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DEVELOPMENT OF OPTICAL ACTUATORS FOR DRIVING MICROMACHINES

Research Project

Project/Area Number 06650293
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Dynamics/Control
Research InstitutionGIFU NATIONAL COLLEGE OF TECHNOLOGY

Principal Investigator

INABA Seiki  GIFU NATIONAL COLLEGE OF TECHNOLOGY,DEPARTMENT OF ELECTRICAL ENGINEERING,PROFESSOR, 電気工学科, 教授 (30110183)

Co-Investigator(Kenkyū-buntansha) HANE Kazuhiro  TOHOKU UNIVERSITY,FACULTY OF ENGINEERING,PROFESSOR, 工学部, 教授 (50164893)
Project Period (FY) 1994 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1996: ¥400,000 (Direct Cost: ¥400,000)
Fiscal Year 1995: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1994: ¥1,200,000 (Direct Cost: ¥1,200,000)
KeywordsMicroactuator / Microcantilver / Optical Actuator / Optical Fiber / Laser Diode / Photothermal Effect / Micro Vibrator / Micro Gripper
Research Abstract

In order to develop optical actuators for driving micromachines, following studies have been carried out.
1)The photothermal vibration for shape-memory alloys was investigated. The amplitude was very large compared with the other conventional materials. The temperature characteristic of alloy was measured.
2)The optical vibrator using shape-memory alloy and bias spring was developed. The displacement of 3 mm and the generation force 2N were obtained with irradiation of laser power of 300mW.A miniature water flow pump was driven with this actuator.
3)The photothermal rotation of a cantilver around z-axis was investigated. The cantilever was irraditaed with two laserrs of which phases were differentiall by 90 dgree.
4)The micro-pincette was constructed from two flat optical fiber cables. A clad layr was eliminated from the fiber-tip, and a microcantilever was fabricated. Using these two cantilver, a sphere of 0.1 mm was gripped in liquid.
5)The micro-grippeer was developed. Several shape-memory wires were set up around the optical fiver. A sphere with a weight of 50g-w was gripped with irradiation laser power of 100mW.
6)Several optical sensors were developed using the mechanical vibration of the laser-driven microcantilever fabricated from the optical fiber-tip.

Report

(4 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • 1994 Annual Research Report
  • Research Products

    (46 results)

All Other

All Publications (46 results)

  • [Publications] 稲葉成基: "光学式アクチュエータのための形状記憶合金の真空中光熱変位" 真空. 37・3. 282-284 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Inaba: "Temperature dependence of resonance frequency of shape‐menory alloy virrnted photo thermally" Jpn. J. Appl. Phys.33・9A. 5064-5066 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 熊崎裕教: "光ファイバのコアの光熱振動を利用した圧力センサ" 真空. 38・3. 176-178 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Inaba: "Photothermal vilration of fiber core for vibration type sensor" Jpn. J. Appl. Phys.34.4A. 2018-2021 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Hane: "Photothermal and photoctcouslic effeces in optical sensor" Tech. Digest. 13th Sensor Synp.117-120 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumazaki: "Photonochanical sensor using a photochermal vibraeoon of an optical tider in lianid" Tech. Pigese. 13th Sensor Symp.41-44 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumazaki: "Tenperature characteritics of vibration type sensor using micromachined optical fiber-tip" Opt.Rev.30・2. 135-138 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumazaki: "Pressure dependence of resonance characearistics of the microcantilever fabricated from optical fiber" Vacuum. 47・6. 475-477 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Kumazaki: "Optical sensor for deposition thickness using microcantilever tabricated from optical fiber" Procead.11th Int.Conf.Opt.Fiber Sensor. 220-223 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Shimaura: "Light driven detuators using shape‐memory alloy" Tech.Digest.14th Sensor Symp.259‐262 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumazaki: "Deppsition thickness sonsor for ion spullering apparatns" T.IEE.Japan. 117E・2. 105-108 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumazaki: "膜厚測定のためのレーザ駆動ファイバコア振動子のサイズ効果" 真空. 40・3(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Inaba: ""Photothermal displacement of shape-memory alloys for optical actuators in vacuum"" J.Vac. Soc. Jpn.Vol.37, No.3. 282-284 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Inaba: ""Temperature dependence of resonance frequency of shape-memory alloy vibrated photothermally"" Jpn. J.Appl. Phys.Vol.33, No.9. 5064-5066 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumazaki: ""Pressure sensor usng the photothermal vibration of optical fiber core"" J.Vac. Soc. Jpn.Vol.38, No.3. 176-178 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Inaba: ""Photothermal vibration of fiber core for vibration-type sensor"" Jpn. J.Appl. Phys.Vol.34, No.4. 2018-2021 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumazaki: ""Photomechanical sensor using a photothermal vibration of an optical fiber in liquid"" Technical Digest 13th Sensor Symp. 41-44 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Hane: ""Photothermal and photoacoustic effects in optical sensors"" Technical Digest 13th Sensor Symp. 117-120 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumizaki: ""Temperature characteristics of vibratin type sensor using micromachined optical fiber-tip"" Opt. Rev.Vol.30, No.2. 135-138 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumazaki: ""Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber"" Vacuum. Vol.47, No.6-8. 475-477 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumazaki: ""Optical sensor for deposition thickness using microcantilever fabricated from optical fiber"" Proceed. 11th Int. Conf. Opt. Fiber Sensor. 220-223 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Shimamura: ""Light-driven actuators using shape-memory alloys"" Technical Digest 14th Sensor Symp.259-262 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumazaki: ""Deposition thickness sensor for ion sputtering apparatus"" T.IEE Japan. Vol.117-E,No.2. 105-108 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumazaki: ""Size effect of the laser-driven microcantilever fabricated from optical fiber core for measuring deposition thickness"" J.Vac. Soc. Jpn.Vol.40, No.3, (in press). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 稲葉成基: "光学式アクチュエータのための形状記憶合金の真空中光熱変位" 真空. 37・3. 282-284 (1994)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Inaba: "Temperature deperdence of resonance frequency of shape-memory alloy vibrated photothermally" Jpn.J.Appl.Phys.33/9A. 5064-5066 (1994)

    • Related Report
      1996 Annual Research Report
  • [Publications] 熊崎裕教: "光ファイバのコアの光熱振動を利用した圧力センサ" 真空. 38・3. 176-178 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Inaba: "Photothermal vibration of fider core for vibration type sensor" Jpn.J.Appl.Phys.34.4A. 2018-2021 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Hane: "Photothermal and photoaconstic effects in optical sensor" Tech.Digest.13th Sensor Symp.117-120 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumazaki: "Photomechanical sensor using a photothermal vibrato on of an optical fider in liquid" Ted.Pigese,13th Sensor Symp. 41-44 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumazaki: "Temperature characteristics of vibration type sensor using micromachined optical fiber-tip" Opt.Rev.30・2. 135-138 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumazaki: "Pressure dependence of resonance characteristics of the microcanti lever fabricated from optical fiber" Vacuum. 47・6. 475-477 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumazaki: "Optical sensor for deposition thickness using microcantilever fabricated from optical fiber" Proceed.11th Int.Conf.Opt.Fiber Sensor. 220-223 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] A.Shimamura: "Light-driven actuators using shape-memory alloy" Tech.Digest.14th Sensor Symp.259-262 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumazaki: "Deposition thickness sensor for ion Sputtering apparatins" T.IEE.Japan. 117E・2. 105-108 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumazaki: "膜厚測定のためのレーザ駆動ファイバコア振動子のサイズ効果" 真空. 40・3(印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Inaba: "Temperature dependence of resonance freguency of shelpe-memory alloy vibrated Photothermally" Jpn. J. Appl. Phys. 33. 5064-5066 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] 熊崎裕教: "光ファイバのコマの光熱振動を利用した圧力センサー" 真空. 38. 176-178 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S, Inaba: "Photothermal vibration of fibor core for vibration=type sensor" Jpn. J. Appl. Phys.34. 2018-2021 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K. Hane: "Photothermal and photoaconstic effects in optical sensors" Tech. Digest. 13thsymp. Sens.117-120 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Kumazaki: "Photomechanical Sensor Using a Photo thermal vibration of an optical fibor in liqaid" Tech. Digese. 13th Sems. Symp.41-44 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H. Kumazaki: "Temperafure Characteristics of vibrating type sensor using Micromachined opeical fiber-tip" Opt. Rev. ((印刷中))

    • Related Report
      1995 Annual Research Report
  • [Publications] H. Kumazaki: "Pressure deplndence of resonancy charaeleristics of the micwcanthenr fabricaled from opelcal fiber" Vacunm. ((印刷中))

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Inaba: "Temperature dependence of rasondnce freguency of Shape-memory alloy Vlbrated Photothermally" Jpn.J.Appl.Phys.33. 5064-5066 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 熊崎裕教: "光ファイバのコアの光熱振動を利用した圧力センター" 真空. 38(印刷中). (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] S.Inaba: "Photothernal vibration of fiber core for vilyation-tyse Sensor" Jpn.J.Appl.Phys.34(印刷中). (1995)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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