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Fabrication and properties of nitride field emitter.

Research Project

Project/Area Number 06555086
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionMuroran Institute of Technology

Principal Investigator

ADACHI Hiroshi  Muroran institute of Technology, Department of Electrical and Electronic engineering, Professor, 工学部, 教授 (80005446)

Co-Investigator(Kenkyū-buntansha) NAKANE Hideaki  Muroran institute of Technology, Department of Electrical and Electronic enginee, 工学部, 助教授 (20237332)
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1995: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1994: ¥1,600,000 (Direct Cost: ¥1,600,000)
KeywordsTransition metal nitrides / Fabrication of fine needle / Field emission properties / Stability of field emission current / 遷移金属窒化物 / 微小針の製作 / 還移金属窒化物
Research Abstract

Field emitters of NbN,Nb_2N,TiN,and ZrN were fabricated by nitriding elemental metal needles. The nitriding was carried out by heating metal needles in an ammonia gas.
Before operating the field emitters, they are flash heated for several seconds. Their field emission properties changed with the increase of the flashing temperature. At the beginning the current fluctuation was fundamentally step-and spike-like. However, it changed to random-like when flashed higher than a certain temperature where field emission patterns changed.
The NbN emitters, which had been flash heated at 900゚C,showed the most stable field emission current among the nitride emitters examined here.
It is revealed by using of AES (Auger Electron Spectroscopy) that the field emission properties are largely affected by the concentric components at the emitter surface. Deficiency of nitrogen degrades the emission properties very much and occurred due to a flash heating higher than a temperature where the change of the emission pattern was observed.
It is concluded that the nitride emitters gave stable emission when flash heated at a relatively low temperature, suggesting that the deficiency of nitrogen at the emitter surface does the important role in the stable operation.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (13 results)

All Other

All Publications (13 results)

  • [Publications] 遠藤 礼暁: "窒化ニオブ電界放射陰極の製作とその放射特性" 電子情報通信学会技術研究報告. 93. 31-38 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Michiaki ENDO: "Field Emission Characteristics of Transition Metal Nitrides." Journal of Vacuum Science and Technology. (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Michiaki ENDO: "Fabrication of Transition Metal Nitride Emitters" Applied Surface Science. (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Michiaki ENDO: "Field Emission from Transition Metal Nitrides" Applied Surface Science. (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Michiaki ENDO,Hideaki NAKANE,Hiroshi ADACHI: "Field Emission properties of transition metal nitrides." Technical report of IEICE. ED94-100 (In Japanese). 31-38 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Michiaki ENDO,Hideaki NAKANE,Hiroshi ADACHI: "Fabrication of transition metal nitride emitters." Applied surface science. (To be published). (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Michiaki ENDO,Hideaki NAKANE,Hiroshi ADACHI: "Field emission characteristics of transition metal nitrides." Journal of Vacuum Science and Technology. (To be published). (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Michiaki ENDO,Hideaki NAKANE,Hiroshi ADACHI: "Field emission from transition metal nitrides." Applied surface science. (To be published). (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Michiaki ENDO: "Field Emission Characteristics of Transition Metal Nitrides." Journal of Vacuum Science and Technology. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Michiaki ENDO: "Fabrication of Transition Metal Nitride Emitters" Applied Surface Science. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Michiaki ENDO: "Field Emission from Transition Metal Nitrides" Applied Surface Science. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 遠藤 礼暁: "窒化ニオブ電界放射陰極の製作とその放射特性" 電子情報通信学会技術研究報告. Vol.93. 67-74 (1993)

    • Related Report
      1994 Annual Research Report
  • [Publications] 遠藤 礼暁: "還移金属窒化物電界放射陰極の放射特性" 電子情報通信学会技術研究報告. Vol.94. 31-38 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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