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Hydrogen Analysis by Using of Secondary Ion Mass Spectroscopy

Research Project

Project/Area Number 06650770
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field Structural/Functional materials
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

NARUSHIMA Takayuki  Tohoku University, Fac. of Engineering Associate Professor, 工学部, 助教授 (20198394)

Co-Investigator(Kenkyū-buntansha) IGUCHI Yasutaka  Tohoku University, Fac. of Engineering Professor, 工学部, 教授 (90005413)
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1995: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1994: ¥1,100,000 (Direct Cost: ¥1,100,000)
KeywordsSIMS / silicon carbide / silicon nitride / oxidation / cristobalite / tridymite / silica / water vapor
Research Abstract

(1) Hydrogen analysis
Hydrogen analysis by using of secondary ion mass spectroscopy (SIMS) was carried out for the standard sample (SiO_2 on silicon) in which proton was implanted, and the optimum analytical conditions for hydrogen analysis were clarified. It is important for hydrogen analysis to control the raster size of an ion beam, neutralization, signal gating and so on.
(2) Wet oxidation rate
Wet oxidation rates of chemically-vapor-deposited silicon carbide (CVD-SiC) and silicon nitride (CVD-Si_3N_4) were measured by a thermogravimetric technique. The oxidation films were analyzed by XRD and Raman spectroscopy. The oxidation rate was increased with increasing of water vapor pressure and decreasing of oxygen pressure in the atmosphere. This may be lead by the change of micro-defects in the oxide film (silica). Water vapor in the atmosphere accelerated the crystallization of oxide film at lower-temperatures (around 1373 K) and non-crystallization at higher-temperatures (>1873 K). It was clarified by laser Raman spectroscopy that amorphous silica was at around oxide/gas interface and cristobalite was at around oxide/ceramics interface, i.e., the oxide film formed was a duplex one. These results suggested that the formation of amorphous silica lowered the oxidation resistance of siliconbased ceramics for wet oxidation.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] Y. Iguchi: "Complex Oxide Films Formed during Thermal Oxidation of Liquid Aluminum Alloys" Design Fundamentals of High Temperature Composites, Intermetallics and Metal-Ceramic Systems. 337-343 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T. Narushima: "In-situ Observation of Oxide Films Formed During Thermal Oxidation of SiC-B_4C Composite Using Raman Spectroscopy" Key Engineering Materials. 113. 99-104 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 成島尚之: "ラマン分光法を用いた高温酸化皮膜の“その場"観察装置の開発"" 鉄と鋼. 81. 607-612 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 井口泰孝: "二次イオン質量分析計によるセラミックスの高温酸化皮膜中の水素分析" 青葉工業会報. 39. 14-17 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 成島尚之: "シリコン基セラミックスの高温酸化" 新素材・新コーティングの高温耐環境性. 21-24 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Iguchi et al.: "Complex Oxide Films Formed during Thermal Oxidation of Liquid Aluminum Alloys." Design Fundamentals of High Temperature Composites Intermetallics and Metal-Ceramic Systems. 337-343 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Narushima et al.: "In-situ Observation of Oxide Films Formed During Themal Oxidation of SiC-B_4C Composite Using Raman Spectroscopy" Key Engineering Materials. 113. 99-104 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Narushima et al.: "Development of "In-situ" Observation System for Oxide Films Formed during Thermal Oxidation Using Raman Spectroscopy." Tetsu-to-Hagane. 81. 607-612 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Iguchi et al.: "Hydrogen analysis by Using of Secondary Ion Mass Spectrometer." Aoba-Kogyo-Kaiho. 39. 14-17 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] T.Narushima et al.: "High-Temperature Oxidation of Silicon-based Ceramics." High-Temperature Corrosion Resistance of New-Materials and New-Coatings. 21-24 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Y. Iguchi: "Complex Oxide Films Formed during Thermal Oxidation of Liquid Aluminum Alloys" Design Fundamentals of High Temperature Composites, Intermetallics and Metal-Ceramic Systems. 337-343 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] T. Narushima: "In-situ observation of Oxide Films Formed During Thermal Oxidation of SiC-B_4C Composite Using Raman Spectroscopy" Key Engineering Materials. 113. 99-104 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 成島尚之: "ラマン分光法を用いた高温酸化皮膜の"その場"観察装置の開発" 鉄と鋼. 81. 607-612 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 井口泰孝: "二次イオン質量分析計によるセラミックスの高温酸化皮膜中の水素分析" 青葉工業会報. 39. 14-17 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 成島尚之: "シリコン基セラミックスの高温酸化" 新素材・新コーティングの高温耐環境性. 21-24 (1994)

    • Related Report
      1995 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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