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Improved Gas Barrier Properties of PET Fillms by SiOx deposition

Research Project

Project/Area Number 06555192
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field Composite materials/Physical properties
Research InstitutionShizuoka University

Principal Investigator

INAGAKI Norihiro  Shizuoka University, Faculty of Engineering.Professor, 工学部, 教授 (30022015)

Co-Investigator(Kenkyū-buntansha) HASEGAWA Tetsu  Fujimori Kogyo Co., Researcher, 包装研究所, 研究員
TASAKA Shigeru  Shizuoka University, Faculty of Engineering.Assciate Professor, 工学部, 助教授 (10134793)
Project Period (FY) 1994 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥10,900,000 (Direct Cost: ¥10,900,000)
Fiscal Year 1996: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1995: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1994: ¥5,000,000 (Direct Cost: ¥5,000,000)
KeywordsSiOx / Gas barrier / PET film / Packaging material / Plasma Polymerization / Oxygen permeability / Tetramethylsilane / Tetramethoxysilane / 酸素透過量 / ポリエステルフィルム / シラン化合物 / XPSスペクトル
Research Abstract

The project named "Improved Gas Barrier Properties of PET Films by SiOx Deposition" was conducted to improve gas barrier properties of PET film used for food packing materials. The SiOx deposition by plasma polymerization of organic silicone compounds was applied for the improvement. Main results are summerized as follows,
1.SiOx films could be formed by the plasma polymerization of mixtures of tetramethylsilane (TMS) or tetramethoxysilane (TMOS) and oxygen.
2.Mixing of oxygen, when TMS and TMOS were polymerized, contributed the formation of SiOx films.
3.Remote oxygen plasma accelerated the degradation of alkyl groups in TMS and TMOS effectively to deposite SiOx.
4.The mixture of TMOS and oxygen of 60 mol% was a preferable raw material for preparation of SiOx film by plasma polymerization.
The SiOx deposition on PET film showed powerful improvement of gas barrier properties. Oxygen pearmeation rate from the PET film (80nm SiOx thickness) was 14cm^3/m^2-day-atm, which is four times lower than the original PET film without SiOx deposition.

Report

(4 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • 1994 Annual Research Report
  • Research Products

    (45 results)

All Other

All Publications (45 results)

  • [Publications] 山田泰美、田坂茂、稲垣訓宏: "SiOx薄膜合成におけるリモート酵素プラズマの効果" 高分子論文集. 53. 33-40 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki,S. Tasaka,M,Masumoto: "Improved Adhesion between Kapton Film and Copper Metal by plasma Graftpolymerization of Vinylimidazole," Macromolecules. 29. 1642-1648 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Yamada,t. Yamada,S. Tasaka N. Inagaki: "Surface Modification of Poly(tetrafluoroethylene)by Remote Hydrogen Plsama," Macromolecues. 29. 4331-4339 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N. Inagaki,S. tasaka,H. Ohmori S.Mibu: "Improvement in the Adhesion between Copper Metal and Polyimide Substrate by Plasma Polymer Deposition of Cyano Compounds onto Polyimide," Journal of Adhesion Science and Technology. 10. 243-256 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N. Inagaki,S. Tasaka,Y. Sei: "Plasma Polymer Thin films of Zinc Phthalocyanies for NO2 Gas Sensor Device," Polymer Bulletine. 36. 601-607 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 稲垣訓宏: "イオン・プラズマ応用技術" トライポロジスト. 41. 911-916 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki: "Hydrophilic Surfaces (Plasma Treatment and Plasma Polymerization) in Polymeric Materials Encyclopedia" CRC Press(U.S.A), 3115-3123 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki: "Plasma Surface Modification and Plasma Polymerization" Technomic Pub. (U.S.A), 1-265 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Yamada, S.Tasaka, and N.Inagaki: "Effect of Remote Oxygen Plasma for SiOx Film Preparation" Kobunnshi Ronbunshu. 53. 33-40 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, and M.Masumoto: "Improved Adhesion between Kapton Film and Copper Metal by Plasma Graftpolymerization of Vinylimidazole" Macromolecules. 29. 1642-1648 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Yamada, t.Yamada, S.Tasaka, and N.Inagaki: "Surface Modification of Poly (tetrafluoroethylene) by Remote Hydrogen Plsama" Macromolecues. 29. 4331-4339 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, H.Ohmori, and S.Mibu: "Improvement in the Adhesion between Copper Metal and Polyimide Substrate by Plasma Polymer Deposition of Cyano Compounds onto Polyimide" J.Adhesion Sci.Technol.10. 243-256 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, and Y.Sei: "Plasma Polymer Thin films of Zinc Phthalocyanies for NO2 Gas Sensor Device" Polym.Bull. 36. 601-607 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki: "Surface Modification Technology by Plasma Treatment" Tri. 41. 911-916 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, and H.Kawai: "Surface Modification of Aromatic Polyamide Film by Oxygen Plasma" J.Polym.Sci., Polym.Chem.Ed. 33. 2001-2011 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, and M.Masumoto: "Plasma Graftpolymerization of Vinylimidazole onto Kapton Film Surface for Improvement of Adhesion between Kapton Film and Copper" J.Appl.Polym.Sci.56. 135-145 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, and Y.Ikeda: "Plasma Polymerization of Copper Phthalocyanines and Application of the Plasma Polymer Films to NO2 Gas Sensor Device" J.Appl.Polym.Sci.55. 1451-1464 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, and H.Kawai: "Surface Modification of Aromatic Polyamide Film by Aminoethanethiol Solution for Silicon Rubber Composites" J.Appl.Polym.Sci.56. 677-686 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki: "Remote Plasma Treatment of Polymer" Kobunshi Kako. 44. 530-535 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki: "Plasma Treatment-Aromatic Polymers and Aliphatic Polymers" Hyoumen. 33. 215-220 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, and K.Hibi: "Improved Adhesion between Plasma-treated Polyimide Film and evaporated Copper" J.Adhesion Sci.Technol. 8. 395-410 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki, S.Tasaka, and H.Abe: "Adsorption of Carbon Dioxide in Plasma Polymers prepared from Silicon Compounds and Carvon Dioxide Separation Membrane" Polym.Bull.33. 709-715 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N,Inagaki, S.Tasaka, and Y.Suzuki: "Surface Chlorination of Polypropylene Film by CHC13 Plasma" J.Appl.Polym.Sci.51. 2131-2137 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki: "Topics on Plasma Treatment of Polymeric Materials" Nihon Gomu Kyokaishi. 67. 469-476 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki: Hydrophilic Surfaces (Plasma Treatment and Plasma Polymerization) in Polymeric Materials Encyclopedia, J.C.Salamode, Editor-in-Chief. CRC Press(U.S.A.), vol.5, 3115-3123 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inagaki: Plasma Surface Modification and Plasma Polymerization. Technomic Pub.(U.S.A.), 1-265 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 山田泰美、田坂 茂、稲垣訓宏: "SiOx薄膜合成におけるリモート酸素プラズマの効果" 高分子論文集. 53. 33-40 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Inagaki,S.Tasaka,M.Masumoto: "Improved Adhesion between Kapton Film and Copper Metal by plasma Graftpolymerization of Vinylimidazole" Macromolecules. 29. 1642-1648 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Yamada,I.Yamada,S.Tasaka,N.Inagaki: "Surface Modification of Poly(tetrafluorocthylene) by Remote Hydrogen Plsama" Macromolecues. 29. 4331-4339 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Inagaki,S.Tasaka,H.Ohmori,S.Mibu: "Improvement in the Adhesion between Copper Metal and Polyimide Substrate by Plasma Polymer Deposition of Cyano Compounds onto Polyimide" Journal of Adhesion Science and Technology. 10. 243-256 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Inagaki,S.Tasaka,Y.Sei: "Plasma Polymer Thin films of Zinc Phthalocyanies for NO2 Gas Sensor Device" Polymer Bulletine. 36. 601-607 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 稲垣訓宏: "イオン・プラズマ応用技術" トライポロジスト. 41. 911-916 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Inagaki: "Hydrophilic Surfaces (Plasma Treatment and Plasma Polymerization) in Polymeric Materials Encyclopedia" CRC Press (U.S.A.), 3115-3123 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Inagaki: "Plasma Surface Modification and Plasma Polymerization" Technomic Pub. (U.S.A.), 1-265 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Inagaki, S.Tasaka, and Y.Suzuki: "Surface chlorination of polypropylene film by CHCl_3 plasma" Journal of Applied Polymer Science. 51. 2131-2137 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] N.Inagaki, S.Tasaka, and K.Hibi: "Improved adhesion between plasma-treated polyimide film and evaporated copper" Journal of Adhesion Science annd Technology. 8. 395-410 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] N.Inagaki, S.Tasaka, and Y.Ikeda: "Plasma polymerization of copper phthalox\cyanines and application of the pllasma polymer films to NO sensor device" Journal of Applied Polymer Science. 55. 1451-1464 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] N.Inagaki, S.Tasaka, and M.Masumoto: "Plasma graft polymerization of vinylimidazole onto Kapton film surface for improvement of adhesion between Kapton film and copper" Journal of Applied Polymer Science. 56. 135-145 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] N.Inagaki, S.Tasaka, and H.Kawai: "Surface modification of aromatic polyamide film by oxygen plasma" Journal of Polymer Science, Polymer Chemistry Edition. 33. 2001-2011 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 山田泰美、田坂茂、稲垣訓宏: "SiOx薄膜合成におけるリモート酸素プラズマの効果" 高分子論文集. 53. 33-40 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 稲垣訓宏: "共立出版" 高分子の物性3、第4章 表面・界面の改質, 5 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] N.Inagaki: "Technomic Press Publishing Co." Plasma Surface Modification and Plasma Polymerization, 265 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] N.Inagaki,S.Tasaka,and Y.Suzuki: "Surface Chlorination of Polypropylene Film by CHC13 Plasma" Journal of Applied Polymer Science. 51. 2131-2137 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] N.Inagaki,S.Tasaka,and K.Hibi: "Improved Adhesion between Plasma-treated Polyimde Film and evaporated Copper" Journal of Adhesion Science & Technology. 8. 395-410 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] N.Inagaki,S.Tasaka,and H.Abe: "Adsorption of Carbon Dioxide in Plasma Polymers prepared from Silicon Compounds and Carbon Dioxide Separation Membrane" Polymer Bulletin. 33. 709-715 (1994)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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