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Development of a Simple Monitoring Device for Ultra-Trace Silicate lon in Quality Control High-Purity Water Used in Semiconductor Production.

Research Project

Project/Area Number 06555252
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 工業分析化学
Research InstitutionTohoku University

Principal Investigator

HOSHINO Hitoshi  Tohoku University, Faculty of Engineering, Associate Professor., 工学部, 助教授 (20124620)

Co-Investigator(Kenkyū-buntansha) SUGAWARA Katsuyoshi  Miyagi Oki Elect. Co. Manager, 係長
KOBAYASHI Setsu  Miyagi Prefectural Institute of Technology, Chief Scientist, 総括研究員
KONNO Shinichi  Ihara Rinken Ltd. Manager, 係長
古田 大太郎  イハラ理研(有), 開発担当部, 係長
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1995: ¥2,100,000 (Direct Cost: ¥2,100,000)
KeywordsSilicate / Silica / High-Purity Water / Quality Control / Monitoring / 水質管理 / 濃縮法 / 濃縮
Research Abstract

The aim of this project is to develop a simple monitoring device for quantitation of ultra-trace (sub-ppb to ppb) silicate ion in high-purity water using flow preconcentration-spectrophotometric detection system. The basic ideas and the underlying chemistry are :
1.Silicate ion is converted to molybdosilicate blue which has the absorption maximum in near infrared region, at 830nm. Thus, one can devise a cheap detector based on the optosemiconductors, such as LEDs and photodiodes (PD).
2.Anionic molybdosilicate blue is adsorbed on cellulose-type materials as the ion-pair with a large organic cation which is very readily desorbed (eluted) with certain organic solvents. These leads the high-performance flow preconcentration systems.
The optimized system consists of two pump units for sampling and elution, respectively, and a short column (4 cm) packed with ashless pulp. Molybdosilicate blue in 30 ml is concentrated on the ashless pulp column as an ion-pair with octyltrimethyl ammonium ion and the ion-pair is eluted with 80 wt% acetonitrile-water mixture down to the LED-PD detector operated at 830nm.
In order to ensure the practical capability, the prototype equipment is now under field testing in some semiconductor production manufacturers and electric power plants.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (3 results)

All Other

All Publications (3 results)

  • [Publications] 星野 仁: "極微量ケイ酸イオン計測のための前段濃縮-吸光検出装置の開発研究" みやぎ工業技術情報. 137号. 2-4 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] HOSHINO,Hitoshi: "Study of Preconcentration-Photometric Detection System for the Monitoring of Ultra-Trace Silicate Ion in High-Purity Water." Miyagi Technical Information. vol.137. 2-4 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 星野 仁: "極微量ケイ酸イオン計測のための前段濃縮-吸光検出装置の開発研究" みやぎ工業技術情報. 137. 2-4 (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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