PREPARATION AND ITS PROPERTIES OF ORIENTED SnO_2 THIN FILMS

• Project/Area Number: 06650741
• Research Category: Grant-in-Aid for General Scientific Research (C)
• Allocation Type: Single-year Grants
• Research Field: Inorganic materials/Physical properties
• Research Institution: SHIZUOKA UNIVERSITY
• Principal Investigator: KANEKO Shoji HIZUOKA UNIV., Dept.Mater.Sci., Prof., 工学部, 教授 (30022023)
• Co-Investigator(Kenkyū-buntansha): MURAKAMI Kenji SHIZUOKA UNIV., Res.Inst.Electron., Lecturer, 電子工学研究所, 講師 (30182091)
• Project Period (FY): 1994 – 1995
• Project Status: Completed (Fiscal Year 1995)
• Budget Amount: ¥1,500,000 (Direct Cost: ¥1,500,000); Fiscal Year 1995: ¥300,000 (Direct Cost: ¥300,000); Fiscal Year 1994: ¥1,200,000 (Direct Cost: ¥1,200,000)
• Keywords: Spray Pyrolysis / Tin Oxide Film / Preferred Orientation / Transparency / Conductivity / 酸化スズ薄膜

Research Abstract

In 1994, the study was favorably advanced to the goal via the modified routes. The development of a novel source compound by the introducion of desired substitutional groups into the central atom, Sn, of organotin compound was difficult. Therefore, both di-butyltin-di-acetate and tetra-butyltin, of which the thermal decomposition processes had been analyzed by vapor pressure measurement and mass spectroscopy, were used as source compounds here. Further, a newly designed ultrasonic spray pyrolysis apparatus also was working with difficulty in the determination of the operation conditions. As a result, the runs for film deposition on a glass substrate were performed with the present apparatus. Highly oriented tin oxide thin film with (110) or (200) crystalline plane was obtained at a low temperature below 480ﾟC.The microstructure of this oriented films were possibly related to the deposition conditions. In 1995, the electrical and optical properties of the oriented thin films were clarified. The resistivity and transmittance of the oriented film was about 1 OMEGAcm and 85%, respectively. The addition of antimony or fluorine added to the oriented film as a dopant was extremely effective for lowering the resistivity. The above-mentioned findings have been also presented at the three meetings and in our three research papers. Consequently, the objective of this two-year research project has been significantly attained. The applications of these oriented films to a transparent electrode and a novel thin film substrate will be next goals of this project.

Research Products

• [Publications] I.Yagi et al.: "Preferred Orientation of SnO_2 Thin Films Grown from Tri-Butyltin Acetate by Spray Pyrolysis Technique" J.Ceram.Soc.Japn.102. 296-298 (1994)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] K.Murakami et al.: "Oriented Growth of Tin Oxide Thin Films on Glass Substrate by Spray Pyrolysis of Organotin Compounds" J.Am.Ceram.Soc.(in press).
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] S.Kaneko et al.: "Preparation and Properties of Oriented Tin Oxide Thin Films on Glass Substrates by Spray Pyrolysis of Organotin Compounds" Proc.Int.Symp.Surf.Thin Films Electronic Mater.(in press).
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] I.Yagi et al.: ""Preferred Orientation of SnO_2 Thin Films Grown from Tri-Buytltin Acetate by Spray Pyrolysis Technique"" J.Ceram.Soc.Jpn.102. 296-98 (1994)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] K.Murakami et al.: ""Oriented Growth of Tin Oxide Thin Films on Glass Substrate by Spray Pyrolysis of Organotin Compounds"" J.Am.Ceram.Soc.(in press).
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] S.Kanako et al.: "" Preparation and Properties of Oriented Tin Oxide Thin Films on Glass Substrates by Spray Pyrolysis of Organotin Compounds "" Proc.Int.Symp.Surf.Thin Films Electronic Mater.(in press).
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] I.Yagi et al.: "Preferred Orientation of SnO_2 Thin Films Grown from Tri-Buyltin Acetate by Spray Pyrolysis Technique" J. Ceram. Soc. Jpn.102. 296-298 (1994)
• [Publications] K.Murakami et al.: "Oriented Growth of Tin Oxide Thin Films on Glass Substrate by Spray Pyrolysis of Organotin Compouds" J. Am. Ceram. Soc.(in press).
• [Publications] S.Kaneko et al.: "Preparation and 1/2Properties of Oriented Tin Oxide Films on Glass Substrates Grown from Organotin Compounds by Spray..." Proc. Int. Symp. Surf. Thin Films Electron.(in press).