the elastic deformation of rotor and the equivalent stiffness of the connecting bolts. As a result it is found that not only the three stractural natural frequencies of rotor up to 11 kHz but also air bearing resonances can be predicted more accurately within 5% errors.
3) Development o air spindle design method of minimizing the rms value … More of rotor response caused by the machining force with various kinds of frequency spectrum : We first determined the radial and thrust bearing configurations so as for the static displacement at machining point to be minimized. Next we developed a design method of compromizing the static stiffness and resonance damping ratio in order to minimize the rms value of dynamic response at machining point. The optimal air bearing designs for narrow and wide band spectrum external forces are exemplified. Further the lowest bending vibration frequency of rotor can be increased up to 7kHz.
4) Realization of ultra-precision air spindle with 10nm/N dynamic compliance in terms of 3 sigma : We made an air spindle prototype whose rms value of the dynamic response is minimized to the imposed machining force with uniform amplitude for the frequencies from 0.5 to 5 kHz. From measurement of the bearing characterisitics, it is found that, because of the machining inaccuracy, the effective bearing clearance is 4 to 4.5 mum, so that the static stiffness is 50 to 70% of the theoretical value for 5 mum nominal clearance. The dynamic air film stiffnesses are larger than the calculated ones by 20 to 30% and the damping ratios are 60 to 80% of the calculated ones. However, it is confirmed that the 3 sigma value of the dynamic compliance of the spindle supported freely can be within 10nm/N in both the radial and thrust directions. It is also found that the rms value of nonrepeatable vibration is less than 10 nm. Less

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (17 results)

All Other

All Publications (17 results)

  • [Publications] 山本 浩,小野京右: "格子形溝を有する静圧気体スラスト軸受の高減衰化設計法" 日本機械学会論文集,(c)編. 61. 204-211 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 山本 浩,小野京右: "格子形溝を有する静圧気体ラジアル軸受の高減衰化設計法" 日本機械学会論文集,(c)編. 61. 212-219 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 小野京右,山本 浩,植本浩紀: "格子形溝軸受面を有する高性能静圧エアスピンドルの設計と試作" 日本機械学会論文集,(c)編. 61. 220-227 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 山本 浩,小野京右,都築正浩: "部材の弾性変形を考慮した静圧気体軸受の振動解析" 日本機械学会第72期通常総会講演会講演論文集. (IV). 71-72 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 山本 浩,小野京右,都築正浩: "動剛性の向上を図った静圧エアスピンドルの開発" 日本機械学会第72期通常総会講演会講演論文集. (IV). 73-74 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 山本 浩,小野京右,崔 長植,都築正浩: "ロータの弾性変形を考慮した静圧エアスピンドルの振動解析" 「日本機械学会論文集」. (投稿済み).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 小野京右,山本 浩,崔 長植,都築正浩: "最大の動剛性を有する静圧エアスピンドルの設計" 「日本機械学会論文集」. (投稿済み).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Hiroshi Yamamoto: "Design of High Damping Hydrostatic Gas Thrust Bearing with Grid-Shaped Grooves" Trans.JSME (C). 61-581. 204-211 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Hiroshi Yamamoto: "Design Procedure of High Damping Hydrostatic Gas Radial Bearing with Grid-Shaped Grooves" Trans.JSME (C). 61-581. 212-219 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Kyosuke Ono: "Design and Manufacturing of High-Performance Hydrostatic Air Bearing Spindle with Grid-Shaped Grooves" Trans.JSME (C). 61-581. 220-227 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Hiroshi Yamamoto: "Vibration Analysis of Hydrostatic Gas Bearing Spindle by Considering Elastic Deformation of Rotor" Trans.JSME. (Submitted).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Kyosuke Ono: "Design of a Hydrostatic Air Bearing Spindle with Highest Possible Dynamic Stiffness" Trans.JSME. (Submitted).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 山本浩,小野京右,都築正浩: "部材の弾性変形を考慮した静圧気体軸受の振動解析" 日本機械学会第72期通常総会講演会講演論文集(IV). No.95‐1. 71-72 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 山本浩,小野京右,都築正浩: "動剛性の向上を図った静圧エアスピンドルの開発" 日本機械学会第72期通常総会講演会講演論文集(IV). No.95‐1. 3-74 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 山本 浩,小野 京右: "格子形溝を有する静圧気体スラスト軸受の高減衰化設計法" 日本機械学会論文集C編. 61. 204-211 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 山本 浩,小野 京右: "格子形溝を有する静圧気体ラジアル軸受の高減衰化設計法" 日本機械学会論文集C編. 61. 212-219 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 小野 京右,山本 浩,植本 浩紀: "格子形溝軸受面を有する高性能静圧エアスピンドルの設計と試作" 日本機械学会論文集C編. 61. 220-227 (1995)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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