Development of Three-Dimensional Microanalysis usig Ion and Electron Dual Focused Beams
| Project/Area Number |
06555254
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 試験 |
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| Research Field |
工業分析化学
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| Research Institution | The University of Tokyo |
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Principal Investigator |
NIHEI Yoshimasa The University of Tokyo, Institute of Industrial Science, Professor, 生産技術研究所, 教授 (10011016)
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| Co-Investigator(Kenkyū-buntansha) |
TANAKA Akihiro ULVAC-PHI inc. , Director of Analysis Research, 上級研究員
OWARI Masanori The University of Tokyo, Environmental Science Center, Associate Professor, 環境安全研究センター, 助教授 (70160950)
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| Project Period (FY) |
1994 – 1996
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| Project Status |
Completed (Fiscal Year 1996)
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| Budget Amount *help |
¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1996: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1995: ¥1,300,000 (Direct Cost: ¥1,300,000)
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| Keywords | Secondary Ion Mass Spectrometry / Auger Electron Spectroscopy / Focused Ion Beam / Three-Dimensional Analysis / Micro Particle |
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| Research Abstract |
We devised two noble microanalysis techniques using ion and electron dual focused beams. The main target of our microanalysis is single microparticle or microstrucuture of IC.Another target of this study is concerned with the fundamentals of ion-solid interactions.
1) Three-dimensional microanalysis
In this method, a focused ion beam (FIB) is used as a cross-sectioning tool. Another focused beam, an electron beam (EB) is used for scanning Auger microscopy measurements on the cross-sections.
2) Electron beam post-ionization in FIB-SIMS
Another product of the combination of the FIB and FB is a new method of the postionization of sputtered neutrals using the simultaneous bombardment of the FIB and EB.The aim of this method is the improvement of sensitivities and quantifications in FIB-SIMS analysis.
In order to realize the two analysis methods, we developed an ion and electron dual focused beam apparatus. The main feature of the apparatus is the simultaneous control of the FIB and EB.Using the apparatus, the precise cross-sectioning of single particle for three-dimensional analysis was performed. As for the post-ionization method, the capability of the simultaneous bombardment was realized by using the scan controller with the fine adjustment function of the beam positioning.
3)FIB-induced Auger election spectroscopy and elemental mapping
We measured FIB-induced Auger electron spectrum for the first time. The spectrum showed good P/B ratios which were enough not only for spectroscopic measurements but elemental mapping. As a result, we obtained a high resolution elemental map using an FIB-induced Al _<LMM> Auger peak. This result provided a new use of an FIB for microanalysis.
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Report
(4 results)
Research Products
(14 results)
