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Computer Holographic Measurement of Machine Parts by Laser Interferometry

Research Project

Project/Area Number 06555045
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field 設計工学・機械要素・トライボロジー
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

KUBO Aizoh  Kyoto University, Graduate School of Engrg., Professor, 工学研究科, 教授 (10027899)

Co-Investigator(Kenkyū-buntansha) NONAKA Tetsuya  Kyoto University, Graduate School of Engrg., Assistant, 工学研究科, 助手 (00180761)
YABE Hiroshi  Kyoto University, Graduate School of Engrg., Professor, 工学研究科, 教授 (30025936)
FUJIO Hiroshige  Kyoto University, Graduate School of Engrg., Associate Professor, 工学研究科, 助教授 (90026097)
Project Period (FY) 1994 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥8,000,000 (Direct Cost: ¥8,000,000)
Fiscal Year 1996: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 1995: ¥6,700,000 (Direct Cost: ¥6,700,000)
KeywordsInterferometry / Laser / Computer Holographic Measurement / Phase / Data Processing / Digital Data / CCD Image Sensor / Tooth Flank Form / 位相差 / 位相シフト法 / 形状偏差 / 精度測定 / 干渉計 / 形状誤差
Research Abstract

(1) To measure a deviation of objective surface of machine parts, a new interferometer by using the CCD image sensor instead of hologram in the previous proto-type interferometer was developed. The Introduction of the CCD image sensor gives stable measurement.
(2) The brightness data of each interference fringe pattern to reference and objective surfaces is converted to discontinuous phase difference. Also a proposal in this report, that is, the computer holographic technique, was applied to the data processing. The technique enable phase to concatenate efficiently.
(3) The interference fringe pattern on the CCD image sensor involves a thick density of fringes, and it also contains a considerable amount of noise. The problem to be solved such as pattern connected between neighboring fringes is remained, even if it is relieved by the technique mentioned above. For this problem, some methods by reducing the fringes by inserting concave lens in the path of the reference beam, by applying target surface form and by the heterodyne method using two beam sources with different wave lengths were introduced in the experiment. These methods were successful for data processing from the brightness data to the form deviation.
(4) It is not distinct how many interference fringe patterns should be taken by phase shifting method to calculate phase difference from brightness data of interference fringe pattern. From a series of experiment using some plane test pieces, it is cleared that 6-8 sheets of the pattern are sufficient. This result increases considerably efficiency of data processing.

Report

(4 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • 1994 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] 久保愛三: "CCDイメージセンサを用いた干渉計による歯車歯面形状の非接触測定(第1報,位相データ処理法について)" 日本機械学会MPT'94シンポジウム伝動装置講演集. 940-58. 125-128 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 藤尾博重: "CCDイメージセンサを用いた干渉計による歯車歯面形状の非接触測定(第2報,画像処理にもとづく形状・精度の算出)" 日本機械学会MPT'94シンポジウム伝動装置講演集. 940-58. 129-132 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 久保愛三: "レーザ干渉法による機械部品面形状精度の測定における位相処理法について" 日本機械学会論文集(C編). 61-581. 106-114 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Aizoh KUBO: "Digital Phase Data Processing Method for Laser Interferometry Measurement of Gear Tooth Flank" VDI Proc. Of International Conference on Gears. 1230. 1111-1123 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 藤尾博重: "CCDイメージセンサを用いたレーザ干渉法による歯車の歯面形状精度の測定" 日本機械学会論文集(C編). 62-508. 336-344 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A,Kubo: "Contact Free Measurement of Tooth Flank Form using CCD-Image Sensor (1st Rep.Data Processing of Phase)" Proc.of Motion and Power Transmission 94'. Vol.940-58. 125-1128 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Fujio: "Contact Free Measurement of Tooth Flank Form using CCD-Image Sensor (2nd Rep., Tooth Form Deviation of Gear)" Proc.of Motion and Power Transmission 94'. Vol.940-58. 129-132 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A,Kubo: "Digital Data Processing of Phase for Measurement of Surface Form Deviation of Machine Parts by Laser Interferometry" Trans.of JSME (C). Vol.61, No.581. 106-114 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A,Kubo: "Digital Phase Data Processing Method for Laser Interferometry Measurement of Gear Tooth Flank" VDI Proc.of International Conference of Gears. Vol.1230. 1111-1123 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H., Fujio: "Measurement of Gear Tooth Form Deviation by Laser Interferometry Using CCD Image Sensor" Trans. of JSME (C). Vol.62, No.598. 336-344 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 久保愛三: "CCDイメージセンサを用いた干渉計による歯車歯面形状の非接触測定(第1報、位相データ処理について)" 機械学会MPT'94シンポジウム伝動装置講演集. 940・58. 125-128 (1994)

    • Related Report
      1996 Annual Research Report
  • [Publications] 藤尾博重: "CCDイメージセンサを用いた干渉計による歯車歯面形状の非接触測定(第2報、画像処理にもとづく形状・精度の算出)" 機械学会MPT'94シンポジウム伝動装置講演集. 940・58. 129-132 (1994)

    • Related Report
      1996 Annual Research Report
  • [Publications] 久保愛三: "レーザ干渉法による機械部品面形状精度の測定における位相処理について" 日本機械学会論文集(C編). 61・581. 106-114 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] Aizoh KUBO: "Digital Phase Data Processing Method for Laser Interferometry Measurement of Gear Tooth Flank" VDI Proc.of Intl.Conf.on Gears. 1230. 1111-1123 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 藤尾博重: "CCDイメージセンサを用いたレーザ干渉法による歯車の歯面形状精度の測定" 日本機械学会論文集(C編). 62・508. 336-344 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 久保愛三: "レーザ干渉法による機械部品面形状精度の測定における位相処理方法について" 日本機械学会論文集(C編). 61. 106-114 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 久保愛三: "CCDイメージセンサを用いた干渉計による歯車歯面形状の非接触測定(第1報,位相データの処理について)" 日本機械学会MPT'94シンポジウム伝動装置講演論文集. 940-58. 125-128 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] Hiroshige FUJIO: "Laser Holographic Measurement of Tooth Flank Form deviation of Cylindrical Inyolute Gear" ASME, Journal of Mechanical Design. 116. 721-729 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] 久保愛三: "レーザ干渉法による機械部品面形状の測定における位相処理方法について" 日本機械学会論文集C編. 61. 106-114 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 久保愛三: "CCDイメージセンサを用いた干渉計による歯車歯面形状の非接触測定(第1報,位相データの処理について)" 機械学会MPT'94シンポジウム伝動装置講演論文集. 940-58. 125-128 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 藤尾博重: "CCDイメージセンサを用いた干渉計による歯車歯面形状の非接触測定(第2報,画像処理にもとづく形状・精度の算出)" 機械学会MPT'94シンポジウム伝動装置講演論文集. 940-58. 129-132 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Hiroshige FUJIO: "Laser Holographic Measurement of Tooth Flank Form of Cylindrical Involute Gear" ASME Journal of Mechanical Design. 116. 721-729 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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