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High Performance of Ozone Treated Aluminum Alloy Surfaces

Research Project

Project/Area Number 06555216
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Material processing/treatments
Research InstitutionMiyagi National College of Technology

Principal Investigator

MOMOSE Takashi  Miyagi National College of Tecnology Electrical Dept. Professor, 電気工学科, 教授 (90006271)

Co-Investigator(Kenkyū-buntansha) TATEMURA Katsuyoshi  K.K.Kaken Mito Laboratory High Tecnology Development Dept. President, 高度技術開発部, 代表
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 1995: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1994: ¥2,600,000 (Direct Cost: ¥2,600,000)
KeywordsOzone treatment / Ultra-high vacuum materials / Aluminum alloys / Stainless steel / Titanium / Surface contoamination remove / Thermal outgassing rate / Dynamic outgassion rate / 表面汚染の除去 / 熱的ガス放出率 / 動的ガス放出率
Research Abstract

Thermal outgassing rate test of aluminum chamber (2m long and 17 cm in daiameter) treated for 37 hours in oxygen gas including ozone 600 ppm with flowing rate of 0.51/min showed that the rate before baking is 1/2, absorbed gas evolved during basking 1/6, and the rate after baking the same as that of the nontreated chamber.
A used sputter ion pump was tr eated for 40 hours in oxygen gas described above. The pump treated in ozone took 600 min to reach 2x10^<-8> Torr, instead the nontreated pump took 10^4 min.At the ultimate pressure, outgassing rate of the ozone treated was 2/3 of the nontreated.
Degreasing of rolled aluminum foil using ozone was tested two series, one with varying temperature keeping 6 hour exposure and the other with varying treatment time keeping treatment temperature at 150゚C.The former showed that remaining oil compoment expressed by carbon content analyzed by ESCA decreased to one third of the original at 150゚C.The latter showed remaining oil compoment expressed by carbon content by ESCA decreased to one third of the original after 6 hour exosure. The level satisfied the requirement of industry.
The data showed that the effect of the ozone treament varying the conditions is made clear, the treatment is effective for titanium and stainless steel, and slso for degreasing of the rolled aluminum foil.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] T. Momose: "Carbon-free surfaces on aluminum alloys exposed to synchrotron radiation" 宮城工業高等専門学校研究紀要. 21-25 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T. Momose: "Aliminum oxide surface with no carbon detected on the surface and sputter-profiled layer by Auger electron spectroscopy" KEK preprint 94-7,高エネルギー研究所. 1-11 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T. Momose: "O_3 terated metal surfaces with less carbon detected on the surface and in the sputler-piofiled layer by AES" 宮城工業高等専門学校研究紀要. 23-29 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T. Momose: "Auger electron spectroscopy characterization of aluminum alloy exposed to syuchrotron radiation" J. Vac. Sci. Technol. A. 13. 488-492 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T. Momose: "Surface analysis of carbon on ozone treated metals" J. Vac. Sci. Technol. A. 13. 515-519 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Momose, K.Asano, N.Ohta, Y.Kanda, and H.Ishimaru: ""Auger electron spectroscopy characcterization of aluminum alloy exposed synchrotron radiation"" J.Vac. Sci. Technol.A12 (3). 488-492 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Momose, N.Yamada, K.Asano, and H.Ishimaru: ""O_3treated meatlsurfaces with less carbon detected on the surface and in the sputter-profiled layr by Auger electron spectroscopy"" American Vacuum Society, 41st National Symposium, Colorado Convention Center, Denver, Colorado, USA, Oct.24-28, 1994.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Momose: ""O_3treated meatlsurfaces with less carbon detected by Auger electron spectroscopy" IUVSTA International Workshop on "Wall conditioning in large UHV devies"" Chavannes de Bogis-Switzerland, 27th Feb. to 3rd March 1995.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Momose, and H.Ishimaru: ""Surface characteristics of aluminum and of several metals from view pintto reduce dynamic gas desorption"" International Workshop on Interraction of Gases and Soilds Affecting Vacuum Processes, 28th of May to 1st of June 1995, Magdeburg, Germany.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Momose, Y.Maeda, K.Asano, and H.Ishimaru: ""Surface analysis of carbon on ozone treated metals" J.Vac. Sci. Technol.A13 (3). 515-519 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Momose, K.Asano, Y.Katou and H.Ishimaru: ""Surface characteristics of aluminum and of several metals from view piontto reduce dynamic gas desorption"" Vacuum.(accepted).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Momose: "Carbon‐free surfaces on aluminum alloys exposed to syuchrotron radiation" 宮城工業高等専門学校研究紀要. 21-25 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Momose: "Aluminum Oxide Surface mrth No Carbon Detected on the Surface and in this sputter‐profiled Loyer by Auger Electron Spectroscopy" KEK preprint 94‐7. -11 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Momose: "O_3 treated metal surfaces with less carbon detected on the surface and in the sputter‐protiled layer by Auger Electron Spectroscopy(AES)" 宮城工業高等専門学校研究紀要. 23-29 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Momose: "Auger Electron Spectroscopy characterization of aluminum allog exposed to synchrotron rodiation" J. Vac, Sci. Techunol. A. 13. 488-492 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Momose: "Surface auslysis of carbon on ozone treated metals" J. vac. Scir. Teclinol,A. 13. 515-519 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 百瀬 丘: "Ozone Treated Metal Surfaces with Less Carbon Detated on the Surface and in the Sputter‐Profiled Layer by Auger Electron Spectroscopy(AES)" 宮城工業高等専門学校 研究紀要. 31. 23-30 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 百瀬 丘: "Auger Electron Spectroscopy Charactexization of Aluminium Alloy Exposed to Synchrotron Radiation" Journal of Vacuam Science&Technology A. 13. (1995)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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