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Atomic Layr Epitaxy and Property of Artificial Superlattice with Perovskite Type Structure

Research Project

Project/Area Number 06555183
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field Inorganic materials/Physical properties
Research InstitutionTokyo Institute of Technology

Principal Investigator

TSURUMI Takaaki  Tokyo Institute of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (70188647)

Co-Investigator(Kenkyū-buntansha) KAMIYA Toshio  Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and, 大学院総理工, 助手 (80233956)
OHASHI Naoki  Tokyo Institute of Technology, Faculty of Engineering, Research Associate, 工学部, 助手 (60251617)
Project Period (FY) 1994 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥9,300,000 (Direct Cost: ¥9,300,000)
Fiscal Year 1996: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1995: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1994: ¥6,400,000 (Direct Cost: ¥6,400,000)
KeywordsPerovskite structure / Artificial superlattice / Molecular beam epitaxy / Atomic Layr epitaxy / Dielectricity, Ion beam / 原子層エピタキシ- / バンド計算 / ペロブスカイト型化合物 / 強誘電体 / 結晶構造解析 / MBE
Research Abstract

In the present study, we have developed a fabrication process of BaTiO_3-SrTiO_3 artificial superlattices with Perovskite type structure by molecular beam epitaxy, and analyzed the crystal structure of the superlattices. We have also measured dielectric property of the superlattices. Results of the research are summarized as follows.
1) BaTiO_3-SrTiO_3 superlattices could be fabricated by atomic layr epitaxy where constituent elements were deposited atomic layr-by-layr using a molecular beam epitaxy technique.
2) Crystal structure analysis method of artificial superlattice was developed. A software which calculates X-ray diffraction pattern of an artificial superlattice with arbitrary structure was developed and used for structure analysis. It was found calculation and experimental results agreed well by taking into account thermal diffusion of Ba and Sr atoms at interface layr between BaTiO_3 and SrTiO_3.
3) In order to prevent the thermal diffusion of constituent elements, a low temperature epitaxy of BaTiO_3 on SiTiO_3 substrates was tried. It was found that epitaxial growth was achieved at 400゚C by irradiating low energy oxygen ion beam.
4) Dielectric property of the artificial superlattice deposited on a conductive SrTiO_3 substrates was measured. Dielectric property was markedly changed with the structure of the superlattices even if the total thickness and chemical composition of the superlattices were identical.

Report

(4 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • 1994 Annual Research Report
  • Research Products

    (16 results)

All Other

All Publications (16 results)

  • [Publications] T.Tsurumi: "Barium Titanate-Strontium Titanate Artificial Superlattice by Molecular Beam Epitaxy" Ext.Abs.7th US-Jpn Seminor on Dielec. & Piezo.Ceram.85-88 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Takaaki Tsurumi: "Fabrication of BaTiO_3/SrTiO_3 Artificial Superlattice and Its Dielectric Properties" Abs.10th.Int.Symp.Appl.Ferroelectrics. 117- (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 石橋ゆりか: "チタン酸バリウム/チタン酸ストロンチウム人工超格子の構造解析" 日本セラミックス協会、1995年会講演予稿集. 597- (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.M.Nam: "Fabrication of BaTiO_3/SrTiO_3 Artificial Superlattices by Atomic Layer Epitaxy and Their Dielectric Properties" J.Koren Phys.Soc.29. S632-S635 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Yurika Ishibashi: "Structural Analysis of Artificial Superlattice by X-ray Diffraction Method" Trans.Mater.Res.Soc.Jpn.(印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Tsurumi, T.Suzuki, Y.Ishibashi, M.Yamane and O.Fukunaga: "Barium Titanate-Strontium Titanate Artificial Superlattice by Molecular Beam Epitaxy" Ext.Abs.7th US-Jpn Seminor on Dielec.& Piezo.Ceram.85-88 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Takaaki Tsurumi, Shun Mitarai, Song Min Nam, Yurika Ishibashi and Osamu Fukunaga: "Fabrication of BaTiO_3/SrTiO_3 Artificial Superlatice and Its Dielectric Properties" Abs.10th.Int.Symp.Appl.Ferroelectrics. 117 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Yurika Ishibashi, Shun Mitarai, Takaaki Tsurumi and Osamu Fukunaga: "Structural Analysis of Artificial Superlattice by X-ray Diffraction Method" Trans.Mater.Res.Soc.Jpn.(in print).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.M.Nam, S.Mitarai, Y.Ishibashi, N.Ohashi, T.Tsurumi and O.Fukunaga: "Fabrication of BaTiO_3/SrTiO_3 Artificial Superlattices by Atomic Layr Epitaxy and Their Dielectric Properties" J.Koren Phys.Soc.29. S632-S635 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.M.Nam: "Fabrication of BaTiO_3/SrTiO_3 Artificial Superlattices by Atomic Layer Epitaxy and Thcir Dielectric Properties" J.Koren Phys.Soc. 29. S632-S635 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Takaaki Tsurumi: "Barium Titanate-Strontium Titanate by Molecular Beam Epitaxy" Ext.Abs.The 6th US-Jpn Seminor Dielectr.Piezo.Ceram.85-88 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Tsurumi: "Fabrication of BaTiO_3/SrTiO_3 Artificial Superlattice and Its Dielectric Properties" Proc.Int.Symp.Appl.Ferroelectrics X. (印刷中).

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Ishibashi: "Structural Analysis of Artificial Superlattice by X-ray Diffraction Method" MRS-J. 20(印刷中).

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Tsurumi,T.Suzuki,Y.Ishibashi,M.Yamane,O.Fukunaga: "Barium Titanate-Strontium Titanate Artificial Superlattice by Malecular Beam Epitaxy" Ext.Abs.7th US-Jpn Seminar on Dielec & Piezo Ceram. 85-88 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Kamiya,T.Tamaka,T,Tsurumi&M.Daimon.: "Calaulation of Band Structure of Porovskite Type Crystals Using Discrete Variational Xα Methad" Jpn.J.Appl.Phys. 33. 3965-3970 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] T.Tsurumi,T.Suzuki,M.Yamane,M.Daimon.: "Fabrication of Barium Titanato-Stromtium Tifanate Artrficial Superlattice by Atomio Layer Epitoxy" Jpn.J.Appl.Phy.33. 5192-5195 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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