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Long Life Aluminum Alloys for LSI

Research Project

Project/Area Number 06650372
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionMusashi Institute of Technology

Principal Investigator

AKIYA Masahiro  Musashi Institute of Technology, Professor, 工学部, 教授 (60231833)

Project Period (FY) 1994 – 1996
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1995: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1994: ¥1,600,000 (Direct Cost: ¥1,600,000)
KeywordsMg containing Al-Si alloys / Electromigration / Void / Activation energy / Langmuir-Blodgett film / 三元合金膜 / エレクトロマイグレーション / 絶縁膜
Research Abstract

Silicon nitride (SiN) overcoating and dielectric-covered 1.6%-Mg containing Al-Si films have been investigated for electromigration resistance. SiN passivated films were more effective for increasing electromigration resistance than dielectrics-covered films. Furthermore, the dielectrics-covered films with Al_<>O_3 or MgO also improved the lifetime and enhance the activation energy. The increase of void and an void expansion to depth direction were closely related to resistance rise in lifetime test. The samples for overcoating LB films was destroyed by temperature during lifetime test, and enough effect wasn't able to be observed.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (9 results)

All Other

All Publications (9 results)

  • [Publications] 秋谷昌宏: "「Mgを酸化したAl-Si合金薄膜のEM特性」" 応用物理学会 薄膜表面分科会研究会、第2回研究会予稿. 11-12 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M. Akiya,K. Furesawa,H. Yamato: "「Void growth for SiN-passivated Mg-containing Al-Si alloys」" 2nd Intemational Symposium on Metallic Multilayers(MML‘95)Extended Abstract. 306-307 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M. Akiya,H. Yamato,K. Furusawa: "「Overcoating effects on electromigration in Mg-containing Al-Si alloys" 188th Electro chemical Soc. Fall meeting Extended Abstract No. 532. 855-856 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Akiya: "Evaluation of overcoatind effects on electromigration in Mg-containing Al-Si alloys" Thin film and surface section of JJAP, Abstract. 11 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Akiya, K.Furusawa, H.Yamato: "Void growth for SiN-passivated Mg-containing Al-Si alloys" 2nd International Symposium on Metallic Multilayrs (MML'95) Extended Abstract. 306 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] M.Akiya, H.Yamato, K.Furusawa: "Overcoatind effects on electromigration in Mg-containing Al-Si alloys" 188th Electrochemical Soc. Fall meeting Extended Abstract. No.532. 855 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 秋谷昌宏: "「Mgを添加したAl-Si合金薄膜のEM特性」" 応用物理学会 薄膜表面分科会研究会、第2回研究会予稿. 11-12 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M. Akiya, K. Furesawa, H. Yamato: "「Void growth for SiN-passivated Mg-containing Al-Si alloys」" 2nd International Symposium on Metallic Multilayers(MML'95)Extended Abstract. 306-307 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M. Akiya, H. Yamato, K. Furusawa: "「Overcoating effects on electromigration in Mg-containing Al-Si alloys」" 188th Electrochemical Soc. Fall meeting Extended Abstract No. 532. 855-856 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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