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Fabrication of Integrated Air Valve Chip Using Shape Memory Ally Thin Film

Research Project

Project/Area Number 06555072
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionYamaguchi University

Principal Investigator

KURIBAYASHI Katsutoshi  Faculty of Engineering Yamaguchi University Professor, 工学部, 教授 (30081251)

Co-Investigator(Kenkyū-buntansha) MURAO Yoshio  Taiyo Tekko Co.LTD Director, 特機事業部, 部長
YOSHITAKE Masaaki  Osaka Prefectual Industrial Research Institute Chief researcher, 主任研究員
OGAWA Soichi  Osaka Prefectual Industrial Research Institute Director, 材料技術部, 部長
SHIMIZU Seiji  Facuoty of Engineering Yamaguchi University Research Associate, 工学部, 助手 (00243626)
TANIGUCHI Takao  Facuoty of Engineering Yamaguchi University Associate Professor, 工学部, 助教授 (20093966)
Project Period (FY) 1994 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥7,200,000 (Direct Cost: ¥7,200,000)
Fiscal Year 1996: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1995: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 1994: ¥4,700,000 (Direct Cost: ¥4,700,000)
KeywordsMicro valve / TiNi alloy / Si substrate / Shape memory alloy / Micromachine / Thin film / バルブモデル / TiNi形状記憶合金 / FEM / RIE / 感光性ガラス
Research Abstract

Micro valves were fabricated using shape memory alloy (TiNi) Thin Film actuator, focusing on the merits of the TiNi actuator, that is, 1) the actuator can be controlled easily by low voltage electrical current, 2) it generates big force, and 3) the thiner film of TiNi, the faster response.
Two types of the micro valves were fabricated using Si wafer and photo machinable glass as the main structure of the valves.
The micro valve of Si wafer was fabricated by depositing TiNi thin film on Si wafer and etching it by RIE (reactive ion etching) to make the valve profile.
The micro valve of photo machinable glass was fabricated by heat and press assembling three pieaces of photo machinable glasses which are micromachined precisely by photo etching method. The characteristics of this type of valve, between the displacement of diaphram, the pressure of air and the temperature of TiNi thin film, were measured for fundamental design datas of the micro valve.

Report

(4 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • 1994 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] 栗林勝利: "SMA薄膜アクチュエータの力学特性と制御" Journal of Micromachine Society,. Vol.7,No.1. 191-198 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Kuribayashi: "A Discrimination System Using Neural Network for SMA Prosthesis" IROS'94 IEEE/RSJ International Conference on Intelligent Robots and Systems. 1832-1839 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Kuribayashi: "A Control System of Millimeter-sized Arm Using Vision Sensor" Proceedings of the 2nd Japan-France Congress. 469-472 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Kuribayashi: "A Study of Heat Process By Using Direct Electric Current Heating for Reversible SMA Thin Film Actuators" Proc.of Sixth International Symposium on Micro Machine and Human Science. 103-110 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Kuribayashi: "A Millimeter-Sized Robot Using SMA and Its Control" Journal of Robotics and Mechatronics. Vol.7 No.6. 449-457 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Kuribayashi: "Reversible Shape Memory Behaviors of TiNi Thin Films Processed by Direct Electric Current Heating" Proc.of the Seventh International Symposium on Micro Machine and Human Science. 131-136 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 清水聖治: "マイクロマシン" 日本機械学会ロボティクス・メカトロニクス講演会'96講演論文集. 1567-1568 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 栗林勝利: "形状記憶合金薄膜を用いたバルブの試作研究" 日本機械学会ロボティクス・メカトロニクス講演会'96講演論文集. Vol.B. 1227-1228 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 栗林勝利: "SF_6を用いた低温RIEにおけるシリコン加工特性の研究" 日本機械学会ロボティクス・メカトロニクス講演会'96講演論文集. Vol.B. 1465-1468 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Katsutoshi Kuribayashi: "Reversible Shape Memory Behaviors of TiNi Thin Films Processed by Direct Electric Current Heating" Proc.of the Seventh International Symposium on Micro Machine and Human Science. 131-136 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Katsutoshi Kuribayashi: "Micromechatronics" 1996 IEEE Conference on Emerging Technologies and Factory Automation. 745-751 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 栗林勝利: "マイクロメカトロニクスの現状について" 第10回アドバンティ・シンポジウム. 89-95 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Katsutoshi Kuribayashi: "A millimeter-Sized Robot Using SMA and Its Control" Journal of Robotics and Mechatronics. 7. 449-457 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Katsutoshi Kuribayashi: "A Study of Heat Process by Using Direct Electric Current Heating for Reversible SMA Thin Film Actuators" Proc.of Sixth International Symposium on Micro Machine and Human Science. 103-110 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 栗林勝利: "Siウエハ上の可逆形状記憶合金薄膜マイクロアクチュエータの試作" 日本機械学会山口地方講演論文集. 235-236 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 清水聖治: "Low Temperature Reactive Ion Etching for Bulk Micromachining" Proceedings of IEEE Symposlum on Emerging Technologles & Pactory Automation. 48-52 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 井上宏之: "マイクロセンサの研究と開発" 日本機械学会中国四国学生会第24回学生員卒業研究発表講演会講演前刷集. 317-318 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 吉田順士: "マイクロマシン用RSMA薄膜の電流による熱処理法の研究" 日本機械学会中国四国学生会第25回学生員卒業研究発表講演会講演前刷集. 255-256 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 緒方保之: "蛇管ワイヤを用いたマスタースレイブマイクロマニピュレータの試作と制御" 日本機械学会中国四国学生会第25回学生員卒業研究発表講演会講演前刷集. 259-260 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 餃田孝之: "マイクロ空気バルブの設計試作と特性研究" 日本機械学会中国四国学生会第25回学生員卒業研究発表講演会講演前刷集. 263-264 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 清水聖治: "RIEによるSi深溝エッチングにおける低温化効果" 日本機械学会ロボティクス・メカトロニクス講演会'95講演論文集. (1995)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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